（RE-12297）ITERポロイダル偏光計遠赤外線レーザー及び検出器の製作【掲載期間：2025-10-30～2025-12-22】

（RE-12297）ITERポロイダル偏光計遠赤外線レーザー及び検出器の製作【掲載期間：2025-10-30～2025-12-22】 1/4入札公告次のとおり一般競争入札に付します。令和7年10月30日国立研究開発法人量子科学技術研究開発機構 那珂フュージョン科学技術研究所 管理部長 山農宏之◎調達機関番号 804 ◎所在地番号 08○第37号１調達内容(1)品目分類番号 24(2)購入等件名及び数量 ITERポロイダル偏光計遠赤外線レーザー及び検出器の製作 一式(3)調達件名の特質等 入札説明書及び仕様書による。(4)納入期限 令和11年2月28日(5)納入場所 国立研究開発法人量子科学技術研究開発機構 那珂フュージョン科学技術研究所(詳細は仕様書による)(6)入札方法 落札決定に当たっては、入札書に記載された金額に当該金額の10パーセントに相当する額を加算した金額(当該金額に1円未満の端数があるときは、その端数金額を切り捨てるものとする。)をもって落札価格とするので、入札者は、消費税及び地方消費税に係る課税事業者であるか免税事業者であるかを問わず、見積もった契約金額の110分の100に相当する金額を入札書に記載すること。２競争参加資格(1)国立研究開発法人量子科学技術研究開発機構契約事務取扱細則第10条の規定に該当しない者であること。ただし､未成年者、被保佐人又は被補助人であって、契約締結のために必要な同意を得ている者については、この限りではない。(2)国立研究開発法人量子科学技術研究開発機構契約事務取扱細則第11条第1項の規定に該当しない者であること。(3)令和7年度に国の競争参加資格(全省庁統一資格)を有している者であること。なお、当該競争参加資格については、令和7年3月31日付け号外政府調達第57 号の官報の競争参加者の資格に関する公示の別表に掲げる申請受付窓口において随時受け付けている。(4)調達物品に関する迅速なアフターサービス・メンテナンスの体制が整備されているこ2/4とを証明した者であること。(5)当機構から取引停止の措置を受けている期間中の者でないこと。(6)当機構が要求する技術要件を満たすことを証明できる者であること。３入札書の提出場所等(1)入札書の提出場所、契約条項を示す場所、入札説明書の交付場所及び問い合わせ先〒311-0193 茨城県那珂市向山801番地1国立研究開発法人量子科学技術研究開発機構那珂フュージョン科学技術研究所 管理部契約課 電話(直通)029-277-7958E-mail: nyuusatsu_naka@qst.go.jp(2)入札説明書の交付方法 本公告の日から上記3(1)の交付場所にて交付する。また、電子メールでの交付を希望する者は必要事項(公告掲載日、件名、住所、社名、担当者所属及び氏名、電話番号)を記入し3(1)のアドレスに申し込むこと。ただし、交付は土曜、日曜、祝日及び年末年始(12月29日~1月3日)を除く平日に行う。(3)入札書の受領期限 令和8年1月29日 午後1時30分(4)開札の場所及び日時 国立研究開発法人量子科学技術研究開発機構 那珂フュージョン科学技術研究所 管理研究棟１階 入札室令和8年1月29日 午後1時30分４その他(1)契約手続に用いる言語及び通貨 日本語及び日本国通貨(2)入札保証金及び契約保証金 免除(3)入札者に要求される事項 この一般競争に参加を希望する者は、封かんした入札書及び入札説明書に定める書面を本公告及び入札説明書に定める期限までに提出しなければならない。入札者は、開札日の前日までの間において、当機構から当該書類に関し説明を求められた場合は、それに応じなければならない。(4)入札の無効 本公告に示した競争参加資格のない者の提出した入札書、入札者に求められる義務を履行しなかった者の提出した入札書、その他入札説明書による。(5)契約書作成の要否 要(6)落札者の決定方法 本公告に示した物品を納入できると契約責任者が判断した入札者であって、国立研究開発法人量子科学技術研究3/4開発機構が作成した予定価格の制限の範囲内で最低価格をもって有効な入札を行った入札者を落札者とする。(7)手続における交渉の有無 無(8)その他 詳細は入札説明書による。なお、入札説明書等で当該調達に関する環境上の条件が定められている場合は、十分理解した上で応札すること。５ Summary(1)Official in charge of disbursement of theprocuring entity; Hiroyuki Yamano,Director of Department of AdministrativeServices, Naka Institute for Fusion Scienceand Technology, National Institutes forQuantum Science and Technology(2)Classification of the products to beprocured ; 24(3)Nature and quantity of the products to bepurchased ; Manufacturing of Far-InfraredLaser System and Detectors of PoloidalPolarimeter, 1set(4)Delivery period ; By February 28, 2029(5)Delivery place ; Naka Institute for FusionScience and Technology, NationalInstitutes for Quantum Science andTechnology(6)Qualifications for participating in thetendering procedures ; Suppliers eligiblefor participating in the proposed tender arethose who shallA not come under Article 10 of the Regulationconcerning the Contract for NationalInstitutes for Quantum Science andTechnology, Furthermore, minors, Personunder Conservatorship or Person underAssistance that obtained the consentnecessary for concluding a contract may beapplicable under cases of special reasonswithin the said clause,B not come under Article 11(1) of theRegulation concerning the Contract forNational Institutes for Quantum Scienceand TechnologyC have qualification for participating intenders by Single qualification for everyministry and agency during fiscal 2025,4/4D prove to have prepared a system to providerapid after-sale service and maintenancefor the procured products,E not be currently under suspension ofbusiness order as instructed by NationalInstitutes for Quantum Science andTechnology,F be able to prove that the technicalrequirements required by the NationalInstitutes for Quantum Science andTechnology are met. (7)Time limit for tender ; 1:30PM,January 29, 2026(8)Contact Section; Contract Section,Department of Administrative Services,Naka Institute for Fusion Science andTechnology, National Institutes forQuantum Science and Technology, 801-1Mukouyama, Naka-shi, Ibaraki-ken Japan,TEL：029-277-7958E-mail:nyuusatsu_naka@qst.go.jp(9)Please note the environmental conditionsrelating to the procurement if they are laiddown in the tender documents. ITERポロイダル偏光計遠赤外線レーザー及び検出器の製作Manufacturing of Far-Infrared LaserSystem and Detectors of PoloidalPolarimeter仕様書国立研究開発法人量子科学技術研究開発機構那珂フュージョン科学技術研究所ＩＴＥＲプロジェクト部 計測開発グループ1目次1 一般仕様.. 21.1 件名.. 21.2 目的及び概要.. 21.3 契約範囲.. 21.4 納期.. 21.5 納入場所及び納入条件.. 21.6 納入物.. 21.7 検査条件.. 21.8 提出図書.. 21.9 支給品及び貸与品.. 31.10 品質保証.. 3一般事項.. 3品質保証に関する要求.. 3品質保証に関する情報の入手.. 6品質計画書(Quality Plan: QP)について.. 6トレーサビリティ.. 6品質監査について.. 7提出図書の文書管理.. 7逸脱許可申請(Deviation Request).. 7不適合時の処理.. 81.11 情報セキュリティの確保.. 101.12 知的財産権及び技術情報等の取扱い.. 101.13 イーター調達に係る貨物の免税輸入について.. 101.14 グリーン購入法の推進.. 101.15 コンピュータプログラムの作成について.. 101.16 打合せについて.. 101.17 月例報告書.. 111.18 協議.. 111.19 下請け業者への業務委託について.. 111.20 適用法規・規格等.. 112 技術仕様.. 132.1 概要.. 13遠赤外線レーザーおよびその付帯機器について.. 13本契約開始から完了までの流れ.. 142.2 遠赤外線レーザーの調達について.. 14別表１ 提出図書一覧.. 17付録１ 適用すべきITER文書.. 19付録2 別添図書一覧.. 2021 一般仕様1.1 件名ITERポロイダル偏光計遠赤外線レーザー及び検出器の製作1.2 目的及び概要イーター計画において、国立研究開発法人量子科学技術研究開発機構(以下「QST」という。)はポロイダル偏光計を調達する。ポロイダル偏光計(略称PoPola)は、遠赤外レーザー光の偏光状態(偏光方位角、楕円率角)の測定に基づき、ITERのプラズマ中心部における電流分布の計測を行う装置である。計測室から出射した偏光測定用レーザー光(レーザー波長118.8 μm)は、伝送光学系で伝搬された後、真空容器内のプラズマに入射され、真空容器内に設置されたレトロリフレクタで反射され、往路と同じ光路にて計測室まで伝送される。本件はこのポロイダル偏光計測に使用する遠赤外線レーザー及び検出器の製作に関する契約である。1.3 契約範囲(1) 遠赤外線レーザーの製作(2) レーザー制御用PC及び制御用ソフトウェアの製作(3) 提出図書(仕様書第1.8項)の作成1.4 納期令和11年2月28日1.5 納入場所及び納入条件(1) 納入場所QST 那珂フュージョン科学技術研究所 先進計測開発棟(2) 納入条件受注者の工場にて置き場渡し1.6 納入物(1) 仕様書第1.8項に定める提出図書(紙媒体及び電子ファイル) 一式(2) 遠赤外線レーザー １セット(3) レーザー制御用PC及び制御用ソフトウェア １セット1.7 検査条件QST職員が製作物の員数及び提出図書を確認し、かつ、本仕様に定める作業がなされたことを確認した時をもって検査合格とする。1.8 提出図書受注者は別表１に示す図書を作成すること。提出図書は、紙媒体の他、電子ファイル(ワード3ファイルやエクセルファイル、dxfファイル、STEPファイルなど編集可能な元ファイル)をCD-ROM等のメディアに格納して提出すること。提出図書の確認方法は以下の方法で行う。QSTは、確認のために提出された図書を受領したときは、期限日を記載した受領印を押印して返却する。また、当該期限までに審査を完了し、受理しない場合には修正を指示し、修正等を指示しないときは、受理したものとする。ただし、再委託承諾願については、QSTが確認後、書面で回答する。1.9 支給品及び貸与品(1) 支給品なし(2) 貸与品CAD図面(CATIA形式、STP形式、IGES 形式にて貸与可能)貸与時期：契約締結後速やかに貸与方法：電子メール又はQSTが管理するオンラインストレージサーバを用いる。返却方法：契約終了までに貸与したデータを削除すること。1.10 品質保証一般事項(1) 受注者は下記の項目を保証するよう適切な実施可能な品質システムを遂行すること。1 契約要求事項に実施内容が合致していること。2 規格等に準拠していることを示す証拠が維持/保存されること。(2) 受注者の遂行する上記の品質システムは下記を満たすこと。1 認証された品質規格に基づくものであること。2 契約に基づき実施される製作及び試験検査等の全ての行為を網羅するものであること。3 作業の開始に際して、QSTに提出する品質計画書に記載されていること。(3) 受注者は、再委託先についても有効な品質システムを備えることを保証すること。再委託先業者がこれを満たさなかった場合、受注者は再委託先の施設等において品質を確立/維持するために必要な全ての活動の責任を負うものとする。品質保証に関する要求品質保証については、「イーター調達取決めに係る契約の品質保証に関する特約条項」(別添図書１)に定められたとおりとする。本契約の設計対象機器の各種等級は品質クラス３(QC3)であり、品質分類の等級に基づく要求事項は表 1及び表 2のとおりとする。4表 1 品質分類の等級に基づく要求事項(灰色部分が本件に適用される)品質クラス1、２ (QC1,2) 品質クラス3 (QC3)設計設計レビューと独立検証を含む設計管理当事者間の他の合意が無い限り、設計レビュー及び独立検証は不要ソフトウェア／モデルライフサイクル管理を含む設計、運転に使用するソフトウェア及びモデルの許容使用するソフトウェアの同定とモデルの使用の評価当事者間の他の合意が無い限り不要調達／文書・記録品質計画書(Quality Plan) 品質計画書(Quality Plan)検査・試験計画書(Inspection Plan)当事者間の他の合意が無い限り不要適合基準のレビュー特殊工程のクオリフィケーションのレビュー製作関連図書(納入時)規格基準に基づくコンプライアンス宣言、材料証明及び検査図書(納入時)規格基準に基づくコンプライアンス宣言、材料証明及び検査図書リリースノート(所有権移転時) リリースノート(所有権移転時)完成図書(所有権移転時) 完成図書(所有権移転時)製作製作・検査計画書(MIP)当事者間の他の合意が無い限り不要製作レビュー(MRR)品質管理QC1は表 2のQCL1を適用。QC2は表 2のQCL2を適用。QC3は表 2のQCL3を適用。建設、据付、アセンブリ検査計画書 検査計画書建設レビュー 建設レビュー品質監査 メーカーでの受注者監査当事者間の他の合意により省略あるいは文書レビューによる確認製品の納入・輸送リリースノート輸送通知書リリースノート輸送通知書輸送計画書当事者間の他の合意が無い限り不要サンプリング等による最低限の検査・検証QST の要求又は製作者の手順書に基づく保管・保存注記:(1) クラス４のシステム及び機器は特段のＱＡ要求事項はない。(2) ‘独立’ とは、基の設計者に含まれない個人、グループ、部署、部門を意味する。 ‘独立’はまた第三者機関を指してもよい。5表 2 品質分類に基づく検査・確認ポイント(灰色部分が本件に適用される)品質管理レベル(QCL)項 目 レベル１ レベル2 レベル3製作レビュー(MRR)・MRR実施時 ・MRR実施時 ―材料調達・基準を満たさない場合に重大なリスクを及ぼす可能性がある場合― ―(新しい手法などの)重要とみなされる特殊作業手順(成形、切削、熱処理など)・(曲げ加工等の)基準を満たさない場合に重大なリスクを及ぼす可能性がある場合(プロセスの認定用)・初回検査・定期的な検査・初回検査・基準を満たさない場合に重大なリスクを及ぼす可能性がある場合・基準を満たさない場合に重大なリスクを及ぼす可能性がある場合溶接方法・溶接認証のモックアップ確認試験(スポットチェック)・溶接認証(WPQR, WPQなど)― ―・溶接の重要作業(仮組、初回活動、溶接材料の保管状態、溶接記録確認など)・重要で前例のない初回の作業(仮組、初回活動、溶接材料の保管状態、溶接記録確認など)・その後、ランダムに確認非破壊検査(NDT)及び関連プロセス・NDEの重要な作業(加工・成形後のVT/DT/PT/UT、溶接前・中・後のVT/DT/PT/UT/RTなど)・重要で前例のない初回の作業(加工・成形後のVT/DT/PT/UT、溶接前・中・後のVT/DT/PT/UT/RTなど)・その後、ランダムに確認メーカーによる検査完了後の解析報告を含む変更履歴資料のレビューと承認補修方法補修の難易度による補修作業と検査への立会・基準を満たさない場合に重大なリスクを及ぼす可能性がある場合最終目視検査・寸法チェック重大なリスクがあると判断された場合重大なリスクがあると判断された場合―特殊試験(リーク試験、モーター動作試験など)重大なリスクがあると判断された場合圧力強度試験 PE 及び NPE (*)が適用される場合で、重大なリスクがあると判断された場合最終受入試験(FAT)重大なリスクがあると判断された場合清掃、酸洗、表面安定化処理、取扱・梱包、輸送、保管・基準を満たさない場合に重大なリスクを及ぼす可能性がある場合― ―注記： (*) 本契約で製作する機器は、フランスの圧力容器規制(PE)及び原子力圧力容器規制(NPE)が適用されない。6品質保証に関する情報の入手(1) 本仕様に関し、QST(及びイーター機構を含む。)は書面による通知を行うことにより、受注者(受注者の再委託先も含む。)の施設等において、作業の進捗状況確認及び試験検査に立ち会う権利を有するものとする。なお、上記を実施する日時については協議の上、決定する。(2) 受注者(受注者の再委託先も含む。)はQST(及びイーター機構も含む。)に対し、その要求があった場合、本契約の適切な管理運営を証明するために必要な文書及びデータを提供又は提示するものとする。品質計画書(Quality Plan: QP)について受注者は、本仕様書による要求事項をどのように満足させるかを示す、品質計画書をイーター機構指定様式(“QP Template for suppliers and subcontractors”)(別添図書７)で英語により作成し提出すること。品質計画書には、次の内容を含む。・品質目標・適用範囲・品質保証体制(資源配分、義務、責任、権限など)・図書管理・製造管理(適用される手順、方法、指示など)・記録及びその管理方法・変更管理・不適合管理・公式及び非公式の情報交換の方法品質計画書は、原則として受注者のみならず品質に係る重要業務を実施する下請け業者を含む供給者が提出しなければならない。品質に係る重要業務については、QSTと受注者の協議の上決定する。契約締結後速やかに、QSTへ品質計画書を提出し確認を受けなければならない。ただし、下請け業者の品質計画書は、下請け業者決定後 2 週間以内に QST へ提出し確認を受けること。 ITER機構及びQSTが参加する会議を開き、製作確認図及び検査要領書の内容について説明すること。同会議をManufacturing Readiness Review(MRR)と呼ぶ。MRRで付議された内容をQSTが了承した後に、受注者は製作を開始することができる。製作確認図は単一の図書としてもよいし、複数の図書から構成されるものでも良い。複数の図書から構成される場合、完成した図書からQSTが確認し、確認された図書の範囲の作業を開始することができる。製作確認図を英語で作成し、以下の内容を含めること。(1) 光学機器配置図(2) 真空系統図(3) 圧縮空気系統図(4) 冷却水系統図(5) 制御系展開接続図(6) 単線結線図(7) 制御盤外観図(8) 端子配列図(9) 部品リスト(10) 製作図面(11) 制御用PLCの機能仕様書および技術仕様書(信号リストを含む)(12) インターロック条件書(13) 制御用PCの機能仕様書および技術仕様書(変数リストを含む)(14) 購入部品の購入仕様書受注者は試験検査要領書(検査図面を含む)を英語で作成し、以下の検査を実施するための要領を記載すること。(1) 寸法検査16(2) 水路耐圧試験：水圧テストポンプで0.2MPaを30分以上印加し、圧力計の指示値が下がらないこと。(3) 真空リークテスト：CO2レーザー管の到達圧力が10 Pa以下、FIR共振器の到達圧力が3Pa以下、シュタルクセルの到達圧力が3 Pa以下であること。(4) 導通及び絶縁検査：CO2レーザー管はDC10kV印加時に絶縁抵抗値が25MΩ以上、シュタルクセルはDC2kV印加時に絶縁抵抗値が25 MΩ以上あること。(5) 動作確認試験(ア) ガス圧制御動作確認試験：① CO2混合ガスを0.1～2 slmの範囲で供給できること。② ヘリウムガスを0.1～4 slmの範囲で供給できること。(イ) 遠隔操作確認試験：制御PCからFIRレーザーを発振させられること。(ウ) インターロック動作確認試験：インターロック条件書に記載されたインターロックが動作すること。(6) レーザー発振試験(ア) 励起用CO2レーザーの発振試験：波長9.6μm、出力150 Wのレーザー光が出力されること。(イ) FIRレーザーの発振試験：波長119μmのレーザー光が出力されること。また、図 2において「レーザー光(λ=119μm)」と注釈が入っている場所においてレーザーパワーが600 mW以上であること。(7) 周波数安定度試験：FIRレーザーを600 mW以上で出力しているときの10分間の周波数安定度を測定すること。(8) 外観検査(9) 員数検査受注者は、遠赤外線レーザーの付帯機器(制御用PC、チラー及びアルコールガス供給装置)を発注する前に、発注仕様書(英語)を作成すること。発注仕様書が 1.8 項に記載した確認方法で確認された後に、受注者は付帯機器の発注を開始してよい。もし、遠赤外線レーザーの製作確認図が確認される前に一部の部品を先行手配したい場合は、受注者は同様に発注仕様書(英語)を作成し、1.8項に記載した方法で確認を得た後に同部品を手配して良い。受注者は、遠赤外線レーザーとその付帯機器を使用し、QSTが確認した検査要領書に則って検査を行うこと。検査後は、検査の結果を検査成績書(英語)に記載して提出すること。受注者は遠赤外線レーザーのマニュアルを作成するとともに、すべての構成部品のマニュアル(例えばマスフローコントローラのマニュアル)も提出すること。 以上17別表１ 提出図書一覧図書名 和文/英文 JADA文書番号 提出時期 部数 確認 備考1 作業工程表 英文 JADA-55353WS3001 契約後速やかに 1部 不要2-1Quality Plan (契約者の品質計画書)英文 JADA-55353PL3001 契約後速やかに 1部 要 仕様書第1.10.4項参照2-2Subcontractor Quality Plan(重要工程を実施する再委託先の品質計画書)英文 JADA-55353PL30yy再委託先との契約後2週間以内に1部 要 仕様書第1.10.4項参照3-1 打合せ資料 和文 JADA-55353GD30yy 打ち合わせまでに 1部 不要 仕様書第1.16項参照3-2 打ち合わせ議事録 和文 JADA-55353MI3yyy 打ち合わせ後2週間以内 1部 不要 仕様書第1.16項参照4 月例報告書和文英文併記JADA-55353PR3yyy 毎月月末までに 1部 不要 仕様書第1.17項参照5 JADA文書管理番号一覧 和文 JADA-55353GD32yy 更新後速やかに 1部 不要 仕様書第1.10.7項参照6 Deviation Request 英文 JADA-55353DR3yyy許可を要求する必要が生じた時、直ちに1部 要 仕様書第1.10.8項参照7 不適合報告書 英文 JADA-55353NR3yyy報告すべき事象が生じた時、直ちに1部 要 仕様書第1.10.9項参照8 再委託承諾願(QST指定様式) 和文 JADA-55353GD31yy再委託先の作業開始2週間前までに1部 要 再委託先がある場合提出のこと9再委託先と契約したことの通知書(作業場所の情報も含む)英文 JADA-55353GD31yy再委託先の作業開始2週間前までに1部 不要 再委託先がある場合提出のこと10 連絡票 和文 JADA-55353NO3yyy 必要が生じた場合速やかに 1部 不要協議の内容及び結果など、受注者とQSTの間の伝達事項をエビデンスとして残す場合の書類11 遠赤外線レーザーの製作確認図 英文 JADA-55353TS3001遠赤外線レーザーの製作開始前までに1部 要 仕様書第2.2項参照1812 遠赤外線レーザーの検査要領書 英文 JADA-55353NP3001遠赤外線レーザーの製作開始前までに1部 要 仕様書第2.2項参照13 遠赤外線レーザーの検査成績書 英文 JADA-55353IR3001 納入時 1部 不要 仕様書第1.10.5項参照14 遠赤外線レーザーのマニュアル 英文 JADA-55353FD3001 納入時 1部 不要 仕様書第2.2項参照15 制御用PCの発注仕様書 英文 JADA-55353PS3001 制御用PCの発注前までに 1部 要 仕様書第2.2項参照以上19付録１ 適用すべきITER文書N Applicable Document1 Procedure for Analyses and Calculations (22MAL7 v6.8)2 Procedure for Identification and Controls of Items (U344WG v2.2)3 Quality Requirements for IO Performers (22MFG4 v6.3)4 Procedure for management of Nonconformities (22F53X v9.1)5 Procedure for the management of Deviation Request (2LZJHB v9.1)6 Quality Classification Determination (24VQES v6.0)7 Quality Management System Audits (2DQTA8 v5.0)8Health Protection and Safety General Coordination Plan - ITER Construction Site - Volume 0 -General Safety Rules (2NUEYG v6.0)9 Internal Regulations (27WDZW v3.1)10 Environmental requirements (97WRFP v2.2)11 Contractor Safety Management Procedure (Q2GBJF v1.4)12Procedure for Occupational Health and Safety Hazard Identification and Assessment (AJLQRFv6.0)13 00 - Nuclear Regulatory Framework for INB ITER (2WBB8P v3.8)14Order dated 7 February 2012 relating to the general technical regulations applicable to INB - EN(7M2YKF v1.7)15Overall Surveillance Plan of External Interveners Chain for Protection Important Components,Structures and Systems and Protection Important Activities (4EUQFL v8.2)16Safety Important Functions and Components Classification Criteria and Methodology (347SF3v1.8)17 ITER Policy on Safety, Security and Environment Protection Management (43UJN7 v3.1)18 Guideline for Identification of the Protection Important Activities (PIA) (SBYJXD v1.4)19Provisions for Implementation of the Generic Safety Requirements by the External Interveners(SBSTBM v2.3)20Propagation of the Defined Requirements for Protection Important Components Through theChain of External Interveners (BG2GYB v3.3)以上20付録2 別添図書一覧別添図書１ イーター調達取決めに係る契約の品質保証に関する特約条項別添図書２ 本契約において遵守すべき「情報セキュリティの確保」に関する事項別添図書３ 知的財産権特約条項別添図書４ イーター実施協定の調達に係る情報及び知的財産に関する特約条項別添図書５ イーター調達に係る貨物の免税輸入について別添図書６ コンピュータプログラム作成等業務特約条項別添図書７ QP Template for suppliers and subcontractors (ITER文書番号 2MLX45 ver.1.1)別添図書８ Quality Requirements for IO Performers (ITER文書番号22MFG4 ver.6.3)別添図書９ Procedure for the management of Deviation Request (ITER文書番号 2LZJHB ver. 別添－3知財特約_202306一 乙は、本契約に係る発明等を行った場合には、次条の規定に基づいて遅滞なくその旨を甲に報告する。二 乙は、甲が国の要請に基づき公共の利益のために特に必要があるとしてその理由を明らかにして求める場合には、無償で当該知的財産権を実施する権利を国に許諾する。三 乙は、当該知的財産権を相当期間活用していないと認められ、かつ、当該知的財産権を相当期間活用していないことについて正当な理由が認められない場合において、甲が国の要請に基づき当該知的財産権の活用を促進するために特に必要があるとしてその理由を明らかにして求めるときは、当該知的財産権を実施する権利を第三者に許諾する。四 乙は、第三者に当該知的財産権の移転又は当該知的財産権についての専用実施権(仮専用実施権を含む。)若しくは専用利用権の設定その他日本国内において排他的に実施する権利の設定若しくは移転の承諾(以下「専用実施権等の設定等」という。)をするときは、合併又は分割により移転する場合及び次のイからハまでに規定する場合を除き、あらかじめ甲に届け出、甲の承認を受けなければならない。イ 子会社(会社法(平成17年法律第86号)第２条第３号に規定する子会社をいう。以下同じ。)又は親会社(会社法第２条第４号に規定する親会社をいう。以下同じ。)に当該知的財産権の移転又は専用実施権等の設定等をする場合ロ 承認ＴＬＯ(大学等における技術に関する研究成果の民間事業者への移転の促進に関する法律(平成10年法律第52号)第４条第１項の承認を受けた者(同法第５条第１項の変更の承認を受けた者を含む。))又は認定ＴＬＯ(同法第11条第１項の認定を受けた者)に当該知的財産権の移転又は専用実施権等の設定等をする場合ハ 乙が技術研究組合である場合、乙がその組合員に当該知的財産権を移転又は専用実施権等の設定等をする場合２ 乙は、前項に規定する書面を提出しない場合、甲から請求を受けたときは当該知的財産権を甲に譲り渡さなければならない。３ 乙は、第１項に規定する書面を提出したにもかかわらず、同項各号の規定のいずれかを満たしておらず、かつ、満たしていないことについて正当な理由がないと甲が認める場合において、甲から請求を受けたときは当該知的財産権を無償で甲に譲り渡さなければならない。(知的財産権の報告)第３条 前条に関して、乙は、本契約に係る産業財産権等の出願又は申請を行うときは、出願又は申請に際して提出すべき書類の写しを添えて、あらかじめ甲にその旨を通知しなければならない。２ 乙は、産業技術力強化法(平成12年法律第44号)第17条第１項に規定する特定研知財特約_202306究開発等成果に該当するもので、かつ、前項に係る国内の特許出願、実用新案登録出願、意匠登録出願を行う場合は、特許法施行規則(昭和35年通商産業省令第10号)、実用新案法施行規則(昭和35年通商産業省令第11号)及び意匠法施行規則(昭和35年通商産業省令第12号)等を参考にし、当該出願書類に国の委託事業に係る研究の成果による出願である旨を表示しなければならない 。３ 乙は、第１項に係る産業財産権等の出願又は申請に関して設定の登録等を受けた場合には、設定の登録等の日から60日以内(ただし、外国にて設定の登録等を受けた場合は90日以内)に、甲にその旨書面により通知しなければならない。４ 乙は、本契約に係る産業財産権等を自ら実施したとき及び第三者にその実施を許諾したとき(ただし、第５条第４項に規定する場合を除く。)は、実施等した日から60日以内(ただし、外国にて実施等をした場合は90日以内)に、甲にその旨書面により通知しなければならない。５ 乙は、本契約に係る産業財産権等以外の知的財産権について、甲の求めに応じて、自己による実施及び第三者への実施許諾の状況を書面により甲に報告しなければならない。(乙が単独で行った発明等の知的財産権の移転)第４条 乙は、本契約に関して乙が単独で行った発明等に係る知的財産権を第三者に移転する場合(本契約の成果を刊行物として発表するために、当該刊行物を出版する者に著作権を移転する場合を除く。)には、第２条から第６条まで及び第12条の規定の適用に支障を与えないよう当該第三者に約させなければならない。２ 乙は、前項の移転を行う場合には、当該移転を行う前に、甲にその旨書面により通知し、あらかじめ甲の承認を受けなければならない。ただし、乙の合併又は分割により移転する場合及び第２条第１項第４号イからハまでに定める場合には、この限りでない。３ 乙は、第１項に規定する第三者が乙の子会社又は親会社(これらの会社が日本国外に存する場合に限る。)である場合には、同項の移転を行う前に、甲に事前連絡の上、必要に応じて甲乙間で調整を行うものとする。４ 乙は、第１項の移転を行ったときは、移転を行った日から60日以内(ただし、外国にて移転を行った場合は90日以内)に、甲にその旨書面により通知しなければならない。５ 乙が第１項の移転を行ったときは、当該知的財産権の移転を受けた者は、当該知的財産権について、第２条第１項各号及び第３項並びに第３条から第６条まで及び第12条の規定を遵守するものとする。(乙が単独で行った発明等の知的財産権の実施許諾)第５条 乙は、本契約に関して乙が単独で行った発明等に係る知的財産権について第三者に実施を許諾する場合には、第２条、本条及び第12条の規定の適用に支障を与えないよう当該第三者に約させなければならない。知財特約_202306２ 乙は、本契約に関して乙が単独で行った発明等に係る知的財産権に関し、第三者に専用実施権等の設定等を行う場合には、当該設定等を行う前に、甲にその旨書面により通知し、あらかじめ甲の書面による承認を受けなければならない。ただし、乙の合併又は分割により移転する場合及び第２条第１項第４号イからハまでに定める場合は、この限りではない。３ 乙は、前項の第三者が乙の子会社又は親会社(これらの会社が日本国外に存する場合に限る。)である場合には、同項の専用実施権等の設定等を行う前に、甲に事前連絡のうえ、必要に応じて甲乙間で調整を行うものとする。４ 乙は、第２項の専用実施権等の設定等を行ったときは、設定等を行った日から60日以内(ただし、外国にて設定等を行った場合は90日以内)に、甲にその旨書面により通知しなければならない。５ 甲は、本契約に関して乙が単独で行った発明等に係る知的財産権を無償で自ら試験又は研究のために実施することができる。 甲が 甲のために第三者に製作させ、又は業務を代行する第三者に再実施権を許諾する場合は、乙の承諾を得た上で許諾するものとし、その実施条件等は甲乙協議のうえ決定する。(乙が単独で行った発明等の知的財産権の放棄)第６条 乙は、本契約に関して乙が単独で行った発明等に係る知的財産権を放棄する場合は、当該放棄を行う前に、甲にその旨書面により通知しなければならない。(甲及び乙が共同で行った発明等の知的財産権の帰属)第７条 甲及び乙は、本契約に関して甲乙共同で発明等を行ったときは、当該発明等に係る知的財産権について共同出願契約を締結し、甲乙共同で出願又は申請するものとし、当該知的財産権は甲及び乙の共有とする。ただし、乙は、次の各号のいずれの規定も遵守することを書面にて甲に届け出なければならない。一 乙は、甲が国の要請に基づき公共の利益のために特に必要があるとしてその理由を明らかにして求める場合には、無償で当該知的財産権を実施する権利を国に許諾する。二 乙は、当該知的財産権を相当期間活用していないと認められ、かつ、当該知的財産権を相当期間活用していないことについて正当な理由が認められない場合において、甲が国の要請に基づき当該知的財産権の活用を促進するために特に必要があるとしてその理由を明らかにして求めるときは、当該知的財産権を実施する権利を甲が指定する 第三者に許諾する。２ 前項の場合、出願又は申請のための費用は原則として、甲、乙の持分に比例して負担するものとする。３ 乙は、第１項に規定する書面を提出したにもかかわらず、同項各号の規定のいずれかを満たしておらず、さらに満たしていないことについて正当な理由がないと甲が認める場合において、甲から請求を受けたときは当該知的財産権のうち乙が所有する部分を無償で甲に譲り渡さなければならない。知財特約_202306(甲及び乙が共同で行った発明等の知的財産権の移転)第８条 甲及び乙は、本契約に関して甲乙共同で行った発明等に係る共有の知的財産権のうち、自らが所有する部分を相手方以外の第三者に移転する場合には、当該移転を行う前に、その旨を相手方に書面により通知し、あらかじめ相手方の書面による同意を得なければならない。(甲及び乙が共同で行った発明等の知的財産権の実施許諾)第９条 甲及び乙は、本契約に関して甲乙共同で行った発明等に係る共有の知的財産権について第三者に実施を許諾する場合には、その許諾の前に相手方に書面によりその旨通知し、あらかじめ相手方の書面による同意を得なければならない。(甲及び乙が共同で行った発明等の知的財産権の実施)第10条 甲は、本契約に関して乙と共同で行った発明等に係る共有の知的財産権を試験又は研究以外の目的に実施しないものとする。ただし、甲は甲のために第三者に製作させ、又は業務を代行する第三者に実施許諾する場合は、無償にて当該第三者に実施許諾することができるものとする。２ 乙が本契約に関して甲と共同で行った発明等に係る共有の知的財産権について自ら商業的実施をするときは、甲が自ら商業的実施をしないことに鑑み、乙の商業的実施の計画を勘案し、事前に実施料等について甲乙協議の上、別途実施契約を締結するものとする。(甲及び乙が共同で行った発明等の知的財産権の放棄)第11条 甲及び乙は、本契約に関して甲乙共同で行った発明等に係る共有の知的財産権を放棄する場合は、当該放棄を行う前に、その旨を相手方に書面により通知し、あらかじめ相手方の書面による同意を得なければならない。(著作権の帰属)第12条 第２条第１項及び第７条第１項の規定にかかわらず、本契約の目的として作成され納入される著作物に係る著作権については、全て甲に帰属する。２ 乙は、前項に基づく甲及び甲が指定する 第三者による実施について、著作者人格権を行使しないものとする。また、乙は、当該著作物の著作者が乙以外の者であるときは、当該著作者が著作者人格権を行使しないように必要な措置を執るものとする。３ 乙は、本契約によって生じた著作物及びその二次的著作物の公表に際し、本契約による成果である旨を明示するものとする。(合併等又は買収の場合の報告等)第13条 乙は、合併若しくは分割し、又は第三者の子会社となった場合(乙の親会社が変更した場合を含む。第３項第１号において同じ。)は、甲に対しその旨速やかに報告し知財特約_202306なければならない。２ 前項の場合において、国の要請に基づき、国民経済の健全な発展に資する観点に照らし、本契約の成果が事業活動において効率的に活用されないおそれがあると甲が判断したときは、乙は、本契約に係る知的財産権を実施する権利を甲が指定する者に許諾しなければならない。３ 乙は、本契約に係る知的財産権を第三者に移転する場合、次の各号のいずれの規定も遵守することを当該移転先に約させなければならない。一 合併若しくは分割し、又は第三者の子会社となった場合は、甲に対しその旨速やかに報告する。二 前号の場合において、国の要請に基づき、国民経済の健全な発展に資する観点に照らし本業務の成果が事業活動において効率的に活用されないおそれがあると甲が判断したときは、本契約に係る知的財産権を実施する権利を甲が指定する者に許諾する。三 移転を受けた知的財産権をさらに第三者に移転するときは、本項各号のいずれの規定も遵守することを当該移転先に約させる。(秘密の保持)第14条 甲及び乙は、第２条及び第７条の発明等の内容を出願公開等により内容が公開される日まで他に漏えいしてはならない。ただし、あらかじめ書面により出願又は申請を行った者の了解を得た場合はこの限りではない。(委任・下請負)第15条 乙は、本契約の全部又は一部を第三者に委任し、又は請け負わせた場合においては、当該第三者に対して、本特約条項の各規定を準用するものとし、乙はこのために必要な措置を講じなければならない。２ 乙は、前項の当該第三者が本特約条項に定める事項に違反した場合には、甲に対し全ての責任を負うものとする。(協議)第16条 第２条及び第７条の場合において、単独若しくは共同の区別又は共同の範囲等について疑義が生じたときは、甲乙協議して定めるものとする。(有効期間)第17条 本特約条項の有効期限は、本契約の締結の日から当該知的財産権の消滅する日までとする。 以上(1) 34 12 1(2) 34 12 3(3) 34(4) 34(5) 60 43(6) 10 83(7) 45 48(8) 1 7(9) 5 473489別添－4イーター調達に係る貨物の免税輸入についてイーター事業の共同による実施のためのイーター国際核融合エネルギー機構の特権及び免除に関する協定(イーター協定)に基づき、イーターに係る貨物の日本国内機関(JADA)及びメーカー・商社による輸入関税及び引取りに係る内国消費税の免税輸入を可能とする例外的な措置について、以下の要件等を遵守することで免税法令の適用対象となることが出来ます。1. 免税適用のための要件(1) 免税適用となる貨物・イーター活動(R&D及びクォリフィケーションを含む)のためだけに使用される物品を適用対象とする。 ・ただし、8割方以上完成している物品については、ほぼ完成品の輸入とみなし、適用対象とする。 (2) 免税適用とならない貨物・原材料及び資機材、並びに製作治具等。 ・本契約締結日よりも前に輸入した物品。 ・上記(1)に該当する物品と該当しない物品とが混在して輸入され、別個に通関申告が出来ない場合。 疑義が生じる場合には、輸入前にQST担当者と別途協議するものとする。2. 必要な手続き(1) 1.(1)に該当する貨物を輸入する際には、輸入手続きを開始する前に必ずQSTの契約担当者に申し出ること。免税適用に疑義がある場合も同様とする。 (2) 受注者は、輸入申告前に原子力機構から発行される「確認書」の正本を受領し、輸入通関書類と併せて申告すること。 3. 契約に係る注意事項・免税輸入通関のためには、通関申告前に、QSTから通関を予定している税関に連絡する必要がある。(その際、輸入通関書類及び「確認書」(写し)の提出をしている)。 ・契約に際しては、免税を加味しない金額で契約を実施するが、免税が適用された場合には、免税相当額を減額して支払うこととし、事前に書面をもって確認する。 別添－5・免税適用可否については、通関する担当税関が最終判断を担うが、(1)にて免税適用となりうる貨物に関しては、免税となるよう誠意をもってQST担当者と協力すること。 2.免税適用法令－抜粋(参考)(1) 関税定率法(外交官用貨物等の免税)第十六条 左の各号に掲げる貨物で輸入されるものについては、政令で定めるところにより、その関税を免除する。一 本邦にある外国の大使館、公使館その他これらに準ずる機関に属する公用品。但し、外国にある本邦のこれらの機関に属する公用品についての関税の免除に制限を附する国については、相互条件による。(2) 輸入品に対する内国消費税の徴収等に関する法律(免税等)第十三条 次の各号に掲げる課税物品で当該各号に規定する規定により関税が免除されるもの(関税が無税とされている物品については、当該物品に関税が課されるものとした場合にその関税が免除されるべきものを含む。第三項において同じ。)を保税地域から引き取る場合には、政令で定めるところにより、その引取りに係る消費税を免除する。三 関税定率法第十六条第一項 各号(外交官用貨物等の免税)に掲げるもの以上プログラム特約_202306コンピュータプログラム作成等業務特約条項(目的物)第１条 この契約の目的物は、次の各号の一又は二以上の組み合せに該当するコンピュータプログラムの著作物(データ、データベース、マニュアル及びドキュメンテーションを含む。以下同じ。)及び当該コンピュータプログラムによる計算結果であって、仕様書に定める範囲のものとする。 一 コンピュータプログラム(コンピュータプログラムの設計を含む。)著作物二 甲が提供するコンピュータプログラムの著作物により得られた計算結果三 乙が所有するコンピュータプログラムの著作物及びこれにより得られた計算結果(権利の帰属等)第２条 この契約により作成された目的物(第１条各号に掲げるものをいう。以下同じ。)に係る著作権その他この目的物の使用、収益及び処分(複製、翻訳、翻案、変更、譲渡・貸与及び二次的著作物の利用を含む。)に関する一切の権利は甲に帰属するものとする。ただし、本契約遂行のために使用するプログラム等のうち、本契約締結以前から、乙が所有するものについては、その著作権は乙に帰属するものとする。２ 乙は、この契約により作成された目的物について、甲又は甲の指定する者に対して著作者人格権を行使しないものとする。(氏名の表示の制限)第３条 乙は、第１条に規定する著作物に著作者氏名を表示しないものとする。(第三者の権利の保護)第４条 乙は、この業務の実施に関し第三者(著作者を含む。)の著作権その他の権利を侵害することのないよう必要な措置を自らの責任において講じなければならない。(技術情報)第５条 甲が、この業務の実施に関し、乙の保有する技術情報を知る必要が生じた場合には、乙は、この契約の業務に必要な範囲内において当該技術情報を甲に無償で提供しなければならない。 ２ 甲は、乙からの書面による事前の同意を得た場合を除き、前項により知り得た技術情報を第三者に提供しないものとする。(プログラム開発に必要な技術情報)第６条 甲は、仕様書に定めるところにより、乙がこの業務の実施に必要な計算コードその他必要な技術情報を乙に使用させることがある。別添－6プログラム特約_202306(公表)第７条 乙は、目的物を甲に引き渡す前に、これを第三者に公表してはならない。２ 乙は、この契約により得られた成果について発表し、若しくは公開し、又は第三者に提供しようとするとき、及びこの業務の実施によって知り得た技術情報を第三者に開示しようとするときは、あらかじめ書面による甲の承認を得なければならない。以上PDF generated on 11-Sep-2011MQP Quality PlanQP Template for suppliers and subcontractorsThis template is for suppliers and their subcontractors to produce a Quality Plan. Thisis recommended template for users, not mendatoryApproval ProcessName Action AffiliationAuthor Park S. 19-Mar-2010:signed IO/DG/SQS/QACoAuthorReviewersApprover Sands D. 19-Mar-2010:approved IO/DG/SQS/QADocument Security: level 1 (IO unclassified)RO: Sands DavidRead Access AD: ITER, AD: External Collaborators, AD: Division - Quality Assurance, AD: ITER Management Assessor,project administrator, ROIDM UID2MLX45VERSION CREATED ON / VERSION / STATUS19 Mar 2010 / 1.1 / APPROVEDEXTERNAL REFERENCE別添－7PDF generated on 11-Sep-2011Change LogTitle (Uid) Version Latest Status Issue Date Description of ChangeQP Template forsuppliers andsubcontractors(2MLX45_v1_1)v1.1 Approved 19 Mar2010At the section 7, wordings are changed from(proposed) suppliers or subcontractors to (proposed)suppliers and suncontractors specifying what workthey will be performingQP Template forsuppliers andsubcontractors(2MLX45_v1_0)v1.0 Signed 12 Feb2010[ITER QA REQUIREMENT for PROCUREMENT]Template for Suppliers and subcontractors of a DAQUALITY PLANDocument Number: Revision Number:ITER PP Number: ITER PA Number:Title of Item:Name of DA:Supplier of the DA:Prepared by Supplier Approved by Supplier Approved by DA ITER AcceptancePosition: Position: Position: Position:Name & signature Name & signature Name & signature Name & SignatureDate: Date: Date: Date:ø This is a recommended template for user’s guiding to develop a Quality Plan. [ITER QA REQUIREMENT for PROCUREMENT]1. Scope[This section shall describe the scope of work to be covered by this Quality Plan]2. Quality Management2.1 Description of Quality Management System of the organization:[Provide certifications of recognized Quality Standards and valid date of the certifications, if any]2.2 Detailed the breakdown of responsibilities within the organization:[Add the organization flow chart]2.3 Identify the different (external) organizations involved:[Add the relationship flow chart between different organizations]2.4 Identify within the different organizations involved the key individuals responsiblefor:[Ensuring that the activities performed in connection with the particular contract are planned,implemented and controlled and their progress monitored,Communicating requirements peculiar to the contract to all affected organizations,Resolving problems that may arise at interfaces between the organisations involved]2.5 Identify any access restrictions of IO to the premise of the supplier or itssubcontractors that may apply:2[ITER QA REQUIREMENT for PROCUREMENT]3. Contract Review[Indicate how, when and by whom contract requirements are to be reviewed and the review recorded]4. Documents[Show how, when and by whom documents will be controlled, and what kinds of documents will be submitted to IO]5. Design[Indicate, if an organization performs design activities for the contract;how, when and by whom design will be controlled, including:- when, how, and by whom the design process is to be carried out, controlled and documented,- the arrangements for the review, verification and validation of design output conformity todesign inputs requirementsWhere applicable, indicate the extent to which the IO will be involved in design activities, such asparticipation in design reviews and design verificationReference applicable codes, standards and regulatory requirementsA list the computer programs to be used and indicate how, when, and by whom they will be controlledOtherwise “not applicable”.]3[ITER QA REQUIREMENT for PROCUREMENT]6. Procurement[Show how, when and by whom procurements will be controlledAny important Items or activities that are to be purchased or subcontracted(Proposed) suppliers or subcontractors specifying what work they will be performingRelevant Quality Assurance Requirements and the methods to be used to satisfy regulatory requirements, whichapply to, purchased or subcontracted products.]7. Identification and control of items[Where traceability is a requirement or necessary for the adequate control of the work, define its scopeand extent, including;How affected items are to be identified?How contractual and regulatory traceability requirements are identified and incorporated into workingdocuments?What records relating to such traceability are to be generated and how and by whom they are to becontrolled?]4[ITER QA REQUIREMENT for PROCUREMENT]8. Manufacture[Iindicate how processes, manufacture, assembly, inspections and tests will be controlled. Where appropriate, introduce or refer to:Relevant documented procedures and work instructionsThe methods to be used to monitor and control processesCriteria for workmanshipUse of special and qualified processes and associated personnelTools, techniques and methods to be used.]9. Inspection and testing[Show how, when and by whom inspection and test would be controlled, including;Any inspection and test plan to be used, and how and by whom they are reviewed and approvedHow and by whom inspection and test reports are reviewed and approved?Acceptance criteria to be appliedAcceptance of purchased or subcontracted itemsAny specific requirements for the identification of inspections and tests statusThe extent to which the IO and (Agreed) Notified Bodies will be involved, such as witnessing inspectionand test.]5[ITER QA REQUIREMENT for PROCUREMENT]10. Measuring and Test Equipment[Indicate the control system to be used for measuring and test equipment specifically used in connectionwith the contract, including:- Identification of such equipment,- Method of calibration,- Method of indicating and recording calibration status.]11. Handling, Storage, Packing, Shipping and Delivery[Show how, when and by whom handling, storage, packing, shipping and delivery will be controlled:- how contract requirements for handling, storage, packaging and shipping are to be met,- how the item will be delivered to the specified site in a manner that will ensure that its requiredcharacteristics are not degraded.]12. Records[This section should indicate:How records are to be controlled, including how legibility, storage and retrievability will be satisfiedWhat records are to be keptWhat records are to be supplied to the IO, when and by what meansHow and by whom the records are reviewed and approved prior to inclusion in the deliverables handedover to the IOWhat form the records will take (such as paper, microfilm, tape, disc or other medium) and in whatlanguage the records will be provided.]13. Deviation and Non-Conformities[Indicate how, when and by whom deviations and non-conformities will be processed including thoseoriginating from suppliers and subcontractor.]6[ITER QA REQUIREMENT for PROCUREMENT]14. Training and Qualification[Address any specific training requirement for personnel and how such training is accomplished andrecorded.]15. Statistical Techniques[Where statistical techniques are relevant for establishing, controlling and verifying process capabilityand item characteristics, they should be indicated.]16. Assessment[Indicate how, when and by whom the implementation and effectiveness of the Quality Plan will bemonitored.]17. Reference and Others (If any)[A list of documents referenced in this Quality Plan] Italics in boxes are provided to give instructions and need to be deleted when completing the formwith an actual information7[ITER QA REQUIREMENT for PROCUREMENT][Note] Preparation, implementation and approval of a Quality Plan1. Much of the generic documentation needed to prepare a Quality Plan willnormally already exist as part of the performer’s quality management documentsand supporting procedures. The Quality Plan need only refer to thisdocumentation and show how it is to be applied to the work contracted2. DAs shall prepare a Quality Plan and submit it to the IO for approval3. The DA Suppliers/Subcontractors Quality Plans are approved by the DA, andthen submitted to the IO for acceptance4. Work shall not start until the relevant Quality Plan has been accepted by the IO5. Work shall be performed as directed in the Quality Plan. The performers (DAs,and their suppliers and subcontractors) shall monitor the implementation andeffectiveness of the Quality Plan6. Documents referred to in the Quality Plan should be made available to the IO8PDF generated on 11 Feb 2025DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMTechnical Specifications (In-Cash Procurement)Quality Requirements for IO PerformersThe purpose of this document is to provide IO performers with quality managementrequirements based on the quality class of structures, systems, and components (SSC)IDM UID22MFG4VERSION CREATED ON / VERSION / STATUS27 Jan 2025 / 6.3 / ApprovedEXTERNAL REFERENCE / VERSION別添－8Page 1/17Table of Contents1 PURPOSE.32 DEFINITIONS AND ACRONYMS.33 REFERENCES.44 REQUIREMENT TO DEFINE QUALITY CLASS (QC).55 COMMON REQUIREMENTS FOR QC 1-4.55.1 QUALITY MANAGEMENT SYSTEM.55.2 COUNTERFEIT, FRAUDULENT OR SUSPECT ITEMS (CFSI).55.3 COMMERCIAL-OFF-THE-SHELF / COTS ITEMS.65.4 PROPAGATION OF REQUIREMENTS.66 COMMON REQUIREMENTS FOR QC 1-3.66.1 CONTRACT MANAGEMENT (COMMON QC 1-3).66.1.1 Responsible Officer.66.1.2 Quality plan (QP).66.1.3 Management of nonconformities.76.1.4 Management of deviations.76.1.5 Risk management.76.1.6 Access to Performer’s premises.76.2 ENGINEERING (COMMON QC 1-3).76.3 MANUFACTURING, ASSEMBLY AND INSTALLATION (COMMON QC 1-3).76.3.1 Inspection and Test Plan (ITP).76.3.2 Readiness Review (CRR).76.3.3 Material certificates.76.3.4 Manufacturing.76.4 IO ACCEPTANCE (COMMON QC 1-3).76.4.1 Contractor release note (CRN).76.4.2 Mechanical Completion Dossier (MCD).86.5 STORAGE AND SHIPPING (COMMON QC 1-3).86.5.1 Conditions to ship - CRN and shipping notification.86.5.2 Conditions to ship - Delivery Readiness Review (DRR).86.5.3 Shipping.87 SPECIFIC REQUIREMENTS FOR QC 1.87.1 ENGINEERING (EXTRAS FOR QC 1).87.2 MANUFACTURING, ASSEMBLY AND INSTALLATION (EXTRAS FOR QC 1).87.2.1 Special processes.87.2.2 Preparation and change of inspection plan (IP, MIP/ITP).87.2.3 Readiness review (CRR, MRR).9Page 2/177.2.4 Execution of IP (MIP/ITP).97.2.5 Manufacturing dossier.97.3 STORAGE AND SHIPPING (EXTRAS FOR QC 1).107.3.1 Storage.108 SPECIFIC REQUIREMENTS FOR PE/NPE.118.1 QUALIFICATION OF PERSONNEL (PE/NPE).118.2 ENGINEERING (EXTRAS FOR PE/NPE).118.3 MANUFACTURING (EXTRAS FOR PE/NPE).118.3.1 Special processes.118.3.2 Inspection plan.118.4 STORAGE AND SHIPPING (EXTRAS FOR PE/NPE).119 ANNEX 1. REQUIREMENTS AND GUIDANCE FOR THE CONTENT ANDSTRUCTURE OF QUALITY PLANS (QP).129.1 CONTENT.129.2 STRUCTURE.129.2.1 Quality Management.129.2.2 Contract Review.139.2.3 Document.139.2.4 Design.139.2.5 Procurement.139.2.6 Identification and Control of items.139.2.7 Manufacture.149.2.8 Inspection and Test.149.2.9 Measuring and Test equipment.149.2.10 Handling, Storage, Packing, Shipping and Delivery.149.2.11 Records.149.2.12 Deviations and Nonconformities.159.2.13 Training and Qualification.159.2.14 Statistical Techniques.159.2.15 Assessment.1510 ANNEX 2. REQUIREMENTS AND GUIDANCE FOR THE CONTENT OFINSPECTION PLANS (IP).1611 ANNEX 3. REQUIREMENTS AND GUIDANCE FOR THE CONTENT OFCONTRACTOR RELEASE NOTES (CRN).17Page 3/171 PurposeThe purpose of this document is to provide IO performers with quality management requirementsbased on the quality class of structures, systems, and components (SSC)2 Definitions and acronymsTerm Acronym Definition(Agreed) NotifiedBody(A)NB Notified Body agreed by the French Nuclear Authority(ASN) to perform conformity assessment of NuclearPressure EquipmentAcceptance Acknowledgement that a product or document is incompliance with the Contract requirementsApproval Formal agreement for the use or application of a productor document. The approver takes responsibility for theuseCertificate ofConformityCoCCommercial-off-the-shelf (items),Commercial gradeitem or serviceCOTS Item or service commercially available withoutmodificationContract PA, TA or contractContractor An entity that have a contract with IO or DAContractor ReleaseNoteCRN A document to provide a confirmation from a Performerthat the products supplied and/or services performedmeet the requirements of ContractConstructionReadiness ReviewCRRCounterfeit item Items that are intentionally manufactured, refurbished oraltered to imitate original products without authorizationin order to pass themselves off as genuineCounterfeit /fraudulent / suspectitemCFSICritical qualityactivityAny activity or operation that if not performed correctlymay affect safety, functionality or reliabilityDomestic Agency DA An organization set up under the ITER FrameworkAgreement to provide goods or services to the IOthrough Procurement Arrangements (PA) and TaskAgreements (TA)Equipment PE/NPE Pressure Equipment or Nuclear Pressure EquipmentFraudulent items Items that are intentionally misrepresented with intent todeceiveITER Organization IOPage 4/17Inspection Plan IP A plan used for the execution and control of Contractactivities. It may also be referred to as a Manufacturingand Inspection Plan (MIP), Inspection and Test Plan(ITP), Control Plan (CP), or other similar termsManufacturer Any natural or legal person who manufactures anequipment or has an equipment designed ormanufactured and markets under his name or trademarkMechanicalCompletionDossierMCDManufacturingDatabaseMDBManufacturingReadiness ReviewMRRNotified Body NB Technical organisation approved in an EU state, eitherfor approval and monitoring of the manufacturer’squality assurance system or for direct product inspectionfor the manufacture of Pressure EquipmentPerformer An all-inclusive term used to cover DAs, contractors andsubcontractorsProcurementArrangementPAQuality Class QCQuality plan QP Document describing the operational quality system toensure that Contract requirements will be met, and thatevidence of such compliance will be maintainedIt covers the whole scope of the Contract including workperformed by contractors/subcontractors and addressesall activities performed in connection with the ContractProtectionImportantComponentPIC As per INB Order (French Order of 07/02/2012)ResponsibleOfficerRO IO primary point of contact to manage a ContractStructures, systemsand componentsSSCSubcontractor An entity that performs work for contractorsSuspect items Items where there is an indication or suspicion that itmay not be genuineTask Agreement TA3 References[1] Quality Classification Determination (24VQES rev. 6.0 or consequent)[2] ITER Quality Assurance Program (QAP) (22K4QX)Page 5/17[3] Qualification of Protection Important Components (PIC) (XB5ABP)[4] Working Instruction for Processing Construction Nonconformities (U8VPSS)[5] Procedure for Management of Nonconformities (22F53X)[6] Procedure for the management of Deviation Request (2LZJHB)[7] Risk and Opportunity Management Procedure (22F4LE)[8] Work Instruction for producing an Inspection and Test Plan for construction(UELU9F)[9] Working Instruction for Construction Readiness Review (QXW4KQ)[10] Working Instruction for Completion Dossier Preparation (UYUSEE)[11] Working Instruction for the Delivery Readiness Review (DRR) (X3NEGB)[12] Procedure for Transportation of Components to ITER Site (RY5C6Q)[13] Procedure for the CAD management plan (2DWU2M)[14] Procedure for Analyses and Calculations (22MAL7)[15] Design Review Procedure (2832CF)[16] Working Instruction for Manufacturing Readiness Review (44SZYP)[17] Implementation plan for design & manufacture of PE/NPE (VE2DSP)[18] Inspection Plan (IP) Template (QV7GQF)[19] Construction Inspection and Test Plan Template (ITP) (TTPQL2)[20] Release Note Template (QVEKNQ)4 Requirement to define quality class (QC)The quality class of the SSC must be specified in the ContractThe Performer may grade the SSC quality class specified in the Contract down to the component levelsin accordance with reference [1]. Jung C. YKhomutnikov A. Perrier G. 07 Jan 2025:recommended07 Jan 2025:recommended19 Dec 2024:recommended06 Jan 2025:recommendedIO/DG/SID/CIDIO/DG/SID/CID/NSIIO/DG/SQD/QMDIO/DG/SQD/QMDIO/DG/SQDApprover Orlandi S. 15 Jan 2025:approved IO/DG/CPInformation Protection Level: Non-Public - UnclassifiedRO: Khomutnikov AlekseiRead Access LG: Quality Control Group, AD: ITER, AD: External Collaborators, AD: IO_Director-General, AD:External Management Advisory Board, AD: IDM_Controller, AD: OBS - Quality Management Division(QMD) - EXT, AD: Nuclear Safety Inspectors, AD: OBS - Quality Management Division (QMD), AD: DA,AD: Auditors, A#drn#IDM UID2LZJHBVERSION CREATED ON / VERSION / STATUS17 Dec 2024 / 9.1 / ApprovedEXTERNAL REFERENCE / VERSION別添－9PDF generated on 15 Jan 2025DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMChange LogProcedure for the management of Deviation Request (2LZJHB)Version Latest Status Issue Date Description of Changev1.0 Signed 02 Jun 2009v1.1 Approved 10 Jun 2009 Minor change in para 4.1.2 at the request of SAS DGGv2.0 In Work 26 Oct 2010 - General revision showing IDM review & approval for Deviation Requests- Incorporated Domestic Agencies in review process for Deviation Requestsv2.1 In Work 27 Oct 2010 New lay-out through IDM auto-generated covering pagev2.2 Approved 22 Dec 2010 Changed from "DDG/Directorate Head" to "Directorate Head" on para. 4.1.3, 4.2.2 and Appendix Av3.0 Signed 22 Sep 2011 Introduction of a filter for deviations affecting Regulatory Filesv3.1 Approved 22 Sep 2011 Minor change to tidy up role activity chartv4.0 Approved 04 Sep 2013 - modification of title- modification of the flow chart for DR- addition of a flow chart for NCR- addition of the following steps for NCR: root causse analysis, correctiveaction (if needed) and closure of NCRv4.1 Approved 25 Jul 2014 - Scope: include addition of a requirement- WBS RO and TRO change to IO RO and acronym with definition added- Responsibilities: addition of any dispute solved by Head of QA- Flow chart: refer to paragraph listing the reviewer 7.1.4 for DR and 7.2.1.4for- Flow chart: addition of root cause analysis for NCR- Addition of "Send a link of the signed form to DAs if they are impacted"for DR and NCR- Modification of the paragraphs of the text to be coherent with the flowchartsv4.2 Approved 12 Mar 2015 Changes according to MQP doc Request - QV6CHN:- Update of title “Procedure for IO Deviation Request and Non-conformanceReport”- Addition of an explanatory footnote for PIC and PIA- Addition of PIA with PIC- Addition of details for the steps in IDM for the closure of NCRsv5.0 In Work 01 Sep 2017 The purpose of this document is to specify the Deviation Request,hereinafter DR, processes from the initiation to the implementation. Theprocesses for following two types of DR’s are described:- Deviation Request issued by DA, (Sub-)Contractor and/orSupplier, hereinafter “DA/CON-DR,” and- Deviation Request issued by IO, hereinafter “IO-DR”Roles and/or responsibilities of each stakeholder are also specifiedv5.1 Signed 01 Sep 2017 Compared to the Version 4.2:- DR and NCR processes are separated- IO technical change request is out of scope- Work flow and responsibilities are specified clearly- Criteria for the escalation is specified- Added all required contents in the new template, MQP Document Template(ITER_D_438T76 v2.5)v5.2 Signed 20 Sep 2017 Implemented QA Process Owner's comment regarding the approversIn this version, the approvers are as specified in;Sign-Off_Authority_for_Project_Documents_2EXFXU_v3_3v5.3 Approved 25 Sep 2017 As commented by CIO/CMD head, rev. nums. of the latest approvedversions of the applicable documents are addedv5.4 Approved 15 Dec 2017 Revision of the flowchartsThe flowcharts are revised back into the ones in [2LZJHB v4.2], which hadPDF generated on 15 Jan 2025DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMbeen accepted by ASNThe specific changes are:1) “IO-SRO” is replaced by “EPNS-DH”2) Logic in the flowcharts, e.g. explicit description for escalation to PCR,safety pre-assessment firstRevised user-friendly1) Basic principle (definition, rule, criteria), process flow and responsibilityassignment are separated clearly by section2) Deleted needless and/or non-mandatory contents, e.g. some foot notes,KPI3) Flowcharts, description of the process steps, and responsibilityassignment (RACI matrix) are correlated by paragraph number, #.#.#4) Some TYPOs are fixedv5.5 Approved 14 Mar 2018 1) "Approval with condition is not allowed" is changed into more realisticstatements:• Regarding DA/CON-DR, all conditions shall be documented and agreedbetween the DA officer representing the initiator and the approver viaexchanges in IO-IDM metadata. In case of direct contract between IO andCON, the initiator and the approver shall agree on. • Regarding IO-DR, all conditions shall be documented and agreed betweenthe approver and the accepter, who are IO-CT and DA/CON, respectively. 2) Mandatory and optional reviewers are specified as in Section 7.2Added some statements telling "SOA [22F4E5] to be consistent later."v5.6 RevisionRequired11 May 2018 As per MQP doc Request - WK73BRIncludes Module H needsv6.0 RevisionRequired07 May 2019 Chapter 2.1 to clarify the scope of DR in relationship with MQP procedureschanges. CMA audit finding (NC 02) regarding DR scopeITER_D_XYKVBE - Quality Audit Report_IO-QMSA-18-08-CMA AuditChapter 3.1 - add definition of Equipment, Manufacturer, PE/ NPE andESPN – maintained as per previous revision of procedure in the scope of PE/NPE networkChapter 3.2 – add abbreviation PT- project teamChapter 4.2 – add references - maintained as per previous revision ofprocedure in the scope of PE/ NPE network[11] French Order dated 30 December 2015 concerning Nuclear PressureEquipment[12] Implementation plan for design & manufacture of PE/NPE [VE2DSP]Chapter 5 - add reference to other specific Sign-Off Authority related to PTand construction and PE / NPE responsibilities - maintained as per previousrevision of procedure in the scope of PE/ NPE networkChapter 6.2.2 – add reference to other specific Sign-Off Authority related toPT and constructionChapter 6.3.3 - add reference to other specific Sign-Off Authority related toPT and constructionChapter 7 add reference to other specific Sign-Off Authority related to PTand construction and PE / NPE responsibilities - maintained as per previousrevision of procedure in the scope of PE/ NPE networkTable of Mandatory or Optional Reviewers improved - add PT staff reviewand PE/ NPE review - maintained as per previous revision of procedure inthe scope of PE/ NPE networkEliminate RACI tablesv7.0 Signed 14 Jun 2019 New version according to additional MQP doc Request - YPKLTV and andessential data YTKAKK, which are documenting list of changes as perreviewers commentsv7.1 Signed 16 Jul 2019 Revision required for implementation of reviewer comments. PDF generated on 15 Jan 2025DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMThe following changes/ clarifications are applied:- Chapter 2 - Scope of procedure - add clarifications to allow IO to raise DRfor technical deviations with no impact on cost, schedule and withoutchanging the PAs documentation - Main, annex B , annex A)- Chapter 2.1 - add clarifications to eliminate the discrepancies with DRdefinition - Chapter 3.1- Chapter 3.1 - clarify definition of "Equipment". Add clarification forDeviation request definition to eliminate conflicts with chapter 2.1requirements. - Chapter 5 - first bullet - add clarification regarding deviation to IOrequirements. - Chapter 6.2.10 - Confirmation of DR implementation. add clarificationregarding criteria for "required" DR implementation confirmation- Chapter 9 - correction chapter numbering (9.1, 9.2 9.3 and 9.4)- F4E comments regarding interface with Supply process / application of PAchange notice are implemented in the chapter 2.1 and chapter 9v7.2 Signed 18 Jul 2019 The following minor changes are applied:- Chapter 5 - Basic principle - eliminate 7th bullet regarding IO DR- Fig 6.2 - Work flowchart of IO -DR - add clarification: Not applicable inthe scope of PA changes- Chapter 6.3.3 - IO -DR Decision - Eliminate DA / CON responsibilities fordecision since IO-DR is not applicable for PA changes. - Chapter 7 - Mandatory or Optional Reviewers - for IO-DR theresponsibility for DA-RO review is Optional instead of Mandatory (IO-DRis not applicable for PA changes)v7.3 Approved 18 Jul 2019 New version according to additional MQP doc Request - YPKLTV and andessential data YTKAKK, which are documenting list of changes as perreviewers commentsThe following minor changes are applied:- Chapter 5 - Basic principle - eliminate 7th bullet regarding IO DR- Fig 6.2 - Work flowchart of IO -DR - add clarification: Not applicable inthe scope of PA changes- Chapter 6.3.3 - IO -DR Decision - Eliminate DA / CON responsibilities fordecision since IO-DR is not applicable for PA changes. - Chapter 7 - Mandatory or Optional Reviewers - for IO-DR theresponsibilityv8.0 In Work 25 Nov 2019 As per approved MQP doc request https://user.iter.org/?uid=27JZVH themain changes are:- Clarification of the DA/CONT DR and IO-DR workflows (even though nomajor steps were added or removed);- Clarification of the roles of approvers for the DA/CONT DR and IO-DRs;- Inclusion of the IO supplier DR to IO, that follows the same process as theDA DR;- Clarification of the text, notably sects. Main principles and mainrequirements;- Editorial changes, which make the procedure much easier to understandand implement;v8.1 Approved 25 Nov 2019 Minor update due to technical problem with pdf conversion. All changes arelisted for the previous version 8.0v9.0 Signed 10 Dec 2024 In accordance with CSAJJV the changes are:- Update due to the ASN Decision 2017-DC-0616 of November 30, 2017amended by Decision 2023-DC-0770 on noticeable modifications to INBs(C58DCJ): any DR that is categorized as a Noticeable Modification shalltrigger a PCR- Update due to the NCR-IO.NCR-0171 - SRO review of Deviation Request(8TZQDH): clarification that the DR review by the SRO is mandatory onlyPDF generated on 15 Jan 2025DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMwhen PIC/PIA are impacted- New mandatory field introduced: Impacted Requirement Document- Approver for DR purely related to MQP process is changed from the MQPProcess Owner to the approver of the MQP document from which the DRrequests to deviate. The MQP Process Owner is now a mandatory reviewer- CID Head removed as mandatory reviewer- SIROs added as mandatory reviewers- CMS Section Leader added as observer- The DR Database, which today is used for IO Supplier DR only, isrecommended to be used as well for DA-DR and IO-DR- Addition of the section 8.4 Interactions with MQP Process ManagementProcess: it is recommended, but not mandatory, to apply the DR procedureto track any deviation to MQP requirement- Use of the MQP Document Template 438T76 v5.0- Integration of various needs consolidated in CAT-4915v9.1 Approved 17 Dec 2024 Changes compared to the last approved version v8.1 are those described inthe Version Change Description of the v9.0, plus the following additionalchanges from v9.0 to v9.1:- In accordance with the MQP Process Management Process, for DRs relatedto the MQP process, impacted original document's stakeholders aremandatory reviewers of the DR- For IO-DRs related to the MQP process, the first check (step 4) can bedone by the MQP Process Representative instead of the MQP RequirementDocument ApproverPage 1/14Table of Contents1 PURPOSE.22 SCOPE.23 DEFINITIONS AND ACRONYMS.24 REFERENCES.35 GENERAL PRINCIPLES.35.1 MAIN PRINCIPLES.35.2 MAIN REQUIREMENTS.46 WORKFLOW.66.1 FLOWCHART.66.2 RESPONSIBILITIES.96.3 DESCRIPTION OF STEPS.96.3.1 DA/CONT-DR Process.96.3.1.1 Submission.96.3.1.2 Review.96.3.1.3 Decision, Dispute and Resolution.116.3.1.4 Closure.126.3.2 IO-DR Process.126.3.2.1 Submission.126.3.2.2 Review.126.3.2.3 Decision, Dispute and Resolution.136.3.2.4 Closure.137 RECORDS.138 INTERACTIONS WITH OTHER PROCESSES.148.1 INTERACTIONS WITH THE DESIGN CONTROL PROCESS.148.2 INTERACTIONS WITH THE SUPPLY PROCESS.148.3 INTERACTIONS WITH NUCLEAR SAFETY PROCESSES.148.4 INTERACTIONS WITH MQP PROCESS MANAGEMENT PROCESS.14Page 2/141 PurposeThe purpose of this document is to describe the Deviation Request (DR) processes to be followed forthe ITER project. This procedure defines the requirements and provides the detailed workflows formanagement of DRs project wise addressed to and generated by the ITER Organisation2 ScopeThis procedure is a MQP Level-3 document within the process of Configuration Management (QAPsect. 3.1, ref. [1]), as shown in the Management and Quality Programme (MQP) map:https://portal.iter.org/qa/SitePages/Home.aspxThis procedure shall be applicable for managing the following DRs: Deviation Requests from DAs to IO: e.g. deviations from the PA baseline. To be noted thatDAs follow their internal processes to manage the first steps of this procedure as well as theirSupplier Deviation Requests; Deviation requests from IO suppliers to IO: e.g. deviations from IO supplier contractbaseline for In-Cash contracts;Note: Hereby, the deviation requests from DA to IO, and IO suppliers to IO, are commonlydefined as the DA/CONT-DR process, see sect. 6.3.1 IO Deviation Requests: deviations from defined requirement(s) or punctual departures fromthe authorized high level configuration documentation belonging to the ITER Technical and/orManagement baselines (e.g. ASN approved safety files, Project Requirements (PR))Note: This DR process is known as IO-DR, for the remaining of the document, see sect. 6.3.23 Definitions and acronymsThe definitions of the configuration management terms used in this procedure are given in theConfiguration Management Glossary, ref. [2]Acronym DefinitionANB Agreed Notified BodyCID Central Integration DivisionCONT Contractor (i.e. supplier of IO, excluding DAs)CMS Configuration Management SectionDA/CONT-DR Domestic Agency/Contractor – Deviation requestDA PA TRO DA Procurement Arrangement Technical Responsible OfficerDR Deviation RequestESR Essential Safety RequirementIO Contract RO ITER Organization Contract Responsible OfficerIO-DIRO IO Design Integration Responsible OfficerIO-DR ITER Organization Deviation RequestIO-PARO IO Procurement Arrangement Responsible OfficerIO PA TRO ITER Organization Procurement Arrangement Technical ResponsibleOfficerIO-QARO IO Quality Assurance Responsible OfficerPage 3/14IO-SIRO IO System Integration Responsible OfficerIO-SRO IO Safety Responsible OfficerIO-TRO IO Technical Responsible OfficerMQP Management and Quality ProgrammePA Procurement ArrangementPA-CN Procurement Arrangement Change NoticePIA Protection Important ActivityPIC Protection Important ComponentPCR Project Change RequestPT Project TeamQAP Quality Assurance ProgramSIC Safety Important ClassSL Section Leader4 References[1] ITER Quality Assurance Program (QAP) (22K4QX)[2] Configuration Management Glossary (X2SH46)[3] Procedure for the Preparation, Review, Approval, Award and Amendmentof Procurement Arrangements (2W4F7A)[4] IO Deviation Request Template (2LRNQP)[5] Project Change Procedure (22F4E5)[6] Procedure for Configuration Control, Review and Audit (TZY7YV)[7] Sign-Off Authority (SOA) for Project Documents (2EXFXU)[8] Procedure for the Management of Safety Modifications (U34EB9)[9] Pressure Equipment Directive 2014/68/UE (RZ6PAK)[10] French Order dated 30 December 2015 concerning Nuclear Pressure Equipment(SMP384)[11] Implementation plan for design & manufacture of PE/NPE (VE2DSP)[12] Design Planning Procedure (U34ACR)[13] Design Change Control Procedure (U2QPDS)[14] ITER Integrated Safety, Environment and Security Management System (ISMS)Manual (4HCWJU)[15] In-Cash Procurement Procedure (658PD4)[16] MQP Process Management Procedure (7M445D)5 General principles5.1 Main principlesThe main principles that shall be respected for management of a DR are as follows:i. The DAs, suppliers of IO, and IO staff, can issue DRs for IO Approval. Page 4/14ii. As per ref. [2], DRs are punctual departures from a particular requirement(s) from the currentauthorized configuration documentation and prior to the execution of the actions that havean impact on meeting the original specified requirement(s)Note: A deviation permit is generally given for a limited quantity of items, period of time,and for a specific useiii. The DR process for both DA/CONT-DR and IO-DRs is composed of four main steps:1) Submission, see sect. 6.3.1.1 and 6.3.2.12) Review, see sect. 6.3.1.2 and 6.3.2.23) Decision, dispute and resolution, see sect. 6.3.1.3 and 6.3.2.34) Closure, see sect. 6.3.1.4 and 6.3.2.4iv. DRs can impact different authorized configuration documentation (e.g. the PA baseline, theITER technical baseline, etc.) depending on the DR submitter (see chapter 6)v. DRs shall be managed using a dedicated IT system (DR Database1 or IDM) from initialsubmission to closure, as per guidelines given in this procedureNote: DAs can use their internal IT applications/platforms to manage DRs before submissionto IO5.2 Main requirementsi. Deviation Requests shall be submitted for IO review and approval/rejection beforeimplementation of related activity(ies) (e.g. manufacture of the item). ii. Before submission to IO, the DA/CONT DRs shall be internally reviewed by competent andauthorised specialist(s) of the DA/supplier and approved for the submission to IOiii. IO DRs shall not be used to request to deviate from an agreed PA baseline or IO directcontracts (In-Cash contracts). Note: IO requested changes impacting PAs, shall be managed according to the procedurePreparation, Review, Approval, Award and Amendment of Procurements Arrangements(PA), ref. [3]. In line with this procedure, in most cases the vehicle for changing PA baselinesis the PA Change Notice (PA-CN)Note: IO requested changes impacting IO direct contracts (e.g. In-Cash contracts), shall bemanaged according to the In-Cash Procurement Procedure, ref. [15]iv. The DRs shall be issued using the DR Database or the DR Template (ref. [4]). If applicable,the DA/CONTs can provide their DRs using their internal template (ensuring that the filecontains the IO cover page), as follows:o Upload the internally approved DR into IDM so that the DR has a well-defined UIDo Ensure that the DR respects the mandatory information as per sect. 5.2 v. of thisprocedure;v. DR submitted forms shall contain (as a minimum) the information requested in the DRTemplate (ref. [4])”:o Type of DR: either DA, supplier of IO or IO submitter;o DR Reference Number;1 A DR Database (https://user.iter.org/default.aspx?uid=FA2VRS) is currently in place to support IO construction sub-contractors DRs. It is strongly recommended that this DR Database be used for DA-DR and IO-DR as well. Page 5/14o DR Title;o Type of Impact: item or MQP process;o Quality Class (QC2)Note: For DRs impacting more than one activity or component with different QCclasses, the submitter shall choose the highest QC in the DR Template (ref. [4]). Adetailed description of the components impacted with individual QCs shall be providedin sect. 2 (Description of deviation) of the DR template (ref. [4]). o Safety Class: SIC-1, SIC-2, SR, Non-SIC, PIA if applicable; For activities orcomponents with different safety classes, the same approach as for QC applieso IO PE or NPE: yes/no, incl. PE/NPE, pressure category and radioactive level (N2-N3)o Impacted Requirement Document: provide the reference, with a clear link to theIDM UID, of the document that contains the requirement(s) from which the submitterrequests to deviateNote: this can be a technical requirement document (such as a System RequirementDocument, a Technical Specification, etc.) or a process requirement document (MQPdocument)Note: there may be several Impacted Requirement Documents, in such case they shallall be listedo Description of Deviation: provide a clear description (and indicate the document IDMUID) of the original requirement(s) (before), the proposed alternative requirement(s)(after), and a detailed justification for the proposed departure (e.g. impact on criticalpath, etc.). In addition, provide a detailed safety justification if PIC/PIA are impactedo Impact Assessment: expected additional technical impacts to the best knowledge ofthe submitter, including an assessment of other impacted PBS, PAs, performance,maintainability, operability, reliability, etc., if known. All impacts shall be assessed,including cost, schedule, performance and logisticso List of expected impacted documents: exhaustive list of all documents with a clearlink to the document IDM UID to the best knowledge of the submitter, that are expectedto be impacted should the DR be approved. The impacted documents are technicaldocumentation that uses as input the requirement(s) that the submitter request todeviate fromvi. DRs shall not:o Lead to a modification of the Performance Baseline. The ITER Performance Baselineis the authorized configuration that comprises the ITER integrated cost, schedule andscope documentationo Constitute a permanent change to a document of the ITER Technical Baseline. If a DRleads to a permanent change of the ITER Technical Baseline, a Project Change Request(PCR, see ref. [5]) shall be triggered prior to acceptance of the change. The rationalefor the request of a PCR is detailed in sect. 6.3.1.2Note: Changes impacting one of the ITER Project’s baselines shall be managed using theConfiguration Control procedure, ref. [6]2 Quality Class to be determined as per the Quality Classification Determination documentPage 6/146 Workflow6.1 FlowchartThe flowcharts for the DA/CONT-DR and IO-DR processes are shown in Figure 1 and Figure 2 belowPage 7/14Flowchart of DA/CONT-DRDA PA TRO or Supplier RO assubmitterIO PA TRO or IO Contract RO, or MQPRequirement Document Approver *SROIO-SIROs, IO-DIROs, QA-RO, PE/NPEGroup Expert, MQP Process Owner,and other relevant reviewers as neededI. Submission III. Decision IV. Closure II. ReviewIs DR templatecorrectly filled in ?Identify Reviewer(s)and ApproverYesNoFill in DR as per templateref. [4]Review DRApprove DR + Upload DRinto DR Database or IDMPIC/PIA related?YesReview DRNoReject DR and providerationale to submitter (andgo to step 19)NoTechnical Baselinepermanentlyimpacted?IO PA TRO / IO Contract RO toissue PCR as per ref. [5]YesDR awaits for PCR decision:- Approve DR if PCR approved- Reject DR if PCR rejected+IO PA TRO / IO Contract RO toinform the submitter plus allparties / organizations involvedof standby using IDM email* For DA/CONT-DRs purely related to the MQP process, the MQP RequirementDocument Approver shall be the approver of the DR (see step 17 below). As for thesteps 4 and 5, they shall be done by the IO PA TRO or IO Contract RO, as for non-MQP process related DA/CONT-DRsSRO provides safetyassessment of DRYesDR Approved?NoIO PA TRO / IO ContractRO provides rationale tosubmitter and all partiesinvolvedDR disputed bysubmitter?IO PA TRO / IO ContractRO initiates resolutionprocess to solve thedisputeSubmitter todisseminate results toall stakeholdersSubmitter to confirmimplementation(optional)DR ClosedSTEP 1STEP 2STEP 3STEP 4STEP 5STEP 6NoticeablemodificationSTEP 7YesNoRecommended?STEP 11STEP 8STEP 9STEP 10STEP 12STEP 13STEP 14No YesNoSTEP 17 STEP 18 STEP 19 STEP 20YesSTEP 21 STEP 22STEP 23IO PA TRO / IOContract RO needs toescalate decision?IO PA TRO / IOContract RO escalatesdecision to HigherLevel AuthoritiesYesNoSTEP 15 STEP 16EscalationDisputeFigure 1 - Flowchart of DA/CONT-DRPage 8/14Flowchart of IO-DRIO-TRO (or delegate) assubmitterIO Requirement Document Approver * SROIO-SIROs, IO-DIROs, QA-RO, PE/NPEGroup Expert, MQP Process Ownerand other relevant reviewers as neededI. Submission III. Decision IV. Closure II. ReviewIs DR templatecorrectly filled in ?Identify Reviewer(s)and ApproverYesNoFill in DR as per templateref. [4]Review DRUpload DR in DR Databaseor into IDMPIC/PIA related?YesReview DRNoReject DR and providerationale to submitter (andgo to step 17)NoTechnical Baselinepermanentlyimpacted?Issue PCR as per ref. [5]YesDR awaits for PCR decision:- Approve DR if PCR approved- Reject DR if PCR rejected+IO requirement Documentapprover or MQP Process ownerto inform the submitter plus allparties / organizations involvedof standby using IDM email* For both non-MQP and MQP process related IO-DRs, the IO RequirementDocument Approver (i.e. the approver of the document that contains therequirement(s) from which the submitter requests to deviate – see 5.2 v.) shall bethe approver of the DR (see step 15 below). As for step 4, in the case of MQPprocess related IO-DR, it can be done by the MQP Process Representative insteadof the IO Requirement Document ApproverSRO provides safetyassessment of DRYesDR Approved?NoProvide rationale tosubmitter and allparties involvedDR disputed bysubmitter?IO requirement documentapprover or MQP ProcessOwner initiates resolutionprocess to solve the disputeSubmitter todisseminate results toall stakeholdersSubmitter to confirmimplementation(optional)DR ClosedSTEP 1STEP 2STEP 3STEP 4STEP 5STEP 6NoticeablemodificationSTEP 7YesNoRecommended?STEP 11STEP 8STEP 9STEP 10STEP 12STEP 13STEP 14No YesNoSTEP 15 STEP 16 STEP 17 STEP 18YesSTEP 19 STEP 20STEP 21Figure 2 - Flowchart of IO-DRPage 9/146.2 ResponsibilitiesThe main responsibilities for the roles described in this procedure are described in sections 6.3.1 and6.3.2The main roles covered in this procedure are: DA PA TRO, Supplier RO or IO TRO (as submitters) IO PA TRO or IO Contract RO DIRO, SIRO IO Expert, PE/NPE Group Expert, etc. as needed QARO SRO IO Requirement Document Approver MQP Process Owner, MQP Process Representative and other MQP stakeholders6.3 Description of steps6.3.1 DA/CONT-DR ProcessBelow we describe the tasks to be executed for each of the four main steps of the DA/CONT-DR (seeFigure 1)6.3.1.1 SubmissionThe DA PA TRO or the Supplier RO (submitters) shall: Step 1: Identify the necessity for a DR from a PA or contract baseline and initiate the requestby using the DR Database or by following the DR template (ref. [4]). The DAs or suppliers can provide their DRs using their internal template, as described in sect. 5.2 Main Requirements (iv) Step 2: Review the DR for technical coherence, completeness and clarity, according to therelevant DA or Supplier internal procedures, prior to the submission to IO Step 3: The DA PA TRO or Supplier RO line manager shall approve the DR before submissionto IO and shall upload the DR template into the IT tool IDM (if the DR Database was not used)6.3.1.2 Review Steps 4 and 5: The IO PA TRO or IO Contract RO shall provide the first check byreviewing the DR submitted form for completeness and appropriateness, and verify thatit is in agreement with the main requirements as per Sect. 5.2 of this procedure:o If DR submitted form is correctly filled in, the IO PA TRO or Contract RO identifiesthe appropriate reviewers. The mandatory reviewers are:o SRO, if protection important components or activities are impacted (i.e. PIC/PIA ticked in the DR template ref. [4])o QAROo DIROo SIROo PE/NPE Group Expert (when ITER acts as manufacturer of PE/NPE equipment)Page 10/14o IO experts, if the field of concerned expertise is not covered by the mandatoryreviewers and the approvero MQP process owner (or delegate), as well as the authors & reviewers of theMQP document from which the DR requests to deviate, if the DR is related toan MQP processo Once reviewers are assigned, the IO PA TRO or IO Contract RO shall inform allreviewers that the review process has started using the IDM email functiono If the DR is not correctly filled-in, the IO PA TRO or IO Contract RO shall requestfurther processing to the DA PA TRO or Supplier RO submittero The CMS-SL (or delegate) shall be added as observer Steps 6, 7, 8 and 9: If protection important components or activities are impacted, theSRO shall review as follows:o Verify all impacts on regulatory, safety or environmental requirements, and provide thesafety and environmental assessment in the DR template (ref. [4]). This assessmentshall include the determination whether the proposed deviation constitutes a noticeablemodification or, on the contrary, a non-noticeable modification, as defined in ref. [8];o Either:o Inform the IO PA TRO or Contract RO to trigger the PCR process, in case thedeviation constitutes a noticeable modification, as follows: Issue a PCR, as per ref. [5]. The PCR decision shall be registered in theDR template form (Step 13); Maintain the DR is standby awaiting PCR decision and provide therationale for the decision to issue the PCR to the submitter and allinvolved parties (Step 14);o Or recommend the DR;o Or reject (unless revised) the DR and provide rationale for the decision (see step10)o If IO acts as a manufacturer of PE/NPE equipment, the PE/NPE Group Expert shallverify impacts on Essential Safety Requirements (ESR) (see ref. [9] and [10]) andquality requirements as defined in ref. [11], and assess if the DR shall be transmitted tothe ANB Steps 11 and 12: The IO DIROs, SIROs and other technical reviewers as needed shallreview the DR in order to:o Ensure that the DR is technically justified and all requirements as per sect. 5.2 arerespected;o Assess the technical aspects from system integration/configuration management pointof view and provide the System/Design Integration assessment as needed, in the DRtemplateNote: The IO DIRO and SIRO shall ensure that the approved DRs are captured in thesystem configurationso Verify if the DR impacts on ITER system level performance, reliability, operability,and interfaces, as needed;o Verify if the submitted DR impacts permanently any document from the ITERTechnical BaselinePage 11/14 If the IO DIRO or SIRO estimates that the requested deviation constitutes a permanentimpact to the ITER Technical Baseline, he/she informs the IO PA TRO or Contract ROto trigger the PCR process, as follows:o Issue a PCR, as per ref. [5]. The PCR decision shall be registered in the DR templateform (Step 13);o Maintain the DR is standby awaiting PCR decision and provide the rationale for thedecision to issue the PCR to the submitter and all involved parties (Step 14);Note: the DA is also entitled to trigger directly the PCR process IO-QARO shall check the compliance of the submitted DR against the requirements in thisprocedure, the assignment of QC as per Quality Classification documentation, the assignedreviewers or approver according to this procedure, and the compliance against other concernedquality documents, e.g. Quality Plan, and other specific Sign-of-Authorities related to ProjectTeams (PT) and construction Each reviewer shall have ten (10) business days to recommend / disapprove the DR, with aclear explanation. If after 10 days the reviewer has not signed the DR (either recommending ordisapproving it) the IO PA TRO or Contract RO shall query as to its status and send an emailreminding the reviewer(s) of the missing action6.3.1.3 Decision, Dispute and Resolution If protection important components or activities are impacted, the SRO shall decide onthe recommendation or rejection of the DR from the safety and environmental point ofview:o If recommended, the SRO shall notify the DR submitter of the decision and route it toreview from the technical aspects system integration point of view (Step 11). o If rejected, the SRO shall provide rationale to submitter and all parties involved usingthe IT management tool IDM email function (Step 10) Steps 15, 17, 18: For all DRs recommended by the SRO or not impacting protectionimportant components or activities, the IO PA TRO or IO Contract RO (after thetechnical revision is terminated, Step 11), shall decide on the Approval or Rejection ofthe DR, and provide a rationale to the DR submitter and all involved parties. DRs shallonly be approved after establishing, through technical knowledge, expertise and experience, orby requesting the expertise of other experts, that approval of the request is acceptable withregards to the PA / CONT objectives and overall project needs; For DA/CONT-DRs related to the MQP process, the approver shall be the IO approverof the MQP document from which the DR requests to deviate Step 16: If the decision related to the DR is above the authority of the IO PA TRO or IOContract RO, the DR shall be escalated to a higher level authority. Higher level Authoritiesconsist of:o Impacted Section Leader, or delegate;o Impacted Head of Division/Department or delegate, as appropriate; If the DR is rejected, the DA PA TRO or Supplier RO:o Shall try to develop an alternative plan that does not require deviation in order to fulfilrequirements. If the DA PA TRO or Supplier RO devises and alternative solution that (still)involves a departure from the requirement(s), the IO PA TRO or IO Contract RO shallanalyse the request and inform the submitter if this alternative solution can be consideredfor acceptancePage 12/14o If an alternative solution is not suggested, the DA PA TRO or Contractor RO can disputethe decision and liaises with the involved parties for solution seeking.  Step 20: If the DR is rejected, or a reviewer disapproval rationale is disputed by the initiatorand cannot be resolved at the IO PA TRO or IO Contract RO level, they shall initiate aresolution process to solve the dispute, as follows:o Appeal to the higher level management for a solution;o If not settled, the DR shall be listed in the Project Issue Management (PIM) list:https://jira.iter.org/secure/RapidBoard.jspa?rapidView=45&projectKey=PIM The decision to approve a DR from a DA/Supplier A impacting the scope of a DA/supplier B,with no impacts to the ITER baseline, shall be taken by a higher level authority that has the fulloverview to make the decision of approving the DR from the DA/Supplier A and trigger a PAChange Notice (see ref. [3]) for the DA/Supplier B without changing the ITER baselineUpon decision, the DA PA TRO or Supplier RO shall inform the submitter of the DR decisiontaken by using the IDM email function (as long as IDM is the available tool) and distribute thelink to higher-level management (e.g. Section Leader, Head of Division), as necessary Estimated time for decision on a DR is 2 weeks. One additional week to be considered if thedecision needs to be escalated6.3.1.4 ClosureThe DA PA TRO or Supplier RO (as submitters) shall: Step 21: Ensure that the DR decision was disseminated to all stakeholders and providecorrective action as needed Ensure that all impacted documentation (including, document UID) is registered in the DRsubmitting form (as per sect. 5.2).  Step 22: Confirm the DR implementation (optional), for cases when further critical actions aretriggered by DR approval and/or related documentation needs to be revised to reflect theimplementation of the deviation. For cases when DR implementation confirmation is required,the DR submitter shall attach all the necessary evidences to demonstrate the implementation6.3.2 IO-DR ProcessAs shown in Figure 2, the IO-DR process is similar to the DA/CONT-DR process except for a fewsteps as shown below6.3.2.1 SubmissionSteps 1 to 3: The IO-DR submission process shall be performed similarly to the one described in sect. 6.3.1.1, with a few exceptions: The IO TRO (or a delegate) is the submitter of the IO-DRs The IO-DR shall be reviewed internally by the IO-TRO (or a delegate) line manager, e.g. Section Leader or Head of Division/Department, using the IT tool6.3.2.2 Review Steps 4 and 5: The IO requirement document approver (i.e. the document that containsthe requirement(s) from which the submitter requests to deviate – see 5.2 v.) shall providethe first check by reviewing the DR submitted form for completeness and appropriateness,and verify that it is in agreement with the main requirements as per sect. 5.2 of thisPage 13/14procedure. For IO-DR related to the MQP process, this check can instead be done by theMQP Process Representativeo If DR submitted form is correctly filled in, the IO TRO identifies the appropriatereviewers. The mandatory reviewers are:o SRO, if protection important components or activities are impacted (i.e. PIC/PIA ticked in the DR template ref. [4])o QARO, DIRO, SIROo PE/NPE Group Expert (when ITER acts as manufacturer of PE/NPE equipment)o IO experts, if the field of concerned expertise is not covered by the mandatoryreviewers and the approvero MQP process owner (or delegate), as well as the authors & reviewers of theMQP document from which the DR requests to deviate, if the DR is related toan MQP process. o Once reviewers are assigned, the IO TRO shall inform all reviewers that the reviewprocess has started using the IDM email functiono If the DR is not correctly filled-in, the IO requirement document approver shall requestfurther processing to the IO TRO submittero The CMS-SL (or delegate) shall be added as observer Steps 6 to 14: the other reviewers as necessary, shall execute the same steps as described insect. 6.3.1.26.3.2.3 Decision, Dispute and ResolutionSteps 15 to 18: For the IO-DR, decision, dispute and resolution follow the same steps as given in sect. 6.3.1.3, with the exception that: For the IO-DR, a decision shall be taken by the IO Requirement Document Approver (i.e. thedocument that contains the requirement(s) from which the submitter requests to deviate – see5.2 v.), both for non-MQP and MQP process related DRs. No escalation is possible.  If the IO-DR decision is disputed, the IO Document Approver shall initiate a resolution processby following the same steps as given in sect. 6.3.1.36.3.2.4 ClosureSteps 19 to 21: For the IO-DR closure, the submitter shall follow the same steps as for the DA/CONTDR described in sect. 6.3.1.47 RecordsThe expected records from the DR process are provided belowRecord Template Place tostoreDoc type NamingconventionRetentionperiodDeviationRequestTemplate inref. [4], orDA/CONTtemplateDRDatabase (*)or IDMDA QA DeviationRequestContractor QADeviation RequestITER QADeviation RequestIDM procedures orDR DatabaseITERlifetimePage 14/14(*) https://user.iter.org/default.aspx?uid=FA2VRS8 Interactions with other processes8.1 Interactions with the Design Control ProcessThis procedure belongs to the process of Configuration Management (QAP, sec. 3.1, see ref. [1]]) andinteracts with the process of Design Control (QAP, sect. 3.3, see ref. [1]). The Design Control processprovides guidance to the IO PA TRO, IO Contract RO or IO Requirement Document approver for thereview of design integration aspects of DRs using the MQP procedures for Design Planning, ref. [12],and Design Change Control, ref. [13], among others8.2 Interactions with the Supply ProcessThis procedure interacts with the Supply process (QAP, sect. 3.4, ref. [1]). IO changes to PAs or IOdirect contracts (e.g. In-Cash contracts) shall be managed using the Procedure for the Preparation,Review, Approval, Award and Amendment of Procurement Arrangements (PA), see ref. [3] and theIn-Cash Procurement Procedure, see ref. [15]8.3 Interactions with Nuclear Safety ProcessesThis process interacts with the Nuclear Safety processes. The Safety RO reviews the DR according tothe Procedure for the Management of Safety Modifications (ref. [8]) and to ensure that it complieswith the ITER Integrated Safety, Environment and Security Management System (ISMS) Manual (ref. [14]), including the MQP L2 and lower level procedures. 8.4 Interactions with MQP Process Management ProcessThis process interacts with the MQP Process Management process. As indicated in ref. [16], deviationsfrom MQP should be permissions and not requirements or recommendations. Deviations from MQPshall be reviewed and approved by impacted original document’s stakeholders and recorded in IDMIt is recommended to use the current DR Procedure to track any Deviation to MQP requirementDeviation Request (DR)Template ref. ITER_D_2LRNQP v.4.0Page 1 of 21. GeneralType of DR IO / DA / CON Issue DateDA/ CON / ref. num. DR TitleItem/ ComponentidentificationWork Activity:PBS description PBS numberMain PBSQuality class (QC) QC 1: ☐ QC 2: ☐ QC 3: ☐ QC 4: ☐Safety self -assessment by ROPIC/SIC-1 PIC/SIC-2 Non-SIC PIA☐ ☐ ☐ ☐IO Manufacturer ofthe PressureEquipment or Nuclearpressure EquipmentYes ☐No ☐PE ☐NPE ☐Pressure Category☐0☐I☐II☐III☐IVRadioactive level☐Level N2☐Level N32. Description of DeviationIntroductionDescription of theoriginal requirements(Before)Description of theproposed alternative(After)Justification (for PICand PIA, include safetyjustification)別添－10Deviation Request (DR)Template ref. ITER_D_2LRNQP v.4.0Page 2 of 23. Impact assessment (to be filled by initiator)Other technical impact ☐Cost impact ☐Schedule impact ☐Impact on interface,other impacted PBS,PA, etc. ☐Impacted documents ☐ List impacted document title and Uid + Rev. Num. Other impacts☐Follow-up of DRimplementation (see note 4*)Required ☐ Not required ☐4. Safety and Environmental (Assessment by EPNS-DH – see note 2*)Assessment result andcomments☐ Escalation required to a EPNS meeting required /☐ Accepted (No escalation)☐ Rejection unless revised5. System / Design Integration (Assessment by IO-DIRO – see note 3*)Assessment result andcomments☐ Escalation to a PCR required☐ Accepted (No escalation to PCR required)6. DecisionsName Signature* Date DecisionInitiatorCON RODA ROIO-Approver ☐ Approve *☐ Reject *7. Confirmation of Implementation (if required – see section 3 – impact assessment)Name Signature* DateCON-RODA ROIO-Approver8. List of AttachmentNote *:1- Signature of DR and confirmation of IO decision (reject/ accepted) are mandatory required. IDM system may be used forDR review and approval signatures (DR shall indicate the reviewers / approver names and date). 2- EPNS-DH (delegated SRO) assessment will be recorded in IDM system – with a clear resolution if DR is rejected/escalated. 3- DIRO assessment will be recorded in IDM system. If escalation to PCR is required then the section 5 of DR shall bemandatory filled. 4- The DR implementation confirmation “is required” typically for the cases when further critical actions are triggered by DRapproval and/ or related documentation need to be revised to reflect the deviation implementation. PDF generated on 13 Apr 2021DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMMQP Level 2Procedure for Management of NonconformitiesThe purpose of this document is to specify the Nonconformity Management process,hereinafter NC from the Initiation to the Closure in the IO NC system. The Workflow as wellas the Roles and Responsibilities of each stakeholder are specified in a generic wayApproval ProcessName Action AffiliationAuthor Neagu S. 19 Mar 2021:signed IO/DG/SQD/QMDCo-AuthorsReviewers Calpena S. Crowther D. Drummond M. Elbez-Uzan J. Ilves J. *Jung C. YKirnev G. Lamotte P. Meignan V. Merola M. Miele P. Mokaria P. Pang B. Salamon B. Sato K. Yoon B. Zhang B. Zhao Z. 09 Apr 2021:recommended12 Apr 2021:recommended06 Apr 2021:recommended08 Apr 2021:reviewed12 Apr 2021:recommended06 Apr 2021:recommended29 Mar 2021:recommended02 Apr 2021:recommended13 Apr 2021:reviewed25 Mar 2021:recommended30 Mar 2021:recommended31 Mar 2021:recommended30 Mar 2021:recommended08 Apr 2021:recommended26 Mar 2021:recommended24 Mar 2021:recommended31 Mar 2021:recommended19 Mar 2021:recommendedIO/DG/SQDIO/DG/CORP/FPD/PCD/ESOCIO/DG/SQD/EPNSF4E (EU)IO/DG/SQD/QMDRussian Research Centre "KurchatovIO/DG/CORP/FPDIO/DG/ENGN/EDDIO/DG/CORP/PCO/ECPCIN DA (Supplier & DA) (IN)IO/DG/ENGN/CIO/CMD/DCCQST (JP)Chinese Domestic Agency (CN)IO/DG/SQD/QMDApprover Tada E. 13 Apr 2021:approved IO/DG/CORPDocument Security: Internal UseRO: Khomutnikov AlekseiRead Access LG: SQD Managers, GG: MAC Members and Experts, LG: Quality Control Group, AD: ITER, AD:External Collaborators, AD: IO_Director-General, AD: External Management Advisory Board, AD: OBS -Quality Management Division (QMD) - EXT, AD: OBS - Quality Management Division (QMD), AD:Auditors, AD: ITER ManaIDM UID22F53XVERSION CREATED ON / VERSION / STATUS19 Mar 2021 / 9.1 / ApprovedEXTERNAL REFERENCE / VERSION別添－11PDF generated on 13 Apr 2021DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMChange LogProcedure for Management of Nonconformities (22F53X)Version Latest Status Issue Date Description of Changev1.0 In Work 25 Feb 2005v2.0 In Work 14 Sep 2005v3.0 In Work 14 Dec 2005v4.0 In Work 28 Feb 2006v4.1 Signed 10 Apr 2008v4.2 Signed 10 Apr 2008v4.3 Signed 11 Apr 2008v4.4 Approved 11 Apr 2008v5.0 In Work 18 Jun 2012 Definitions of Deviation and Specified Requirement clarified and immediatenotification and agreement of classification of non-conformances introducedv5.1 Approved 18 Jun 2012 Minor editorial change to contentsv6.0 Approved 02 Apr 2013 - modification of the title- add the following steps in the process for non-conformities:- root causse analysis- corrective action (if needed)- closure of NCRv6.1 Approved 25 Jun 2013 Modifications according to approved MQP Doc Request G23MB4:- Changes to allow verbal agreement on remedial actions when the non-conformance does not impact on an external system- Minor NCR: the section 1, 2.1 and 2.2 need to be filled and sent to IOv6.2 Approved 13 Mar 2015 Changes according to MQP doc Request - QWRRS2:- Addition of an explanatory footnote for PIC and PIA- Addition of PIA with PIC- Addition of list of internal NCRs to be sent to IO upon request of QAROv7.0 Approved 18 Aug 2017 Update according to MQP doc request VBFECU (the summary of pre-reviews: MQPWG, SQAWG, SD, Construction Teams.. can be found in theMQP doc request VBFECU). The changes consists in clarification, simplification by making the documentgeneric (thus applicable to all phases; not only to Manufacturing but also toConstruction), and rework of the document according to the MQP template438T76:- Process NC introduced (not product NC as previously understood);- Simplification of number of documents (starting situation was 6documents level2): 22F53X is now the Level 2 MQP for Nonconformitymanagement, e.g. merging RGF2R7 (PT), dealing with both external IO NCand internal IO NC- The workflow and roles rendered generic (e.g. notion of DIRO nowextended to 'interaction RO', so that it can encompass Construction Teams)- Clarified list of criteria (Baseline, Performance,.) to guide in thecategorization of NC (major / minor), still keeping the same criteriaregarding Regulatory Requirements, Safety, Environmental impact- The requirement of paragraph 2.9 of revised QAP version 8.5, and GIN007(General Instruction Note from DG), are propagated: tracking of NC closure;re-enforcement of tracking mechanism of actions until implementation- KPI of the process and escalation process (in case of dispute) areintroducedv7.1 Approved 11 May 2018 As per MQP doc Request - WK69F2Includes Module H needsv8.0 RevisionRequired10 May 2019 as per approved MQP doc Request - XYLYX5:- requirements regarding Counterfeit, Fraudulent, and Suspect Items (CFSI)PDF generated on 13 Apr 2021DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMas per Safety Division Action plan (definition CFSI included, clearrequirement for SD involvement and responsibilities). - clarify the IO NC approval level (process owner / DH) as per NCRdatabase application- reference of JIRA CAT system to be applied for action follow-up- clarification related to minimum time - frame from NCR detection untilNCR recording (maximum two weeks is allowed). - clarifications regarding intermediate / conditional release of NCR thatrequires further long term actions (further actions and instruction to berecorded in release note)v8.1 Signed 14 Jun 2019 Revision to implement reviewer comments from previous version. List ofchanges:- add reference - XKUKAX- add DAs responsibilities (as per NCR database application)- add clarifications regarding baseline levels (see chapter 5.1 and annex 2)- add further clarifications for NCR conditional release. - add annex 2 - Baseline level map as per [11]- add clarifications on appendix 1 - NC formv8.2 Approved 17 Jun 2019 Revision - Technical IDM issue. Revision as per MQP doc Request - XYLYX5 & to implement reviewercomments from previous version. List of changes:- add reference - XKUKAX- add DAs responsibilities (as per NCR database application)- add clarifications regarding baseline levels (see chapter 5.1 and annex 2)- add further clarifications for NCR conditional release. - add annex 2 - Baseline level map as per [11]- add clarifications on appendix 1 - NC formv9.0 In Work 19 Mar 2021 - Chapter 3.1 – arrange definition – alphabetic order- Chapter 3.1 – add the following definitions:o Causal Analysis Treeo Contractoro Inter-Organization Non-Conformity (I-NC):o IO NC system (add note for clarification NC database scope)o PE Groupo Scrap (remedial action)o Root Cause Analysis (RCA)o Serviceo Service provider- Chapter 3.2 add the following abbreviations:o CAT; I-NC, PBS, PROR, SCG- Chapter 4.1 add the following referenceso [31] How to – Long Aging NCRs management 3CZWDXo [32] Risk and Opportunity Management Procedure 22F4LEo [33] Management review procedure 3L7SWXo [34] Lessons Learned meeting Procedure DV4UUHo Add note “The procedures are applicable to the DAs, only if they arelisted in the Multi Party Amendment (MPA).”- Chapter 5.1, 5.2, 5.3 and 5.4o Change the structure of procedure to reflect the NCR stageso For NCR categorization ITER_D_4HCC3W - HOW TO - NCRCategorization was addedo Add RCA categories and Causal Analysis Tree (CAT)o Add mandatory requirements to defined expected due dates for decidedremedial actionso Add mandatory requirements to defined expected due dates for NCRclosurePDF generated on 13 Apr 2021DISCLAIMER : UNCONTROLLED WHEN PRINTED – PLEASE CHECK THE STATUS OF THE DOCUMENT IN IDMo Add specific section for Inter-Organizational Non-Conformity (I-NC)o Add requirements for application of fast NCR closure – applicable onlyfor minor NCRo Add specific section for Conditional Release of NCo Add clarification for RCA methodology - ITER_D_2X4E9A - RootCause Analysis Leafleto Add clarification for NCR closureo Add interaction with the risk and opportunity process. - Chapter 5.5 – changes to introduce specific requirements for Module Hand H1- Add chapter 5.7 – Internal NC of Performers- Chapter 7 – change the responsibilities for process owner and DH – forIO NCRs- Chapter 9.3 – add requirements for “Nonconformities survey process forPIC and PIA”v9.1 Approved 19 Mar 2021 Technical issuePage 1 of 26Table of Contents1 PURPOSE.22 SCOPE.22.1 OUT OF SCOPE.23 DEFINITIONS AND ACRONYMS.23.1 DEFINITIONS.23.2 ACRONYMS.54 APPLICABLE AND REFERENCE DOCUMENTS.64.1 APPLICABLE DOCUMENTS.64.2 REFERENCE DOCUMENTS.75 BASIC PRINCIPLES.75.1 GENERAL PRINCIPLES FOR NC MANAGEMENT.75.2 NCR INITIATION – 1A.85.3 ASSESSMENT OF NONCONFORMITY – STAGE 1B.95.4 NCR CLOSURE – STAGE 2.115.5 PE/NPE ASSESSMENT.125.6 CASE OF NC RELATED TO CFSI.136. WORKFLOW.157. RESPONSIBILITIES.168. RECORDS/OUTPUTS.189. LINK WITH OTHER PROCESSES.189.1. LINK WITH OTHER ‘QUALITY ASSURANCE’ PROCESSES (QA AUDIT, CAR)189.2. LINK WITH ‘PROCUREMENT’.189.3. LINK WITH ‘NUCLEAR SAFETY’.199.4. LINK WITH ‘CONFIGURATION MANAGEMENT’ PROCESS.199.5. LINK WITH ‘DOCUMENTS AND RECORDS’.199.6. LINK WITH “PE/NPE CONFORMITY ASSESSMENT”.2010. DISPUTE AND RESOLUTION.2011. KPI.20APPENDIX 1: LIST OF RELATED INFORMATION / DATA TO BE PROVIDED IN NCSYSTEM TEMPLATE.21APPENDIX 2 – TECHNICAL BASELINES OVERVIEW LEVELS AS PER [11] – SEE ITERBASELINE DIAGRAM.23APPENDIX 3 – CAUSAL ANALYSIS TREE FOR ROOT CAUSE ANALYSIS (RCA).24Page 2 of 261 PurposeThe purpose of this document is to specify the Nonconformity Management process, hereinafter NC fromthe Initiation to the Closure in the IO NC system. The Workflow as well as the Roles and Responsibilitiesof each stakeholder are specified in a generic way2 ScopeThis MQP Level 2 Procedure belongs to the Process ‘Quality Assurance’ and propagates the requirementsof the chapter 2.9 of the Quality Assurance Program (QAP) [5], and of the chapter 10.2 of the IntegratedSafety Management System Manual (ISMS) [6]. Hierarchy of MQP documentation is illustrated below:This procedure shall be followed for the management of Nonconformities detected during the all ITERproject phases (from the design until operation/maintenance). - for both types of NCs: Product NC and Process NC,- by both internal and external performers (IO/ DAs/ suppliers / contractors)2.1 Out of Scope Management of Deviation Request Cost and schedule issues. To be treated as per contractual requirements The management of Internal Nonconformities 1 of external Performers is not covered by thisprocedure. o However, external Performers shall make lists of their Internal Nonconformities available toIO for information, on request of IO NC of Quality Audit (see link with others processes in section 9)3 Definitions and acronyms3.1 DefinitionsAction assignee: An all-inclusive term to designate any person assigned to perform an action in thecourse of the NC treatment. This person can be from any organizationAuthorized Body/Authorized Notified Body: Organisation authorized by a member state to carry outconformity assessment of pressure equipment and /or nuclear pressure equipmentBaseline documents (level 0, 1, 2 and 3) – to be used for NC categorization – definition as per [11]1 Nonconformities according to the QMS of the external PerformersPage 3 of 26The ITER baseline is the set of all configuration items with all of its applicable documents approved atone of the project’s key milestones that serve as a reference for activities throughout the lifecycle of aproduct. The scope of a baseline shall be unique and not overlapping with any otherCausal Analysis Tree: The Causal Analysis Tree is shown in Appendix 3 (“B”-Level) of the procedure. The Causal Analysis Tree is a result of a benchmarking study of industry causal analysis systems. Thelowest level of the Causal Analysis Tree is typically referred to as the “B” Level. The Causal AnalysisTree allows for a tailored approach to developing corrective actionsCorrective vs preventive/risk-based actions 2 Corrective action: action to eliminate the cause of Nonconformity Preventive/risk-based action: an all-inclusive term to refer to an action to eliminate the cause of apotential nonconformityContractor: legal entity/ organization who has entered into a contract with the IOCounterfeit, Fraudulent, and Suspect Items (CFSI)A counterfeit item is a copy or substitute without legal right or authority to do so or one whose material,performance, or characteristics are knowingly misrepresented by the vendor, supplier, distributor, ormanufacturer. A fraudulent item that items which is intentionally misrepresented to be something they are notA suspect item is one in which there is an indication by visual inspection, testing, or other informationthat it may not conform to established industry-accepted specifications or national/international standards. Deviation Request, DR (out of Scope)Request for deviation from a specified requirement in a formal agreement (e.g. signed contract, signedProcurement Arrangements…)DA RO DA staff member nominated as responsible for the coordination of NC process within DA andensuring continuous interfaces with IO and performers (initiation and closure of the NC).  For the NCR related to PA implementation, the IO NC system (NCR database) shall be used. ForNCRs where the NC ownership will be under DA responsibility, the DA RO will apply DA specificNCR procedure. Inter-Organization Non-Conformity (I-NC):2 Clarification on the term ‘preventive’ in this document: depending on Standards, various terminologies exist:Definitions ISO 9000 v2015(QMS - Fundamentals &vocabulary)Concept of preventive action inISO9001 v2015 (QMS - Requirements):Terminology INB order [1] Terminology IAEAGSR part 2 / 20163.12.1 preventive actionaction to eliminate the cause ofa potential nonconformity orother potential undesirablesituation …Note: Preventive action istaken to prevent occurrencewhereas corrective action istaken to prevent recurrence0.3.3 Risk-based thinkingThe concept of risk-based thinking hasbeen implicit in previous editions of ISO9001, including for example carryingout preventive action to eliminatepotential nonconformities … One of thekey purposes of a quality managementsystem is to act as a preventive tool. Consequently, ISO 9001 v2015 does nothave a separate clause or sub clause onpreventive action. Art. 2.6.3. − I. – The operatorensures discrepancies aremanaged within a time-frameadapted to the issues concerned,in particular by … defining theappropriate remedial, preventiveand corrective actions6.3. The causes of non-conformancesof processes … shall be evaluated andany consequences shall be managedand shall be mitigated …The status and effectiveness of allcorrective actions and preventiveactions taken shall be monitored andshall be reported to the managementat an appropriate level in theorganizationPage 4 of 26Nonconformity with multiple interfaces between different entities DAs / IO and suppliers. A non-conformity that may be resolved more efficiently or in the best interests of the ITER Project by a party(DA or IO) other than by the Sending DA or its contractors. It applies in situations when a quality issue isidentified late in the item’s manufacturing process when there is a time criticality associated with theonward availability of this item, causing consequential impacts on later workInitiator of a NC: Entity or person who detect the Nonconformity and triggers its’ registration. Mainly the performer butcan be any stakeholder of the ITER project (e.g. IO-CT, IO-PT, DA, ASN, (A)NB staff members,etc.). IO/ DA Specified Requirement: Specified requirements by IO/ DA including:o Technical and Quality requirementso Regulatory requirements. IO NC Owner, hereafter IO-RO: IO staff member nominated as responsible for the coordination and closure of the NC, in the IO NCsystem (NCR database). Depending on NC scope the IO-RO is :o for Product NC, TRO (manufacturing phase) or CRO (construction phase). o for Process NC, the IO DH of affected entity. IO-Interactions RO An all-inclusive term to designate a RO who is managing the project / contract affected by the originalNC and related interactions with other systems (e.g. DIRO or RO in Construction Teams…)IO NC system: An all-inclusive term used to refer to the agreed system for tracking and recording NCs until closurein IO. Either IO NCR Database (DB) or through IDM system (for specific cases – see the note)Note: IDM maybe used only for specific cases when NC database does not provide necessary configurations, ensuring flexibility forrecording of such specific NCR (e.g. cases when performers refuse or are not available to apply NCR DB, etc.). The use of IDM instead ofNCR database shall be agreed with IO QARO in advance (by email). After NCR approval in IDM, QMD shall ensure the transfer (link) ofsuch NCR from IDM to NCR database (NCR legacy) considering the graded approach established by QMDLong-term actions – Actions (remedial/ corrective actions) that requires more than one month forimplementation and strict follow-up of responsible and due dates. Manufacturer Means any organization or legal person who manufactures a product or has a productdesigned or manufactured, and markets that product under his name or trademarkNonconformity, herein NC Non-fulfilment of a requirement Product or Process, which does not fulfil or fail in meeting IO / DA, specified requirements. NC report Nonconformity Report, i.e. the record of each Nonconformity (NC); sometimes referred as NCRPerformer An all-inclusive term used to cover both IO internal and external organizations, such as IO-CT, IO-PT, Domestic Agencies, Suppliers, Manufacturers and Contractors… who provide products (SSC…),works or services to ITER projectPE GroupPage 5 of 26The PE Group is responsible for all matters related to the proper and efficient implementation of PressureEquipment and Nuclear Pressure Equipment regulations within the whole ITER Project – part of EPNSProduct NC: When the requirement related to the characteristic of an item, component or work is notfulfilled. As an example, failure in meeting a specified tolerance of a componentProcess NC: When the MQP procedural requirement are not fulfilled is relative to the specified way ofworking. As examples, failure in the propagation of requirements in the Supply Chain; failure in theexecution of Design process, failure in the notification of a contractual hold pointThe Process NC related to IO processes, will be treated by IO as internal NC in accordance with detailedIO internal working instructions. The Process NC related to performers processes, will be treated as Internal NC of performers inaccordance their internal procedures – see chapter 5.7 conditionsRemedial action Action to eliminate a detected Nonconformity Use as-is: the item deviates from requirements but is declared fit for the intended use Rework: compliance with the original requirements can be restored.  Repair: fitness for the intended use can be restored although the repaired item maynot conform to the original requirements Reject: the item is not fit for the intended use.  Scrap: the item is not fit for the intended use (cannot be restored) and it cannot beused for different other scope OtherFor process NC, the remedial actions will be specifically defined as per NC evaluation and RCARoot Cause Analysis (RCA)Set of problem solving techniques targeted at identifying the actual root cause or the reason that causedthe problem. The need for RCA stems from the fact that the elimination of the symptoms of the problemsis not alone sufficient to address the problem, it has to be addressed at the cause levelService - output of an organization (service provider) with at least one activity necessarily performedbetween the organization and the IO. The dominant elements of a service are generally intangibleService often involves activities at the interface between IO (responsible for establishing therequirements) and service provider, as well as upon delivery of the service and can involve a continuingrelationshipService provider – organization that provides a service. In a contractual situation, a service provider issometimes called contractor3.2 AcronymsComplementary or as quoted in [23] ITER abbreviations:ASN French Nuclear Safety Authority (from French: Autorité de Sûreté Nucléaire)(A)NB (Authorized) Notified BodyCAR Corrective Action RequestCAT Causal Analysis Tree – see annex 3CCB Configuration Control BoardCFSI Counterfeit, Fraudulent, and Suspect ItemsCRO Contract Responsible OfficerPage 6 of 26DA Domestic AgencyDH Division HeadDR Deviation RequestEPNS Environmental Protection & Nuclear Safety DivisionFR Functional ReferenceI-NC Inter-Organization Non-ConformityIO ITER Organization (sometimes referred to as ITER)IO-RO IO Responsible Officer of the work package affected by the NCIO-DIRO IO Design Integration Responsible OfficerIO-QARO IO Quality Assurance ROIO-SRO IO Safety Responsible officerIO-CT ITER Organization Central TeamIO-PT Project Team established in accordance with 4.ii of [QYTZEP]IDM ITER Document Management(System)ISMS Integrated Safety Management System ManualKPI Key Performance IndicatorMQP Management Quality ProgramMIP/ITP Manufacturing Inspection Plan / Inspection and Testing PlanNC NonconformityNCR Nonconformity ReportNSI Nuclear Safety InspectionPA Procurement ArrangementPBS Plant Breakdown StructurePCR Project Change RequestPIC Protection Important Component, as defined in [24] 0PIA Protection Important Activities, as defined in [24]PIM Project Issue ManagementPE/NPE Pressure Equipment (PE) in the scope of [2] Nuclear Pressure Equipment (NPE) in the scope of[4]PE Group Pressurized Equipments Group – part of EPNSPNI Part Number of ITERPROR Project Risk and Opportunity RegisterQAP Quality Assurance ProgramQMD Quality Management DivisionQMS Quality Management SystemRCA Root Cause AnalysisRRF Review of Regulatory FilesRO Responsible OfficerSSC System, Structure and ComponentSCG Safety Control GroupSOA Sign-Off AuthoritySR Safety RelatedSQD Safety and Quality DepartmentTRO Technical Responsible OfficerPage 7 of 264 Applicable and Reference Documents4.1 Applicable documents[1] Order dated 7 February 2012 relating to the generaltechnical regulations applicable to INB - EN7M2YKF[2] Pressure Equipment directive 2014/68/UE[French version]RZ6PAK[RZ5PGG][3] Environmental code mainly art L557 and art R557 –Décret n° 2015-799 du 1er juillet 2015 relatif aux produitset équipements à risques - ENU5TKD4Regulations[4] ESPN Order dated 30 December 2015 modified –Arrêté du 30 décembre 2015 relatif aux équipements souspression nucléaires - [EN]SMP384[5] Level 1 MQP – ITER Quality Assurance Program (QAP) 22K4QX[6] Level 1 MQP - ITER Integrated Safety, Environment andSecurity Management System Manual (ISMS)4HCWJUMQPLevel 1[7] ITER Policy on Safety, Security and EnvironmentProtectionManagement43UJN7[8] Level 2 MQP - Document & Records process - Sign-OffAuthority for Project Documents2EXFXU[9] Level 2 MQP – Nuclear Safety process - Procedure for theSafety Review of Regulatory Files48VD6T[10] Level 2 MQP – Nuclear Safety process - Organization ofnuclear safety inspections in ITER Organization and itssupplier chainCW8EL3[11] ITER Baseline diagram 2XWZEK[12] Nonconformity and corrective actions Survey Process forPIC and PIA in Application of Articles 2.6.3, 2.7.1 and 2.7.3of the INB OrderHDAWCU[13] Level 3 MQP – Configuration Management process –Project Issue ManagementSSU96T[14] Level 2 MQP – Inspection and Testing process –Requirements for Producing an Inspection Plan22MDZD[15] ITER Procurement Quality Requirements 22MFG4[16] Requirements for Producing a Contractors Release Note[17] Release Note Template22F52FQVEKNQInteractingprocesses –MQP[18] Working Instruction for Mechanical Completion DossierPreparationUYUSEEGIN [19] GIN 007 - Closure of Non-Conformance Reports UKG3W8Note: The procedures are applicable to the DAs, only if they are listed in the Multi Party Amendment (MPA)4.2 Reference documents[20] Quality Management System Audits 2DQTA8[21] ITER Corrective Action Procedure (CAR) 9QELY2[22] DA / Supplier / Sub-contractor QA Non-conformance Report Template A6HRLB[23] ITER abbreviations 2MU6W5[24] Nuclear safety common definitions RLZXMV[25] IO QA Non-conformance Report Template 2MVY2Z[26] Project Change Procedure 22F4E5[27] Guideline for identification (Symptoms) of Counterfeit,Page 8 of 26Fraudulent and Suspect Items (CFSI)XKUKAX[28] Procedure for Implementation of the Inter-Organizational Non-ConformityResolution Process YVPWYR[29] ITER Project Management Plan (PMP) 2NCR3F[30] Procedure for management of Deviation Request 2LZJHB[31] How to – Long Aging NCRs management 3CZWDX[32] Risk and Opportunity Management Procedure 22F4LE[33] Management review procedure 3L7SWX[34] Lessons Learned meeting Procedure DV4UUH5 Basic principles5.1 General principles for NC management The main steps for the methodology for NC management, are as follows:o The organisation, where the NC is detected, shall immediately stop works related to thenonconforming product /service and to inform IO. o Immediate actions to segregate (labelling and/or physical separation of NC shall be applied)the nonconforming item / work and to ensure safetyo Description of the nonconformity - NC report shall be immediately registered in NC systemo Agreement and implementation of remedial actions to eliminate the Nonconformity. The remedial action can be implemented only after IO formal agreemento Root cause determination through RCA (Root Cause Analysis) using Causal Analysis Treeand decision on corrective & preventive/risk-based actionso Follow-up of actions from their initiation until their implementationo Verification of the effectiveness of actionso NCR closure - NCR shall be handled and closed with the priority5.2 NCR initiation – 1aDuring NC initiation stage – 1a, the following points need to be addressed (but not limited):- Recording the NCR (Description of the problem)- NCR categorization (major / minor)- Preliminary proposal of remedial actions need to be established (if the initiator can providethis information at this stage). Recording of NCROnce NCR is detected, the initiator is recording the NC in the IO NCR database (status “Submit”) orequivalent electronic system (e.g. IDM for internal IO NCRs (status “Sign”) recognised by IO. NC report shall be submitted within maxim 5 working days in the NC system to initiate the NC process(trigger the NCR review / approval cycle). In case of dispute between stakeholders, maximum two weeksfrom the NC detection time may be allowed with IO agreement only. For management / use of IO NCR database, stakeholders shall apply detailed instructions:- ITER_D_SM2JWP - NCR Database - Introduction & How to for IO-DA personnel- ITER_D_SY6RQ5 - NCR Database - Introduction & How to for Suppliers and ContractorsImmediate actions shall be taken to segregate (labelling and/ or physical separation of NC shall beapplied) the nonconforming item / work and to ensure safety. Page 9 of 26After the NCR is submitted in the NC system, the review and approval cycle will be launched and willallow to the performer and all effected stakeholders to provide their feedback. In case during the review / approval the NCR is rejected, then the NC owner (approver) is immediatelyinformed and will have the responsibility to restart / re-submit the NCR only after all the conditions areagreed and applied. In case of disputes, the NC owner shall ensure further escalation as per - section 10of present procedure. NCR categorizationThe preliminary categorisation of NCR shall be done at the initiation stage with the involvement IO RO(confirm) and IO QARO in accordance with the following criteria: In ITER project, the way to implement this graded approach for NC management is to categorize NCseither as ‘Major’ NC or as ‘Minor’ NC depending on the impact of the NC to the safety, quality orperformance.  The following table provides guidelines to establish the category of the NCR. The final categorizationshall be agreed between:- NC initiator (propose the NC categorization),- Performer (propose the NC categorization if initiator),- DAs TRO (provide support and agreement for NC categorization) in case of PAsimplementation and- IO-RO with support of IO QARO (final confirmation of NC categorization)Safety /Regulation- Nonconformity with a IO specified requirement affecting RegulatoryRequirements, Safety, Environmental impactBaseline* - Nonconformity with an impact on a Baseline document Level 0 / 1 / 2Interactions - Nonconformity with interaction with other PBS, Construction and/orother ProcessImpact onPerformance- Implication on Functional performanceMajorNCRepetitive NC - More than 2 similar NCRs can trigger one major NC to investigate rootcause of recurrenceSafety /Regulation- Nonconformity with a specified IO requirement not affectingRegulatory Requirements, Safety, Environmental impactBaseline* - Nonconformity with an impact on a Baseline document Level 3Interaction - Nonconformity with no interaction with other PBS, Constructionand/or other ProcessImpact onPerformance- Implication on layout (within the same space reservation of concernedsystem/ PBS)MinorNCNonconformity not falling under definition of Major NC*Baseline document levels are defined as per IO procedures [11] and [29]The detailed requirements /clarifications regarding NCR categorization are described in theITER_D_4HCC3W - HOW TO - NCR CategorizationDuring the NC initiation stage, performer shall propose preliminary remedial actions (if the initiator canprovide this information at this stage) and need to be recorded in NC system for IO acceptance. 5.3 Assessment of Nonconformity – Stage 1bDuring NC evaluation stage – 1b, the following points need to be addressed (but not limited):Page 10 of 26- Final remedial actions need to be recorded in NC system and agreed with NC owner- Preliminary Root Cause Analysis (RCA) need to be applied and propose corrective actions /RCA category need to be established and recorded in NC System (when required)During the NCR assessment stage, the remedial actions shall be clearly defined and agree by IO-ROFor all the decided remedial actions the expected due dates and responsible for closure need to beestablished and recorded in NC system – Sage 1b. RCA categorization with Causal Analysis Tree (CAT) evaluation shall be applied for all NCRs. For Minor NCR, the application of RCA remains under performer internal responsibility and does notrequire IO acceptance. This approach regarding minor NCR evaluation does not release the performerfrom his responsibility to ensure correct evaluation of NCR, establishing the NCR Causes and correctiveactions application. The root-causes of nonconformities are categorized based on Causal Analysis Tree by the type of failure/problems as following:RCAcategory/ levelDescription of RCA category by type of failureA1 Design/ Engineering problemA2 Equipment/ Material problemA3 Human Performance problemA4 Management (procedure/ process/ method) problemA5 Communications problemA6 Training DeficiencyA7 Other ProblemEach RCA categories/ levels (A) are also divided in sub-categories/ levels (B) as described in Annex 3 ofpresent procedure. The sub-categories/ levels (B) – see annex 3, need to be recorded in the RCA reportonly. The RCA category – level A, shall be recorded by performer in the NC system in the “PreliminaryAnalysis of Causes” section and confirmed by IO-RO (NC owner)In IO and DA, the NC owner is primarily the RO of the item or work being affected by the NC. o In case of NC involving several Performers, an owner in IO (or DA – for the cases whenthe NC does not have impact on IO requirements) shall be established with theresponsibility to coordinate all actions between parties and supervise the overall actionplan. Two options are possible for NC treatment: A unique NC is opened covering all aspects and Performers; Several NCs are opened for each PerformerIf the NC owner face issues in finding agreement between parties, or if there is no agreement to find anNC owner, issue will be escalated according to section 10 of present procedureFor the cases when the DA is NC owner (NC with no impact on IO requirements), the DA shall applytheir own specific NCR procedure accepted by IO. Page 11 of 26For most of the cases the performer is also assigned for NCR closure. For specific cases when responsiblefor NC closure is other entity than performer, during the NC evaluation stage the NC owner (IO-RO /DA- RO), shall confirm (indicate) who is responsible entity for NCR closureAlso, during the NC evaluation stage, after identification of NCR impact analyse, the NCR has to belinked (IDM, PLM etc.) to the applicable document (drawings, specification, procedure, etc.) that areaffected by the NCR and requires future update. This task is under NC owner responsibility. For specific situations, stage 1a (NC initiation) and stage 1b (NC evaluation) can be merged into onestage (1b) - if the NC initiator have all the necessary information: description of NC, Categorization,establish remedial actions, NC evaluation, Preliminary RCA, Corrective actions and categories. Inter-Organizational Non-Conformity (I-NC)The I-NC is a non-conformity applied in situations when a quality issue is identified late in the itemsmanufacturing process when there is a time criticality associated with the onward availability of this item,causing consequential impacts on later workThe NC identification is the trigger event of the I-NC but the close out of each process does not dependon the same elements. The NCR should be kept open for technical corrective and remedial actions whereas the I-NC is keptopen for financial actions as per applicable procedure [28]. The NCR can be closed even if the I-NC isnot closed and vice versaWhen an I-NC is detected, the NCR title should indicate the mark “I-NC” to raise the attention ofstakeholders and initiate application of I-NC mechanism. The mechanism and details for treatment of I-NC is described in the [28]5.4 NCR closure – stage 2When required (see note 1), a detailed RCA shall be performed with conclusions whether or notlaunching corrective actions, and should consider as appropriate any preventive/risk-based actions. Note 1: The RCA is required to be applied for all NCs in accordance with the following criteria:- For major NCR’s, the RCA need to be accepted by IO and shall be mandatory recorded inNC system- For minor NCR’s, the RCA does not require IO acceptance and shall be under performerresponsibility only. For specific cases decided between performer and NC owner (IO-RO),the RCA may be submitted to IO for acceptance and recorded in NC system. For all the corrective actions indicated in the RCA, the expected due dates and responsible for closureneed to be established and recorded in the NC system (when Preliminary RCA is finalized -1b stage). For complex RCA, the performer (responsible for NC closure) shall arrange specific RCA meetings andperform a detailed RCA. The RCA results and conclusions, together with the decided corrective actionsshall be recorded in RCA report with the following information: RCA team members, RCA method,chronology of the events, causes of NC, corrective actions and risks required to eliminate and prevent theNC, etcPage 12 of 26For Root Cause Analysis (RCA) application the following guidance may be used ITER_D_2X4E9A -Root Cause Analysis Leaflet by the stakeholders. The NCRs can be closed only after the following conditions are meet:- For minor NCRs:o all remedial actions are closed (respecting the expected due dates – as recorded in the NCRstage 1) and evidences for remedial actions closure are recorded (attached to NCR forclosure stage) in IO NC system. o For minor NCRs, the RCA application together with corrective actions implementation areunder performer responsibility only and does not required IO acceptance. o in case the decided remedial actions (ex: “reject”, “scrap”) will not remain part of (will notaffect) the final product or activity that will be delivered to IO and the related correctiveactions (if necessary) will be implemented internally by performers without affecting IOproducts and activities, the NC can be closed immediately – fast NCR closure**. For suchcases, the NC owner shall agree on fast NCR closure mode**note: Fast NCR closure is applicable for minor NCRs where the remedial actions (“reject” or “scrap”)will not affect the final products / activities that will be delivered to IO. Fast NCR closure means,immediate NCR closure after initial stage of NCR is reviewed and approved – does not require a newreview / approval cycle for NCR closure by all stakeholders. - For Major NCRs:o all remedial actions are closed (respecting the expected due dates – as recorded in the NCRstage 1) and the evidences for remedial actions closure are recorded (attached to NCR forclosure stage) in IO NCR database (or IDM). o all corrective actions (CA) decided as per RCA are closed (respecting the expected duedates – as recorded in RCA) and the evidences for CA closure are recorded in IO NCSystem (attached to NCR for closure stage). The final closure of NC is confirmed if all related actions are implemented to guarantee the IOrequirements of the item or work at the handover to IO. For NCR closure, the performer (responsible for NCR closure) issues the update of NCR (NC report) inthe IO NC system, to ensure NCR is reviewed & accepted /approved by all relevant stakeholdersAs a basic principle, the delivery of the items shall be released only if all the related NCR’s are closed. The IO NC system record the actions (remedial/corrective actions) agreed with Performers and also theinternal actions in IO. If it is decided to follow some long-term actions (remedial/ corrective actions) in aseparate system (JIRA CAT system or equivalent electronic system), traceability of the actions andtracking system shall be demonstrated to monitor the progress. The NCR shall not be closed if the relatedremedial actions / corrective actions are still open (see previous paragraphs for NC closure conditions.)If during the NCR treatment, the risk and opportunities are identified then the IO-RO shall record the riskand opportunity in IO register (PROR) as per procedure [32]. Conditional Release of NCFor exceptional cases, intermediate/ conditional release of the NCRs can be accepted only after agreementbetween IO (NC owner) and DA’s / performersPage 13 of 26For such cases when conditional release of the NC is agreed to allow the shipment of components,tracking and checking of remaining points/ actions is required, until the final closure of the NC andhandoverTo ensure proper follow-up of conditional release of NCRs, the performer shall maintain the NCR openuntil all the decided remaining conditions / actions are closed. The continuous follow-up of NCRs statuswill ensure on the same time the follow-up of such conditionally released NCRsFor such cases when conditional release of NC is applied, clear further instructions/ actions shall be alsoindicated in the NCR and in the final delivery documentation (section 6 of [17] - Release Note template –QVEKNQ or section 12 – Punch list of Mechanical Completion Dossier prepared as per [18] - UYUSEE)to be taken into account on the next phases of the projectThe performer shall record the NC conditional release in NC system and NC owner will communicatethis information to the corresponding IO team (IO construction team, PT, PBS team etc.) if any impact onthe next phases of the project. 5.5 PE/NPE AssessmentThis section is useable only when IO is acting as PE/NPE manufacturer. This section explains the processto sort out the nonconformity detected during design and manufacture of pressure equipment or nuclearpressure equipment. Nonconformity shall be close out following relevant paragraph 5.3. A nonconformity concerning a PE/NPE or Implementation plan for design & manufacture of PE/NPE(VE2DSP) is considered as properly closed by IO if the impact on the other past, current and futureproductions is performed5.5.1 Nonconformity related to Equipment manufactured by IO in the scope of Module H/H15.5.1.1 Process NonconformityIO describes and presents to ANB3 the solutions it intends to adopt to remedy the process nonconformityrelated to the application of Implementation plan for design & manufacture of PE/NPE – VE2DSP andshall obtain ANB validation4 before they are implemented5.5.1.2 Product NCRProduct Non-Conformances are classified as Major or Minor according to the criteria defined in chapter5.2 aboveIO will describe the solutions it intends to adopt to remedy the non-conformances and will keep therelated records available for ANB consultation5.5.2 Nonconformity related to Equipment manufactured by IO out of the scope of Module H/H15.5.2.1 Major Product NonconformityOnly major product NCR affecting regulations [1], [2], [3] & [4] shall be sent to ANB. IO describes and presents to ANB3 the solutions it intends to adopt to remedy the major product NCR andshall obtain ANB validation4 before they are implemented. Page 14 of 26As soon as the NCR is uploaded in NCR database, PE/NPE expert shall send to ANB: the NC and all necessary information (report, drawing, picture…), remedial actions proposal : Whenever the supplier or subcontractor is able to repair in accordancewith the PA documentation and/or selected code, this will be the preferred remedial action, Root-cause-Analysis. If the repair is not following the PA/ contract documentation, contract and/or selected code, IO needs toevaluate if this repair has an impact on an essential safety requirement of [1], [2], [3] or [4] and if thehazards and risks analysis should be updated and submitted to ANB for approval. To implement the remedial action(s), a revision of original MIP /ITP or new MIP/ITP will be prepared toinclude the new operations and the needed intervention points from all the parties. IO/ANB could addnew control points (Hold points, witness points, reports and notification points). 5.5.2.2 Minor Product NonconformityThe supplier or subcontractor is able to repair in accordance with the PA/ Contract documentation orexisting repair procedure(s) approved by IO and accepted by ANB. Minor NC and all evidences or reports are kept by IO in NCR database and are available to ANB on theirdemand (periodic meeting, ANB visit or audit). When possible, IO shall accept the action plan without impact on the workshop scheduleAfter implementation of the action plan, remedial action(s), corrective action(s) and evidence(s) areapproved by IO (if required). 5.6 Case of NC related to CFSIIn case the Non-Conformity deals with a Counterfeit, Fraudulent and Suspect Item (CFSI), the Head ofthe EPNS Division informs the ASN using the template Déclaration d'évènement significatif à l'ASN(SKKSP3), after validation by the Director General. Such cases will be treated and reported as significantevent following the regulatory requirementsThe template ITER_D_SRVZKZ - Compte-rendu d'évènement significatif is used for this analysis. Aftervalidation by the Director General, the analysis report is sent by the Head of the EPNS Division to theASN within 2 months after the detection of the CFSIFor identification (symptoms) of CFSI items the following guideline need to be followed and consultedby the stakeholders: [27] - XKUKAX - Guideline for identification (Symptoms) of Counterfeit,Fraudulent and Suspect Items (CFSI). All the non-conformities dealing with a CFSI shall be evaluated by IO QARO and IO SRO to:- ensure confirmation of CFSI case,- initiate and perform RCA and- ensure further escalation to EPNS Head5.7 Internal NC of performersDuring contracts / PAs implementation, the performers (DAs, Suppliers, contractors, sub-contractors)may identify internal NC that need to be managed internally within the performers organization withoutinvolving IO and other external entities. Such internal nonconformities (NC) has the following characteristics:- NC will not affect the final products and activities delivered to IO or different other entities (otherDAs, supplier, contractor) in the scope of ITER project,Page 15 of 26- NC will not have impact on contractual/ PAs requirements- NC will not have impact on cost and schedule related to ITER project and- NC will not have impact on regulatory requirements applicable for ITER project. The performer internal NCRs, shall be managed by external performers in accordance with their internalNCR procedures. The performers shall maintain fully traceability and evidences for internal NCR closure, to be availableduring the IO/ DAs audits and inspections. Internal NC of performers shall be recorded using performer’s NCR templates and internal database (ifapplicable). A list (log/ register) of internal NCRs need to be maintained by the performer to allow strictcontrol of NCR stages, trend reports and analyses. This internal NCR log shall be available at IO/ DAsrequest during the audits and inspectionsIO internal NCRs: For such NC (with no impact on other organizations), the involved stakeholders will beIO staff only and review / approval cycle will respect present procedure requirements. A dedicatedworking instruction – MQP level 3 (with no impact on DAs) will be prepared for detailing the instructionsfor treatment of IO internal NCRs. Page 16 of 266. WorkflowThe work flow focuses on Roles and Responsibilities in a generic way. Two main stages of the process are defined, for both Product NC and Process NC:I. Initiation / evaluation: This stage consists in taking immediate actions, describing the NC, evaluating the impact and agreeing on categorization and remedial actions. II. Closure: This stage consists in implementing the actions agreed and in closing the NC with the required evidencesRA=Remedial Action; RCA = Root Cause Analysis; Action Assignee = all-inclusive term to designate any person assigned to perform an action; Interaction RO = all-inclusive term to designate a RO who is impacted by the NC; NSI = Nuclear Safety Inspection; RRF = Review of Regulatory FilesIO-SRO(if PIC/PIA/SR)IO-RO(NC owner)| |ActionAssignee(s)Initiator => Performer| |ActionAssignee(s)IO-QAROReview,acceptance/approval processin IO NC systemIO-Interactions RO| | |DIRO, process owner, constructionRO…. I – INITIATION/ EVALUATION1) Identify and describe NC2) Evaluate consequence; decide Categorization & RAII – CLOSURE3) Implement agreed actions4) Final closure2b-Upload NCR;review &acceptance /approval2a-confirminteractions + RAand relatedactions2a-Confirmcategory + RA +RRF/NSI ifapplicable4a-Update NCR;review &acceptance /approval2a-Segregate NC / immediate actions /agree Categorization & RemedialactionsCompile NC filesINITIATION / EVALUATION1) When a NC is identified, IO-RO shall be informed immediately or as soon as practically possible. If theInitiator is not the Performer, Initiator informs the Performer and the IO-RO2) 2a) The performer, thru the authorized communication channel with IO, works in collaboration with IO-RO to:- take immediate actions to ensure safety, stop any further work at risk, identify and segregate the NC- evaluate the consequence and agree on the Categorization and the Remedial actions (expected due datesto be defined), with justificationsInternally in IO, IO-RO consults IO-related parties in timely manner (IO-QARO, IO-SRO, IO-Interactions ROslike DIRO, Process Owners, Construction Team…) for confirmation of categorization and actions. Collaborative work is favored thru adapted working level methods (meetings, working groups…)IO-RO ensures registration of all the actions with identification of the Action Assignee(s)- Define RCA category (CAT – see annex 3) – recorded as Preliminary RCA2b) The NCR (NC report) is issued in the IO NC system, reviewed & accepted/approved. This step formalizesthe Records of decisions of the step 2a above . It can be started at any time. CLOSURE3) Actions are performed by Action Assignee(s), who can be from any organizations, external and internalto IO4) When actions are implemented, it can trigger the final closure of the NC. 4a) For exceptional cases, an intermediate / conditional release of the NC may be accepted, if someminimum actions are evidenced (see section 5.4). The update of NCR (NC report) is issued in the IO NC system, reviewed & accepted/approved. 4b) The final closure of NC is confirmed if actions are implemented to guarantee the IO requirements ofthe item or work at the handover to IO . (see section 5.4)The update of NCR (NC report) is issued in the IO NC system, reviewed & accepted/approvedIf the NC concerns a PIC or a PIA, the files related to the NC are compiled by the EPNS Division includingthe follow-up of the corrective actions until their implementation2a-Confirmcategory + RA +RCA approach2a-IO-RO consult all IO parties to confirm Categorization & Actions3-IO-RO supervisesaction progress3-ActionAssigneesperform actions1-Identify,describe NCNCRclosedIntermediate/ conditionalreleaseneeded &acceptable?4a-ConfirmevidencesYIntermediate/conditionalreleaseAll necessaryactions forfinal closureimplemented?4b-Confirmevidences;verify traceabilityof any further longterm actions4b-Update NCR;review &acceptance /approvalYHandover to IO(see section 9.2)Page 17 of 267. Responsibilities The Performers shall ensure the implementation of the requirements of this document to controlnonconformities For NC under performers responsibility, the final acceptance by IO of Nonconformity Reports:a) Is limited to the particular contract and item referred in the report;b) Does not relieve the performer of any contractual obligations and responsibilities Detailed stakeholders and their roles and responsibilities are listed in the following table# Stakeholder Responsibilities1 Initiator  Detect and identifies NC and notifies IO; Alerts the involved parties, primarily the affected IO-RO as soon as practically possible(within one week) and with necessary details; The IO-RO may decide that the NC isactually an “Internal Non-conformity” and stop the initiation of the NC in IO NCsystem Notify the Performer, if different from the Initiator; Responsible for registering or triggering the registration of the NC into the IO NCsystem; Sometimes, it can be directly the IO-RO who detects and identifies NC2 Performer When Performer is the person detecting the NC, executes actions of Initiator as above; Segregates NC, take immediate remedial actions. Stop (as per IO agreement) anyfurther related work on the item until a decision on the NC is taken; Make initial written proposal of the RCA categorization, using CAT and remedialactionsInitiates problem-solving technique to treat the NC, including as appropriate RCA andpreliminary analysis of causes as soon as practically possible (typically within a coupleof weeks). Performer can seek assistance from IO-QARO in the methodology of NCproblem solving techniques.  Through the authorized communication channel with IO and DA’ (in case of PAimplementation), collaborates with IO-RO/ DA-RO to achieve the appropriateconclusion on NC categorization and actions (remedial actions and corrective actions) Provides evidence of progress of the NC treatment to the IO-RO in a pro-active andtimely manner Complementary to the required information by IO, manage comprehensively the NC inNC system The performer is the designated entity for NCR closure, responsible for implementationof remedial/corrective actions and trigger the NCR closure stage in NC System3IO-RONC-Owner IO Person assigned responsible :o For the coordination and control of the activities in the NC treatment;o Ensuring that the NC is documented and recorded in the IO NC system correctlyo Triggering and guarantying the closure of the NC. For that , the IO-RO shall: Consult all related-parties, including IO-Interactions RO, IO-SRO (for NC concerningPIC and/or PIA), PE/NPE expert (as required) and IO-QARO to confirm categorizationand actions decided Agree with the Performer and DA-RO (in case of PA implementation) on the apparentcause analysis tree and remedial actions; Participate and conclude on the impactassessment, including impact on IO Baseline documentation In case there is any change action(s) on IO Baseline documentation, manage theimplementation according to [11], manage the initiation of a Project Change Request(PCR), if so requested by the DIRO.  Shall ensure that the NC is issued and registered in the IO NC system correctly Track the NC and related actions until the final closure of the NC in IO NC system. Page 18 of 26# Stakeholder Responsibilities In the review and approval cycle of the NC reports, is either the person Approving3 oris Reviewer (if acceptance/approval is done by higher level of organisation).  IO-RO can seek assistance from IO-QARO in the methodology of NC problem solvingand RCA techniques. In case of dispute to find and designate an IO-RO, see section 104 IO-SRO  Checks if PIC, PIA, Safety Related (SR), are properly designated.  Agrees on the NC categorization (for NC concerning PIC and/or PIA) Assess Safety impact and validates action proposal Reviews with respect to Regulations [1], [2], [3] & [4] Is part of the review process of the NC reports, as appropriate for NC concerning PICand/or PIA Confirms if there is a need for Safety Review of Regulatory Files [9]0 and / or NuclearSafety Inspection [10]0 , and call for those processes as necessary. 5 PE Group  Checks if PE/ NPE are properly designated Agrees on the NC categorization (if the NC is PE/NPE relevant) Consult (A)NB for major product NCR and process NCR Assess statutory & regulatory impact and validates action proposal Review with respect to Regulations [1], [2], [3] & [4] Is part of the review process of the NC reports, as appropriate6 IO-InteractionsRO (DIRO)For MajorNC only Checks the NC potential impact on other areas than the original scope of the NC, reviewand confirm apparent cause analysis using CAT and remedial action proposal For NC at manufacturing stage, it includes the assessment of impact on Assembly,Installation and Operations Is part of the review process of the NC reports, as appropriate In case there is any change action(s) on IO Baseline documentation, ensure it isimplemented according to [11] Analyse the NCR considering the design impact and if PCR is required to trigger furtherupper level project changes as per [26]. 7 IO-QARO  Checks the compliance of the NC process Checks if proper RCA is undertaken, commensurate to the impact and risk of the NC,along with the necessary action(s) Can provide a support to the stakeholders, as necessary, in the methodology of NCproblem solving techniques Is part of the review process of the NC reports, as appropriate Checks the evidences required to grant the closure of NC. It involves traceability of theactions until implementation.  Confirms if any long-term corrective actions can be tracked in a separate system, toallow final closure of the NC on the individual item or work, and verifies thetraceability of those actions In IO, provide assistance to sort what are internal IO actions and what are external IOactions. Indeed, an NC by an external performer may reveal the need for actions withinIO. In that case IO-QARO ensures opening of the relevant NC/CAR in the appropriateIO system.  Facilitate the coordination between the stakeholders, and may become the IO NC3 The approval level of NC can be delegated to a different IO stakeholder (upper level or similar level) if agreed withDepartment Head of requester and approved by process owner. Such delegation regarding approval level of NC shall bedocumented with clear justifications using deviation request applied as per [30]Page 19 of 26# Stakeholder Responsibilitiesowner, in case of complex NC, involving different processes8 QMD  In application of GIN007 [19], QMD ensures that NCs are closed in due time Provide NC statistics and KPIs to monitor the effectiveness of the NC process9 IO-TechStaff Person is designated by IO-RO as appropriate.  Review the NC regarding the technical aspects - added as additional reviewers of NC. 10 IO Processowner For IO internal NC, related IO processes and procedures deficiencies (need forimprovements), the process owner is responsible for NCR review for confirmation ofRCA and remedial and corrective actions implementation.  Ensure the process improvement (if needed) revising the affected procedures andworking instruction as per decided actions triggered by NC evaluation. 11 IO DH orupper level For IO internal NCs, the approval shall be under DH of affected entity (or appointedrepresentative) responsibility. 12 DA-RO  DA Person assigned responsible :o For the coordination and control of the activities in the NC treatment within DA;o Ensuring that the NC is documented and recorded in the IO NC system correctlyo Triggering and guarantying the closure of the NC ensuring continuously interface/communication with performerEnsure continuous communication / interface with IO-RO to achieve the appropriateconclusion on NCR categorization, agree on related actions, remedial, and correctiveactions (as required) and NCR closure. 8. Records/Outputs The form in Appendix 1 lists the minimum information required for managing a NC reporto The template [22] or template [25] is proposed to address this minimum information. Alternative formats (including in electronic form – NCR database) which include the essentialmetadata may be acceptable. They shall be subject to IO Quality Management Divisionacceptance in advance of their intended use NCs are an integral part of a contract and PAs. Upon completion of the work, NC reports shall beincluded in the data package handed over to IO (see chapter 9.2).  In IO, a NC register shall be maintained including all relevant metadata. The IO-RO is theResponsible person to ensure record of NC reports in the IO NC system, for the whole lifetime of theITER project9. Link with other processes9.1. Link with other ‘Quality Assurance’ processes (QA audit, CAR) The 3 following procedures have the same goal of addressing nonconformities and having propercorrective actions implemented. These procedures are governed by the same principles based onstandard quality practices: problem description, Root Cause Analysis (RCA), corrective actionsimplementation and verification of effectiveness. They are complementary to address all types ofinputso Nonconformities resulting from QA audits are managed through detailed steps described in[20]0o The CAR procedure [21]0 describes the process to manage Corrective Actions Requests as aresult of other sources (for example DG decision, ASN request, a management review…). What is important is that actions are implemented by one of the above process, and that thereis no duplication. This verification is done by Quality Management Division QMDPage 20 of 269.2. Link with ‘Procurement’As elements governing ITER Procurement Quality Requirements0: NCs are an integral part of a contract. Upon completion of the work, NC reports together withrelevant documentary evidence shall be included in the data package handed over to IO. o For Manufacturing, it is governed by the process for Producing a Contractors Release Note 0and Manufacturing Dossier. o For Assembly&Installation, it is is governed by the process for Mechanical CompletionDossier 0 During execution of Inspection Plans governed by [14], if modifications appears to be necessary dueto Nonconformity (such as repair…), the NC report should be referred in the Inspection Plan The products / activities shall be released for delivery only if all the related NCR’s are closed. The release of the PAs credits / contracts termination shall be applied if all the related NCRs areclosed. For exceptional cases, please see conditional release - chapter 5.4. 9.3. Link with ‘Nuclear safety’ In the treatment of NC, SRO may trigger the need for the Review of Regulatory File (RRF) [9]0 or /and for a Nuclear Safety Inspection (NSI) [10]0. See chapter 7 (role of IO-SRO) Nonconformities survey process for PIC and PIA shall be performed by SCG in accordance withArticles 2.6.3, 2.7.1 and 2.7.3 of the INB Order.  An biannual assessment report shall be prepared by SCG and approved by SQD Head, for globalreview of non-conformities on the cumulated effect of uncorrected discrepancies on the installation,and identify and analyse the recurrence propensity for similar types of NC as requested by the article2.7.1 of the INB Order [1]. The SCG is responsible for the annual assessment of trends and thecumulated effect of NCRs and analyse the recurrence propensity for similar types of nonconformities.  Input data for such report could also come from the lessons-learned feedback as per [34]. 9.4. Link with ‘Configuration Management’ process In the NC categorization, one of the criteria is the level of control (level 1/2/3/4/5) of the IO BaselineDocumentation impacted. Those levels are governed by IO procedure [11] If the treatment of NC implies the modification of IO Baseline Documentation, the proper ChangeAction(s), under the relevant Level of CCB shall be managed according to [11] (chapter 7) and PCR[26].  In chapter 10 (Dispute and Resolution), the PIM process [13] can be called (Project IssueManagement)9.5. Link with ‘Documents and Records’ In section 0, the present procedure 22F53X describes the roles of IO Stakeholders as reviewers of theNC reports, as an input to SOA (Sign-Off Authority) [8]0. It can be summarized in following table:IO-ROIO-InteractionsROIO-QARO IO-SRO PE Group-MinorNCMajorApprove4or ReviewAt minimum IO-DIRO ReviewStage I 5ReviewReview(if PIC/PIA/SR)Review(if PE/NPE)Page 21 of 26NCSOA 0 being document-based does not give indication of the status of a document within a workflow. The present procedure 22F53X develops the stages of NC treatment, each of them grading the requiredminimum list of reviewers. Therefore, in case of contradiction, this MQP procedure 22F53X, and itsderived MQP Level 3 documents, take(s) precedence. 9.6. Link with “PE/NPE conformity assessment”In the treatment of NC, PE Group may trigger the need to update a procedure or any document used assupport of the Quality System accepted by ANBIf during the resolution of an existing nonconformity, a visual examination required for the finalassessment of the PE/NPE is impacted, IO will allow ANB to perform a new visual examinationThe pressure test could be performed even if all the nonconformities are not closed if IO providesevidences to ANB that these opened non-conformities will not have an impact on the pressure test9.7. Link with Finance & budget processManagement of I-NC is part of finance & budget process and shall be applied in accordance with [28]10. Dispute and resolutionCriteria for triggering escalation includes, but is not limited to:o dispute on the way to close a NC;o long aging NC - opened for a long time (typically more than 12 months) without anyjustification;o dispute on ownership of NC; as an example, when there is multiple interfaces involved (e.g. different systems, multiple Performers and organisations …)In IO, the mechanism how to escalate is as follows:o Submission first to Division Head (DH) level;o If resolution within IO is not gained at the Division Head (DH) level, it will be submitted tothe QMD Head and technical Department Head level;o If still no resolution is made, then the NC will be submitted to ‘’PIM” (project issuemanagement; issue at PIM [13])11. KPIIO has established 2 KPI indicators to assess the efficiency of the process:1. The time between the detection of the NC and submission of NC (5 working days)2. The time between the detection date of the NCR and the closure of NCR. – LL NCRThe internal specific KPIs for monitoring of NCR management performance may be established by IOprocess owner and shall be monitored/reported as per Management Review procedure [33]In application of QAP [5] section 2.9,‘’ The Non-conformities shall be resolved with high priority and this resolution shall not exceed 9months in average and 12 months individually, except initial agreement from the IO DG or the QMDHead.’’4 IO-RO is either the person Accepting/Approving (as per contract definition), or is Reviewer (if acceptance/approval by higher level of organisation). For IO NC the approval shall be obtained from process owner or DH (see chapter 7). The approval level on DAs site shall be applied as per DA NCRprocedures5 Stage I is the Initiation stage as per section 0, with one objective being agreement on remedial actionsPage 22 of 26If long time (Long Aging - LL) is necessary to close the NC, justification shall be provided by NCRowner (with performer support) and recorded. The detailed requirements regarding long aging NCRsmanagement are described in the [31]Page 23 of 26Appendix 1: List of related information / data to be provided in NCsystem templateField M = MandatoryO = OptionalTitle of Nonconformity MExternal Performer(s) NC Reference(s) M (if applicable)ITER Contract reference (PA/Task Agreement / Direct contract as applicable) M (if applicable)DA M (if applicable)Supplier / Contractor M (if applicable)Affected DA (other than related contact) MPlant Breakdown Structure (PBS) MItem / Work identification and localization (objective is to keep traceability) MFR / PNI/ SN (for product NC only) – see note ** MCWP ONC Category (Major or Minor) MQuality Class OIs PIC? PIA? SR? MDate of NC detection MRequirements MDescription of the Nonconformity vs. Requirement MProposed preliminary Remedial Action(s) and description MNC InitiationStage IInitiator and organization (with signature *) MConfirmation of final Remedial Action(s)(expected completion date for closure)MJustification of Remedial Action (s) MPreliminary Root Causes Analysis RCA (following CAT – annex 3) MImpacted Documents, including Baseline Documents MTarget date for NC closure MSupporting Documents OIs a PCR/CCB Required? (if Y, reference #) M (MAJOR)Is an RRF/NSI Required? (if Y, reference #) M (if PIC/PIA/SR)Performer(s) RO (with signature*) MIO ROs (with signature*) MIO Reviewers (with signature*) MNC evaluationStage IIO Acceptance/Approval (with signature *) MPage 24 of 26Follow-up on remedial action(s): when implemented + evidences MRoot Cause Analysis M (Major)Are Corrective (and Preventive/risk-based) Actions Required? Y/NIf Y, description of actions and due date. M (Major)Follow-up on Corrective actions required for final NC closure: whenimplemented + evidencesM (Major)Performer(s) RO (with signature *) MIO ROs (with signature *) MIO Reviewers (with signature *) MNC ClosureStage IIIO Acceptance/Approval (with signature *) M(*) ‘with signature’ means that there shall be a formal trace (electronic signature –NCR database) of the signature of the person(**) When the NC affect a single item, the item SN (serial Number), FR (functional reference) and PNI identifier shall be used. When the NC affect anentire batch, the PNI shall be used to identify all concerned itemsPage 25 of 26Appendix 2 – TECHNICAL BASELINES overview levels as per[11] – see ITER baseline diagramDetails of ITER baselines with Engineering dossiers type and baseline levels as per [11]MANAGEMENT BASELINES. The management baseline requirements are indicated in chapter 9.5 of ITER_D_2NCR3F - ITER ProjectManagement Plan (PMP). Page 26 of 26Appendix 3 – Causal Analysis Tree for Root Cause Analysis (RCA)JADA-55342TS0206ITER_D_9ECN971 / 24Technical Specification of PBS.55.C6FIR Laser SystemITER Project Japan Domestic AgencyName Affiliation Date SignatureAuthorIMAZAWA Ryota(TRO)PlasmaDiagnosticsGroup18-July-2023Co-author MUKAI TomoyaPlasmaDiagnosticsGroup18-July-2023ReviewersHASHIMOTOYasunoriPlasmaDiagnosticsGroup19-July-2023Reviewers HATAE TakakiDept. ofITER Project20-July-2023ApproverNUNOYA Yoshihiko(RPGL)PlasmaDiagnosticsGroup21-July-2023別添－12JADA-55342TS0206ITER_D_9ECN972 / 24Change logBrunch no. (date)(IDM number)Change description-(21-July-2023)(9ECN97_v1.0)First version—JADA-55342TS0206ITER_D_9ECN973 / 24Table of Contents1. INTRODUCTION.. 51.1. PURPOSE.. 51.2. SCOPE.. 51.3. DEFINITIONS.. 51.4. REFERENCES.. 62. OVERVIEW.. 72.1. HARDWARE.. 72.2. CONTROL.. 123. HARDWARE ARCHITECTURE OF FIR LASER SYSTEM.. 133.1. DIAGRAMS, COMPONENT LIST AND DRAWINGS.. 133.2. CONNECTION BETWEEN PLC FOR LASER CONTROL AND OTHER DEVICES.. 143.3. IP ADDRESS AND SERIAL COMMUNICATION PARAMETER.. 164. SOFTWARE ARCHITECTURE OF FIR LASER SYSTEM.. 174.1. PLC FOR LASER CONTROL.. 174.1.1. Internal Processing.. 174.1.2. Interlock.. 174.2. I/O SIGNAL LIST.. 174.3. DATA EXCHANGE BETWEEN LASE FC AND PLC FOR LASER CONTROL.. 184.4. BUILDING LASER SYSTEM I&C USING SDD EDITOR.. 184.4.1. Overall Development Workflow.. 184.4.2. Building EPICS IOCs.. 184.4.3. Functions and Variables.. 194.4.4. EPICS Modules.. 194.5. USER INTERFACE (HMI).. 204.5.1. Touch Panel for Local Control.. 204.5.2. GUI for Remote Control.. 23APPENDIX I: OPTICAL LAYOUT DIAGRAMAPPENDIX II: VACUUM SYSTEM DIAGRAMAPPENDIX III: COMPRESSED AIR SYSTEM DIAGRAMAPPENDIX IV: COOLING WATER SYSTEM DIAGRAMAPPENDIX V: CONTROL SYSTEM DIAGRAMAPPENDIX VI: ONE LINE DIAGRAMAPPENDIX VII: CIRCUIT DIAGRAMAPPENDIX IIX: CONTROL CABINET DIAGRAMAPPENDIX IX: TERMINAL BLOCK DIAGRAMAPPENDIX X: COMPONENT LISTAPPENDIX XI: MECHANICAL DRAWINGAPPENDIX XII: PLC INTERNAL PROCESSING FLOWCHARTJADA-55342TS0206ITER_D_9ECN974 / 24APPENDIX XIII: INTERLOCK CONDITION STATEMENTAPPENDIX XIV: I/O SIGNAL LISTJADA-55342TS0206ITER_D_9ECN975 / 241. Introduction1.1. PurposeITER Poloidal Polarimeter (PoPola, PBS.55.C6) injects a linearly polarized FIR (far-infrared)laser beam into a plasma and determines the current profile inside the plasma from themeasurement of polarization state change generated in the plasma. JADA has developed aprototype FIR laser together with TOYAMA Co., Ltd.1, and the prototype is sold as productmodel T-LASER-FIR-A by TOYAMA. The TOYAMA’s FIR laser will be customized and willbe delivered to ITER. This document provides the technical specifications of the FIR laser systemto be delivered to ITER. 1.2. ScopeThis document covers the following system and subsystems:- PoPola (PBS.55.C6)The scope of this document is only the technical specifications of the FIR laser system. 1.3. DefinitionsCA Channel AccessCCS CODAC Core SystemCIP Common Industrial ProtocolCoE CAN over EtherCATCSS Control System StudioEGU Engineering unitEPICS Experimental Physics & Industrial Control SystemFBD Function Block DiagramFC Fast ControllerFIR Far Infra-RedFSoE Fail Safety over EtherCATI&C Instrumentation and ControlI/O Input/OutputIOC Input / Output ControllerMCR Main Control RoomMFC Mass Flow ControllerOPC UA OPC Unified ArchitecturePLC Programmable Logic ControllerPoPola Poloidal PolarimeterPSH Plant System HostPV Process Variable or Process ValueSDD Self-Description Data1 http://www.toyama-en.com/JADA-55342TS0206ITER_D_9ECN976 / 24ST Structured TextSV Set ValueFor a complete list of ITER abbreviations see: ITER_D_2MU6W5 - ITER Abbreviations1.4. ReferencesTable 1 Reference documentsRef No. Reference Name IDM Reference Version No. [RD 1] OPC UA Integration User Manual 32N6MJ 1.3[RD 2] CODAC Core System Overview 34SDZ5 7.1[RD 3] CODAC Core System Application Development Manual 33T8LW 5.9[RD 4]Enterprise Architect Project Exchange with SDD or PSP –Work InstructionREFLY3 2.0[RD 5]CODAC Core System Self-Description Data Editor UserManual32Z4W2 10.3JADA-55342TS0206ITER_D_9ECN977 / 242. Overview2.1. HardwareFigure 1 shows the schematics of the FIR laser, and the FIR laser consists of carbon dioxidelaser (CO2 laser) and FIR cavity fulfilled with methanol gas. The CO2 laser emits laser beamwith wavelength of 9.6 μm, and the laser beam with the wavelength of 9.6 μm excites that withwavelength of 119μm in the FIR cavity. Finally, the FIR laser emits laser beam with wavelengthof 119 μm. Figure 1 Schematics of FIR laserThe CO2 laser is a discharge pumped laser and consists of the parts below. — Discharge tubes with an output mirror and a grating. — A high voltage power supply for making glow discharge inside the discharge tube. — Mass flow controllers and valves for supplying CO2, N2 and He gas to the dischargetube. — Vacuum pumps and valves for evacuating the gas from the discharge tube. — Power meters and detectors to monitor the laser quality. — Flow meters and valves for supplying cooling water to the discharge tube and mirrors. — A visible laser and mirrors for an initial alignment. The parts related to the FIR cavity are as follows. — A discharge tube with input mirror and output mirror. — Mass flow controllers and valves for supplying CH3OH (methanol) and He gas to thedischarge tube. — Vacuum pumps and valves for evacuating the gas from the discharge tube. — Power meters and detectors to monitor the laser quality. — Flow meters and valves for supplying cooling water to the discharge tube and mirrors. — A visible laser and mirrors for an initial alignment. In addition to the parts listed above, the FIR laser includes the parts below. — Programmable logic controllers (PLC) with a touch panel. — An optical table with a laser enclosure. — An emergency stop button. — An interface with door switches. — A laser shutter. — An electrical power supply. JADA-55342TS0206ITER_D_9ECN978 / 24High level configuration of these components is given by diagrams of Figure 2 – Figure 6. Figure 2 shows diagram of laser propagation, Figure 3 shows diagram of gas flow, Figure 4shows diagram of cooling water flow, Figure 5 shows diagram of analog signal, and Figure 6shows diagram of serial communication and fieldbus. The diagrams also provide identificationnumber (ID) of the parts. For instance, you can find CL-GT1, CL-GT2 and FL-GT in Figure 2. Abbreviations used in IDs such as GT, CL and FL indicate what the part is. So, these ID meansthat CL-GT1 is glass tube #1 of the CO2 laser, CL-GT2 is glass tube #2 of the CO2 laser, andFL-GT is a glass tube of the CO2 laser. Detailed diagrams are given by Appendix I – IX, and the full list of the components and IDsare given by Appendix X. Figure 2 Diagram showing components associated with laser propagationJADA-55342TS0206ITER_D_9ECN979 / 24Figure 3 Diagram showing components associated with gas flow. Grayed components are beyond the scope of the FIR laser. JADA-55342TS0206ITER_D_9ECN9710 / 24Figure 4 Diagram showing components associated with cooling water flow. Grayed component (chiller) is beyond the scope of the FIR laser. JADA-55342TS0206ITER_D_9ECN9711 / 24Figure 5 Diagram showing components associated with analog signalFigure 6 Diagram showing components associated with serial communication and fieldbusJADA-55342TS0206ITER_D_9ECN9712 / 242.2. ControlFigure 7 shows the schematic of control signals of the FIR laser system. One fast controllermanages three sets of the FIR laser system. Although the FIR laser system is a standalone systemand operational without the fast controller, the fast controller is used in ITER to get/set processvariables of the FIR laser via CA (Channel Access) of EPICS on PON and to start laser oscillationautomatically. Figure 7 Schematic of control signalsJADA-55342TS0206ITER_D_9ECN9713 / 243. Hardware Architecture of FIR Laser System3.1. Diagrams, Component List and DrawingsDiagrams, a component list and mechanical drawings are given by Appendixes. Table 2summarizes the information provided by each appendix. Table 2 Overall hardware architectureNo. Item Reference1 Optical layout diagram Appendix I. 2 Vacuum system diagram Appendix II. 3 Compressed air system diagram Appendix III. 4 Cooling water system diagram Appendix IV. 5 Control system diagram Appendix V. 6 One line diagram Appendix VI. 7 Circuit diagram Appendix VII. 8 Control cabinet diagram Appendix IIX. 9 Terminal block diagram Appendix IX. 10 Component list Appendix X. 11 Mechanical drawing Appendix XI. JADA-55342TS0206ITER_D_9ECN9714 / 243.2. Connection between PLC for laser control and other devicesThe FIR laser system uses the NX102-9000, an OMRON PLC, and an NX Series I/O unitconnected to the NX-ECC203 to perform signal I/O for operating and monitoring the lasercomponents. For safety I/O (requiring interlocking and reliability), the NX-SL3300 safety CPUunit and NX-series safety I/O units are used. Figure 8 shows the physical connection between components and Figure 9 shows the protocolused for data exchange. Analog and contact signals are omitted here, and only communicationconnection lines are shown. The connections for all signal lines are shown in the one linediagrams (Appendix VI) and the circuit diagrams (Appendix VII). Figure 8 Schematic of the physical connection between PLC and other componentsFigure 9 Communication protocol between PLC and other componentsJADA-55342TS0206ITER_D_9ECN9715 / 24Table 3 describes the typical components of the FIR laser system shown in Figure 8 and Figure9. Table 3 Typical components of the FIR laser system shown in Figure 8 and Figure 9Component ComponentNo. DescriptionPCU CPU unit NX102-9000(PLC (primary) for laser control)A part ofCM-PLC1The NX102-9000 CPU unit has three RJ45 ports, one of which isdedicated for EtherCAT connection. The other two ports are standardEthernet (and are compatible with the Ethernet I/P fieldbus), and it ispossible to assign different segment IP addresses to the two ports. Thus, EtherCAT slave devices linked and daisy-chained to the CPUitself and devices connected to the Ethernet Hub for internalconnection only (thermo-hygrometers and touch panels) are hiddenfrom the outside world and not directly accessible. External devicessuch as the LASER FC are indirectly monitored and operated via theNX102-9000 main unit (See Figure 7). Safety CPU unit NX-SL3300 andNX-series Safety I/O UnitA part ofCM-PLC1and CM-PLC2The NX-SL3300 safety CPU unit monitors and calculates safety I/Ovalues. Data exchange and synchronization between the units isperformed via Fail Safety over EtherCAT (FSoE). NX-series I/O UnitA part ofCM-PLC1and CM-PLC2I/O units are used for input/output of analog signals and normalcontact signals to/from laser control devices. The I/O unit is normallyvalue-synchronized via CAN over EtherCAT (CoE). EtherCAT Coupler NX-ECC203(PLC (secondary) for laser control)A part ofCM-PLC2Aggregates the values of I/O units connected as EtherCAT slavedevices and communicates cyclically with the EtherCAT master, theNX102-9000. Vacuum gauge(Gas piping inside laser system)CL-MG-PG1CL-MG-PG2C0-SC-PGFL-MG-PGThe vacuum gauges are INFICON capacitance and Pirani gauges. Thegauge body has a connector for EtherCAT, and the readout of thevacuum gauge values from the PLC is done by CoE. For start-up andadjustment of the laser, a display (and gauge power supply) will beprovided to monitor the measured values without CCS. Mass flow controller(Gas piping inside laser system)FL-HE-MFCCL-NC-MFCCL-HE-MFCThe mass flow controller is installed under the laser stand and usesan N series EtherCAT-compatible model manufactured by HORIBAESTECH. Touch panelCM-TP A touch panel is provided for local control and display of variousparameters. The touch panel is an OMRON NA5 series, and theNX102-9000 is connected to the touch panel via Ethernet, withEthernet I/P Common Industrial Protocol (CIP). No complexprocessing (e.g., automatic ramp-up function) will be performed. Temperature/Humidity sensor(Inside acrylic panel of laser system)CM-TH The temperature/humidity sensor acquires the temperature andrelative humidity inside the acrylic panel of the laser system, andperforms socket communication (ASCII command/response) with thePLC via a TCP/IP connection. FIR stage controllerFL-OM-CB The controller controls the stage of the moving mirror on the outputside of the FIR laser and adjusts the resonator length. Thecommunication protocol is ASCII. Serial communication parametersare described in Table 5. JADA-55342TS0206ITER_D_9ECN9716 / 243.3. IP address and Serial Communication ParameterThe IP addresses of the devices to be connected by Ethernet shall be as shown in Table 4. TheNX102-9000, which is the CM-PLC1 CPU unit, has two Ethernet ports, one for connection tothe LASER FC and the other for connection to the laser internal control system, and thecommunication is separated by separating the segments. The serial communication device settingis shown in Table 5. Table 4 IP address listComponent Component No. IP address NoteCPU unit(NX102-9000) Port#1A part of CM-PLC1To be given bya user. CPU unit(NX102-9000) Port#2A part of CM-PLC1192.168.250.1 Local address (Class C)Touch panel(NA5-15W101S-V1)CM-TP 192.168.250.2 Local address (Class C)Temperature/Humidity sensor(ZN-THX21-S)CM-TH 192.168.250.3 Local address (Class C)Table 5 Serial communication setting listComponent Component No. Type Baud rate Data length Parity Stop bitFIR stage controller FL-OM-CB RS232C 19200 bps 8 bit None 1 bitJADA-55342TS0206ITER_D_9ECN9717 / 244. Software Architecture of FIR Laser System4.1. PLC for Laser Control4.1.1. Internal ProcessingThe internal processing of the PLC is described in the “PLC Internal Processing Flowchart”(Appendix XII). The development environment is SYSMAC STUDIO for OMRON NJ/NXseries PLCs. The description language is ST (Structured Text), LD (Ladder) compliant with IEC61131-3. The parameters of the components controlled by the Laser PLC can be set remotely viaEPICS from the HMI of the MCR. 4.1.2. InterlockInterlock is described in the "Interlock Condition Statement" (Appendix XIII). Thedevelopment environment is SYSMAC STUDIO. Programs is coded by using FBD (FunctionBlock Diagram) and PLCOpen Safety Function Block2 in accordance with IEC 61131-3. 4.2. I/O Signal ListThe PLC unit configuration and the signal types, conversion factors, and engineering unitsconnected to each channel of the unit are described in the "I/O Signal List" (Appendix XIV). Thebit mapping of OPC Unified Architecture (OPC UA) public variable contents and status (contactsignals, PLC internal flags, etc.) packed in BYTE/WORD values are also described in this list. Conversion factors and units in the Signal column of the list are described in the following formatfor the minimum and maximum values of the measurement/operation range. [PLC Analog I/O Unit value]: [Actual value to be measured/operated] [Engineering unit]The coefficients listed in the Conversion Factor column are the coefficients for the conversionfrom values stored in PLC to the actual engineering units; the EGU column is the engineeringunits and is used for the EGU field in EPICS PV. The alarm signal registers the EPICS PV of the alarm signal in this list to CSS Alarm. Since allthe conditional judgments, etc., have already been calculated inside the PLC, no processing isrequired on the CSS Alarm side. 2 https://plcopen.org/technical-activities/safetyJADA-55342TS0206ITER_D_9ECN9718 / 244.3. Data exchange between Lase FC and PLC for laser controlThe measurement data of the laser system is sent from the PLC for laser control to the LASERFC. EPICS IOC is built on LASER FC. This IOC runs as an OPC UA Client and serves as abridge to EPICA CA, which is the communication protocol with the upper CODAC system. Therefore, it is necessary to map the OPC UA public variables published by NX102-9000 to theEPICS Database Record using the OPC UA module3. For example, implement the following:- Structure variables will be implemented as opcuaItem record. - If conversion of values, etc. is required, the conversion will be implement incalc/calcOut record. - Analog values will be implemented in ai/ao or longin/longout. - Decomposition into/from multiple bit values is implemented inmbbiDirect/mbboDirect records. The compatibility between OPC UA variables and EPICS Database Record variables isdescribed in Chapter 3 and in Table 3-1 in [RD 1]. 4.4. Building laser system I&C using SDD Editor4.4.1. Overall Development WorkflowManufacturer of the FIR laser shall develop LASER FC by using the SDD Editor according toSection 5.3-5.4 in [RD 2] and Chapter 4 in [RD 3]. Manufacturer of the FIR laser shall followthe development workflow described in Section 4.1 in [RD 3]. First, I&C project is created inthe SDD Editor, and IOCs are defined in the project. Next, SDD configuration files are stored inthe Central SDD DB via the Local SDD DB on the local mini-CODAC. Name of each item for the building of the I&C project shall follow Section 4.3 in [RD 3]. TheIOC Names used in the SDD Editor are in the following format. -For this laser system, Plant System I&C is "D1-J5", Control Unit is "PCF#" (#:1-3), and IOCType is "PLC1". 4.4.2. Building EPICS IOCsManufacturer of the FIR laser shall use Maven Tools, SDD Translator and SDD Parser togenerate IOC configuration files based on the EPICS IOC information defined by the SDD Editor. The EPICS Record definitions are defined either on the SDD Editor or by using the VisualDCT4tool. If VisualDCT is used, the EPICS Record definition should be imported into SDD Editorusing SDD Parser. In the record definition, manufacturer of the FIR laser may import a worksheetin the specified format described in Section 7.6 in [RD 5]. To implement what is created in thedevelopment environment into the execution environment, the IOC source code generated bySDD Translator is converted into an RPM package using Maven Tools. The IOC is implementedin LASER FC when the RPM package is installed in LASER FC, which is the executionenvironment. Manufacturer of the FIR laser shall follow Chapter 5 in [RD 3] for IOC generation,3 https://github.com/epics-modules/opcua4 VisualDCT is a tool for graphical visualization and editing of EPICS record definitions, andis commonly used by EPICS users and included in CODAC. JADA-55342TS0206ITER_D_9ECN9719 / 24packaging, installation, and execution, as well as an example of using the Maven Tools. TheMaven Tools is available from the SDD Editor GUI or console, and the IOC generation path isalso described in Chapter 5 in [RD 3]. 4.4.3. Functions and VariablesThe various functions and variables are defined in the Enterprise Architect5 tool and can beimported into the SDD Editor using the EA2SDD tool. Manufacturer of the FIR laser shallfollow the workflow described in chapter 5 in [RD 4]. 4.4.4. EPICS ModulesThe EPICS modules to be used are the EPICS Base, OPC UA modules and the modules thatthe OPC UA module depends on. These are included in the CCS, so there is no need to addspecific modules to the CCS. For the version of CCS, the release at the time of production of theactual laser system will be used. The setting items for the OPC UA module are listed in Table 6. By setting these connectioninformation on the SDD Editor, it is automatically deployed in the st.cmd file, which is thestartup script of the EPICS IOC. Table 6 Connection setting information for OPC UA moduleItem1 Item2 DescriptionSession Name PLC0Server URL *1 opc.tcp://xxx.xxx.xxx.xxx:4840/Debug OFFAuto-Connect YESSubscription (1) Name FASTInterval 100Priority -Debug OFFSubscription (1) Name SLOWInterval 500Priority -Debug OFF*1 The xxx.xxx.xxx.xxx.xxx part of the Server URL is the IP address of CM-PLC1 (NX102-9000) Port#1 (see Table 4). 5 https://sparxsystems.com/JADA-55342TS0206ITER_D_9ECN9720 / 244.5. User Interface (HMI)4.5.1. Touch Panel for Local ControlThe touch panel screen configuration consists of tabbed screens for each function. The screenis switched by tapping at the tabs. Monitor ScreenFigure 10 Monitor screenWater System ScreenThis screen displays the following information. - Flowmeter and resistance thermometer values under the jurisdiction of the NX102-9000- Temperature and relative humidity measured by the CM-TH installed inside the acrylicpanel of the laser's base- Dew point temperature obtained by calculation- Detection status of the water leak sensorFigure 11 Water system screenWater Mode Monitor Gas Optics InterlockYYYY-MM-DD hh:mm:ssL/min CM-CW-FM0 xxx.xx℃ CM-CW-TS0 xxx.xx℃ CM-TH xxx.xx%RH xxx.xx℃ Dew Point xxx.xxCM-WL OK / NGJADA-55342TS0206ITER_D_9ECN9721 / 24Gas System ScreenThis screen displays the following information. - Setpoint status of He and N2CO2 mixed gas supply side pressure (CL-HE-PG, CL-NC-PG)- State of the open/close control output of the supply solenoid valve (CL-HE-AV, CL-MG-AV)- Flow rate PV of mass flow controllers (CL-HE-MFC, CL-NC-MFC, FL-HE-MFC)- PV of pressure gauges (CL-MG-PG1, CL-MG-PG2, C0-SC-PG, FL-MG-PG)- PV of piezo valve (C0-SC-PV, FL-MG-PV)- Operation status of pumps (CL-MG-VP, FL-MG-VP)When control is local control, tapping a device opens a child screen to enable ON/OFFswitching of PID control based on the valve, mass flow controller flow rate SV, piezo valveopening degree SV and piezo valve vacuum gauge value. The operational status of solenoidvalves and pumps is displayed in green for Open/On/Normal and red for Close/Off/Error. Theequipment number is displayed by placing the equipment number display button in the corner ofthe screen and overlaid only when the equipment number display button is enabled. Figure 12 Gas system screenOptical System ScreenThis screen displays the following information. - High-voltage power supply (CL-HV) operating status- Insertion/evacuation status of movable mirror stages (C1-VL-M, C1-PM-M) into/fromoptical path- Opening/closing state of shutter (C1-ST, FL-ST)- Status of FIR stage controller (FL-OM-CB)- Value of various detectors (CL-GT1-DT, CL-GT2-DT, C0-PM, C1-PM, FL-PM)When control is local control, tapping a device opens a child screen for operation. Thecomponent under high voltage is displayed in yellow, and the open/close status is displayed ingreen (Open) and red (Close). the light path display is switched according to the status of CL-HV, C1-ST, C1-PM-M, and FL-ST. Mode Water Gas Optics InterlockYYYY-MM-DD hh:mm:ssMonitorCH3OH GasHe GasCO2 GasCL-GT1CL-GT2FL-GTC0-SCxx.x slmxx.x slmxx.x hPaxx.x %xx.x %xx.x Paxx.x Paxx.x Paxx.x sccmxx.x sccmxx.x sccmDisplayEquipment IDJADA-55342TS0206ITER_D_9ECN9722 / 24Figure 13 Optical system screenMode Switching ScreenThis screen switches between local (device operation with CM-TP) and remote (operation withEPICS IOC/CSS). Switching between local and remote is not allowed while CL-HV voltage isbeing applied. When the user performs a mode switching operation, a confirmation screen isdisplayed to confirm that the user really wants to switch. If the user cancels on the confirmationscreen, the switching is not performed. Figure 14 Mode switching screenInterlock Status ScreenThis screen displays the interlock status for each component (CL-HV, CL-NC-AV, CL-HE-AV,C1-ST, C1-VL-M, C1-PM-M, FL-ST) that is the interlock target. Also displays the status ofcontact signal input/output (CM-EI) with the monitoring PLC. JADA-55342TS0206ITER_D_9ECN9723 / 244.5.2. GUI for Remote ControlThe prototype FIR laser uses a LabVIEW program to control each instrument via PLC. However, the FIR laser to be delivered to IO should use EPICS and CSS. This section providesthe concepts of the screen that manufacturer of the FIR laser shall develop by using CSS. Theconcepts are based on the LabVIEW program of the prototype FIR laser. There are two panelsthat can be switched by tabs located at the top of the screen; one panel is for controlling andmonitoring instruments and the other is for starting laser emissions automatically. The formerpanel is called “Main Screen” and the latter is called “Automatic Ramp-up Screen”. Main ScreenIn this panel, an operator can control the equipment of the FIR laser and can monitor the statusof the equipment. By clicking buttons, the operator can change SVs of MFCs and SVs of thepower supplies, can open/close valves and shutters, and can change the position of the outputmirrors of the laser cavities. Figure 15 “Main Screen” for remote control of the FIR laserJADA-55342TS0206ITER_D_9ECN9724 / 24Automatic Ramp-up ScreenIn this panel, an operator can start laser emission automatically. So, this panel of the prototypeLabVIEW program has a function of a sequencer to set up equipment according to the steps thatthe operator predetermines. The operator can change the operation step in this screen, can startand stop the sequencer in this screen and can monitor the status of the equipment in this screenduring starting laser oscillation. Figure 16 “Automatic Ramp-up Screen” for remote control of the FIR laserAPPENDIX I : Optical Layout DiagramAPPENDIX II : Vacuum System Diagramｌｌｌｌｌｌ” ”APPENDIX III : Compressed Air System Diagramｌｌｌｌｌｌ” ”APPENDIX IV : Cooling Water System Diagramｌｌｌｌｌｌ” ”APPENDIX V : Control System Diagram５ ４ ３ ２ １ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．2AP-01443ControlSystemDiagram1ＤＣＸＤＲｅｆ：EG-Z007R2SH No. １A B C D E F G H I J K L M N O P Q R S T U V W X Y Z AA AB1 2 3 4 5 6 7 8 91011121314151617181920Laser ControllerCM-PLC1NX102-9000 #0NX-SL3300 #1NX-PF0630 #2NX-SID800 #3NX-SOD400 #5NX-ID4442 #7NX-OD4256 #8NX-OD4256 #9NX-PD1000 #10NX-AD4204 #11NX-DA2203 #12NX-AD4608 #13NX-DA3605 #14NX-END02 #16contactSafetycontactSafetycontactSafetycontactSafetycontactSafetycontactSafetycontactSafetyDigital PNPDigital PNPDigital PNPDigital PNPDigital PNPAnalog CurrentAnalog CurrentAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltagePanicButtonVacuumPumpLaserPowerLaserPowerShutterLaserPowerLaserPowerActuatorValveActuatorValvePiezoDriverLaserPowerLaserPowerPotentionPiezoDriverPowerSupplyLock-inAmpDiffAmpMassFlowcontMassFlowcontMassFlowcontMassFlowcontPiezoDriverCM-PBEBB2402-DACM-EIExternal InterlockCL-MG-VPnXR90iFL-MG-VPnXR90iCL-HVIPN-20K200-M(IDX)CL-HVIPN-20K200-M(IDX)C1-STLSC01CL-HVIPN-20K200-M(IDX)CL-HVIPN-20K200-M(IDX)F*-FL-AV(*:A,U or B)LSC-7900-00004(HORIBA STEC)＊1F*-SC-AV(*:A,U or B)LSC-7900-00004(HORIBA STEC)＊1CL-OW-PD3AI-01709-A(TOYAMA)CL-HVIPN-20K200-M(IDX)CL-HVIPN-20K200-M(IDX)CL-OW-PT(CL-OW-PD)3AI-01709-A(TOYAMA)CL-OW-PD3AI-01709-A(TOYAMA)C0-SC-PSHAP-10B10C0-SC-LA3AI-01708-A:LIA-MV-150-SC0-SB-OMGIGAF*-FL-MFC(*:A,U or B)LSC-7900-00004(HORIBA STEC)＊1F*-SC-MFC(*:A,U or B)LSC-7900-00004(HORIBA STEC)＊1F*-FL-MFC(*:A,U or B)LSC-7900-00004(HORIBA STEC)＊1F*-SC-MFC(*:A,U or B)LSC-7900-00004(HORIBA STEC)＊1CL-OW-PD3AI-01709-A(TOYAMA)Laser ControllerCM-PLC2NX-ECC203 #0NX-CIF210 #1NX-SID800 #2NX-SID800 #3NX-SOD400 #4NX-SOD400 #5NX-ID4442 #6NX-OD4256 #7NX-AD4608 #8NX-DA3605 #9NX-TS3204 #15NX-END02 #10EtherCATEtherCATEtherCATEtherCATEtherCATEtherCATEtherCATRS232CcontactSafetycontactSafetycontactSafetycontactSafetycontactSafetycontactSafetycontactSafetycontactSafetycontactSafetycontactSafetyDigital PNPDigital PNPAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog VoltageAnalog RTDMassFlowContMassFlowContMassFlowContPressurGuagePressurGuagePressurGuagePressurGuageFIRControlWaterLeak SWCoverSWShutterMirrorLSWMirrorLSWActuatedValveActuatedValveShutterMotorMotorMotorMotorDetectorDetectorFlowMeterPowerMeterPowerMeterFIRControlPiezoValvePiezoValvePiezoValvePiezoValveThermosensorCL-HE-MFCSEC-N127MGM,CS5,,MR.MG-07,15SLM,4CRL,He,CL-NC-MFCSEC-N117MGM,CS5,,MR.MG-06,5SLM,4CRL,N2,FL-HE-MFCSEC-N117MGM,CS5,,MR.MG-R01,10SCCM,4CRL,He,CL-MG-PG13CB5-G61-23G0CL-MG-PG23PI1-006-41G0C0-SC-PG3CB5-961-23G0FL-MG-PG3CB5-961-23G0FL-OM-CBFIR Stage ControllerCM-WLK7L-UBC1-CV-SWSS-5GL2FL-ST990-0907C1-PM-M2AE-00929-AC1-VL-M22AE-00928-ACL-NC-AVSYJ314-5GZD-QCL-HE-AVSYJ314-5GZD-QFL-ST990-0907C1-PM-M4AP-03864-BC1-VL-M23AP-05403-BC1-PM-M4AP-03864-BC1-VL-M23AP-05403-BCL-GT1-PDPDF10A/MCL-GT2-PDPDF10A/MCM-CW-FM0FD-H20(KEYENCE)C0-PMVEGA/2A-BB-9FL-PMVEGA/3AP-THzFL-OM-CBFIR Stage ControllerC0-MG-PVPV-A131-1/4"VCRFL-MG-PVPV-A131-1/4"VCRC0-MG-PVPV-A131-1/4"VCRFL-MG-PVPV-A131-1/4"VCRCM-CW-TS0PTR3531-ClassAExternalInterlockcontactSafetyShutterC1-STLSC01NX-SID800 #4VacuumPumpNX-SOD400 #6Analog CurrentcontactSafetyExternalInterlockCM-EIExternal InterlockDiffAmpC1-PMVEGAAnalog Voltage＊1：This is a temporary model for the prototype machinecontactSafetycontactSafetyPressureGaugeCL-HE-PGISE20C-T-M-B2-WPressureGaugeCL-NC-PGISE20C-T-M-B2-W1 126/Jan/2023Added pressure gaugeAPPENDIX VI : One Line Diagram５ ４ ３ ２ １ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．2AP-01444Power System Diagram0ＤＣＸＤＲｅｆ：EG-Z008R2SH No. ２A B C D E F G H I J K L M N O P Q R S T U V W X Y Z AA AB1 2 3 4 5 6 7 8 91011121314151617181920＊Laser table cable outletTB0TB1TB1TB1TB1TBDC5VTBDC24V1TB2CL-OW-PDM-2501-1C0-SC-LALIA-MV-150-SCM-MD122MN430M-BAJPC1-STLSC01CL-OSMDO34 3-BW-100C0-SC-PSHAP-10B10C0-SB-OMFL-OSMDO34 3-BW-100TB3TBAC100VTBDC24V22-W-8DC24V2-P-15DC24VFL-MG-VS3AI-01382-ACM-TPNA5-15W101S-V1CM-SHW4S1-05DCL-MG-VS3AI-01382-ACM-THZN-THX21-SFL-OM-CBC0-SC-DTPPS-03-09(20MHz)C0-SB-DTPPS-03-15(1MHz)FL-DT-CP(2IK6GN-SW2)CM-WLK7L-UBCL-MG-GD2PGD500(398-802)CL-GT1-PDLDS12BCL-GT2-PDLDS12BC0-VL05LPL911-065C1-VL05LPL911-065C0-PMVEGA/2A-BB-9C1-PMVEGA/L300W-LP2-50FL-PMVEGA/3AP-THzCL-MG-GD1VCG503(398-483)FL-DT-LALIA-MV-150-SCM-MD222MN430M-BAJPTBDC12VTBDC15VTB1TB1CL-NC-AVSYJ314-5GZD-QCM-THZN-THX21-SCL-HE-AVSYJ314-5GZD-QCL-HE-MFCSEC-N127MGM,CS5,,MR.MG-07,15SLM,4CRL,He,CL-NC-MFCSEC-N117MGM,CS5,,MR.MG-06,5SLM,4CRL,N2,FL-HE-MFCSEC-N117MGM,CS5,,MR.MG-R01,10SCCM,4CRL,He,FL-VL05LPL911-065TB4TB5C0-SC-WGAD86263φ400V30A50HzTB:Terminal BlockNF:Noise FilterCP:Circuit ProtectorMCCB:Molded Case Circuit BreakerELCB:Earth Leakage Circuit BreakerCM-TR:TransformerAVR:Automatic Voltage RegulatorCM-TR13φ200V7.5kVATRP7.5K-42Y(OUT:21.65A)ELCB13φ400V30A-30mANV125-SV 4P 30AAC200-440V 30MATR1INMCCB13φ400V20ABW32AAG3P 20ACM-TR1(3φ200V)(3φ400V)CM-TR21φ100V1kVATRH1K-41S(OUT:10A)TR2INMCCB21φ400V10ACP30FM-2P0101φ400VCN230-11(F)PoPolaRackCP1AC230V10ACP30FM-2P010CN230-12(F)CM-PS-BBBreaker UNITCL-MG-VGCP2AC230V10ACP30FM-2P010TAP230-12 TAP230-11FL-MG-VGCP3AC230V10ACP30FM-2P010Model 7240.220(RITTAL) Model 7240.220(RITTAL)(DC5V)(DC24V)PoPolaCP4AC230V5ACP30FM-2P005AC230V0.26AAC230V0.086AAC230V0.14AAC230V0.2AAC230V0.217AAC230V0.56AAC230V0.56AAC230V1.52AAVR24MCCB33φ400V5ACP30FM-2P005CN230-11C typeCN230-12C typeCN230-13C typeCN230-14C typeCN230-15C typeCN230-16C typeCN230-17C typeCN230-18C typePS-15-25-L (EU)3φ400VNF3φ400V(6A)JAC-06-683NF3φ400VAC/DC AdapterAVR24in:3φ400Vout:DC24V480WS8VK-WB48024AVR24(DC5V)(DC24V)(AC100V)(AC230V)(DC5V)2.0A(DC24V)(AC230V)60W(AC230V)(0.14A)(AC230V)46W(AC230V)50W(AC230V)130W(AC230V)130W(AC230V)350W(AC100Vac～240Vac)(3φ200V)14.5ADC24V(DC±15V)100mADC24VCP5DC24V20ACP30FM-2P020(AC230V)AVR5in:AC230Vout:DC5V15WS8VK-G01505AVR5DC5VCP6DC5V5ACP30FM-2P005C1-STCM-PLC1MesstecFemtoGIGALGThorlabsTektronixMATSUSADACL-HVIPN-20K200-MIDXTektronixShutter PSControl RelayCM-PLC1 PS/IOcontrol RelayPiezo driver(amp)Lock-in Amp(SC)Output Monitor＋CO2 Differentialamplifier(×10)OscilloscopeMonitorshuttercontrollerFIROscilloscopeCO2OscilloscopeLaser PowerSupply UnitHighSpeedHighVoltage AMPCN230-21(AC230V)(AC230V)(DC24V)(DC24V)DC24VAC100VTAP230-231CN230-22Model 7240.120(RITTAL)CN230-23AC230V0.017AAC230V0.39AAC230V0.14AAC230V0.87AAC230V0.086AAC230V0.5AAC230V0.5AAC230V0.017AAC230V0.1AAC230V0.1AAC230V0.1AAC230V0.4AAC230V0.4AAC230V0.1AAC230V0.32ACN230-01CN230-02CN230-21C typeCN230-22C typeCN230-23C typeCN230-24C typeCN230-25C typeCN230-26C typeCN230-27C typeCN230-28C typeCN230-210C typeCN230-211C typeCN230-212C typeCN230-213C typeCN230-214C typeCN230-215C typeCN230-216C typePS-15-25-L (EU)7E05029-NP7E05029-NP7E05029-NPGE18 09-P1J(1.5m)GE18 09-P1J(1.5m)(AC230V)450W(AC230V)450W(DC24V)47W(DC24V)5.28WAVR12V15WS8VK-G01512AVR±15V7.5WS82S-7728(AC230V)90W(AC230V)30W(AC230V)200WAC/DC Adapter(AC230V)115W(AC230V)115W(AC230V)4W(AC230V)4WAC/DC AdapterAC/DC AdapterAC/DC AdapterAC/DC AdapterAC/DC AdapterAVR12VAVR15VCN24-21CN230-215-1DC±15V100mA(DC12V)24W(DC12V)24W(DC12V)24W(DC24V)(0.75A)(1φ100V)0.046A(1φ100V)0.046A(DC12V)0.2A(DC±15V)0.10A(DC24V)50W(2A)DC24V0.75ADCDC(AC230V)(0.1A)ZN9-ED01-STOYAMAC1-PM-M4AP-03864-BC1-VL-M23AP-05403-BFL-ST990-0907C0-MG-PVTOYAMAOMRONOMRONOMRONINFICONkoyoelecFemtoThorlabsThorlabsPacific LasertecPacific LasertecOphirOphirOphirOMRONVigoSystemVigoSystemC0-SA16AMackenInstruments,II-VI japanINFICONThermohygrometerHgCdTedetectorPSHgCdTedetectorPSOpticalChopperSpectrumanalyzerRP SWBOXCO2 Laser(nXR90i)RP SWBOXFIR Laser(nXR90i)Touch panelLAN HUBWater leaksensorMovable MirrorMotorSMK014A-AMovable MirrorMotorSMK014A-AControlLaser beamshutterGuageDisplay 1chFIRStageControllerLock-in Amp(DT)Photodetector1PSPhotodetector2PSHe-Ne Laser1(KEY PS BOX)He-Ne Laser2(KEY PS BOX)Power MeterPower MeterPower MeterC0-StarkCeGuageDisplay 3chTAP230-232Model 7240.120(RITTAL)Model 7240.120(RITTAL)TAP230-212Model 7240.120(RITTAL)TAP230-211TAP230-222 TAP230-221Model 7240.120(RITTAL)Model 7240.120(RITTAL)LGOscilloscopeMonitor(AC230V)29WCN230-03(AC230V)Hole#3Hole#3Hole#3Hole#1＊The number of the hole in the stone surface plate. Hole#1:Cable line hole size=□200×120 Hole#2:Cable line hole size=□50×110 Hole#3:Cable line hole size=□120×1203AI-01707-A2AI-00420-A2AI-00420-AHeNe Laser1KEY PS BOXHole#3HeNe LaserHeNe Laser2KEY PS BOXHole#1HeNe LaserPacific LasertecPacific LasertecBNCSHVLANBNCBNCDsub9OUTPUT(1.8m)(1.8m)PoPola Control Rack(CM-CC1):2AI-00414-APoPola(On laser table or aluminum frame)＊1＊1＊1＊1＊1＊1＊1＊1＊1C0-SB-DT_TCooling waterThermoSensorHAKKO ELECTRICKEYENCECooling waterFlow MeterExternal interlockPort1PoPola(Under the laser table)Hole#3(1.8m)Pacific LasertecHeNe Laser3KEY PS BOXHeNe LaserOMRONWater leaksensorOMRONWater leaksensorTerminal BlockCM-PLC1#13CM-PLC13AI-01704-ACM-PLC1#9CM-PLC1#13CM-PLC1#13CM-PLC1#9CM-PLC1#13CM-PLC1#13C1-ST_PRY101～103CM-PLC1#4CM-PLC1#4CM-PLC1#4/#5CM-PLC1#3CM-PLC1#9CM-PLC1#13/#14CM-PLC1#11CM-PLC1#15CM-PLC1#11/#12CM-PLC1#4/#5/#7/#8CM-PLC1#5CM-PLC1#3/#6CL-MG-VP_ContFL-MG-VP_ContCM-EI_PCM-PLC1#0F*-FL-AV/F*-SC-AVF*-FL-MFC/F*-SC-MFCCM-CW-FM0_PCM-CW-TS0_PCL-HV_ANLGCL-HV_IOCL-HV_EXTRJ45RJ45CM-PLC1#0CM-PLC1#0Port2CM-PLC1#14INPUT ACL-OW-PD_Ain P(*:A,U or B)(*:A,U or B)(*:A,U or B)Dsub9BNCBNCLANBNCDsub9BNC BNC3AI-01707-APort3RJ45＊1：Attached cables should be wired with a sufficient lengthand appropriate route in order to ensure the maintainability＊2：This is a temporary model for the prototype machineA&DOscillator(SineWaveGenerator)５ ４ ３ ２ １ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．2AP-01446Signal Cabling (PLC2)1ＤＣＸＤＲｅｆ：EG-Z008R2SH No. ４A B C D E F G H I J K L M N O P Q R S T U V W X Y Z AA AB1 2 3 4 5 6 7 8 91011121314151617181920＊Laser table cable outletConnector Panel3-R-15CM-PLC2_EtherCATFL-DT-AM_1CM-PLC2_EtherCATFL-DT-LALIA-MV-150-SFL-DT-LA_1FL-DT-CP_1FL-OM-CB_SIGFL-OM-CB_RS232CM-PLC2_EtherCAT_1CL-NC-AV_1CL-HE-AV_1EtherCAT_7EtherCAT_7EtherCAT_6EtherCAT_6EtherCAT_5EtherCAT_5EtherCAT_4EtherCAT_4EtherCAT_3EtherCAT_3EtherCAT_2EtherCAT_2CM-PLC2_EtherCAT_1CL-HE-MFCSEC-N127MGM,CS5,,MR.MG-07,15SLM,4CRL,He,CL-NC-MFCSEC-N117MGM,CS5,,MR.MG-06,5SLM,4CRL,N2,FL-HE-MFCSEC-N117MGM,CS5,,MR.MG-R01,10SCCM,4CRL,He,FL-MG-PG3CB5-961-23G0C0-SC-PG3CB5-961-23G0CL-MG-PG13CB5-G61-23G0CL-MG-PG23PI1-006-41G0CL-NC-AVSYJ314-5GZD-QSS3YJ3-S42-02-C4-QFL-OM-CB_SIGFL-OM-CB_RS232FL-OM-CB_PCM-WLK7L-UBCL-GT1-PDLDS12BCL-GT2-PDLDS12BFL-MG-PG_Analog/PowerC0-SC-PG_Analog/PowerCL-MG-PG1_Analog/PowerCL-MG-PG2_Analog/PowerFL-OM-CBC1-CV-SW_PC1-VL-M2 LSW_PC1-VL-M2 iLSW_PC1-PM-M LSW_PC1-CV-SW_1C0-MG-PV_PFL-MG-PV_PCL-NC-AVSS-4BK-1CC0-MG-PVPV-A131-1/4"VCRC0-PM_PFL-PM_PC0-PMVEGAFL-PMVEGACL-GT1-PDPDF10A/MCL-GT2-PDPDF10A/MC0-PM_1FL-PM_1FL-OM-CB Motor_1FL-OM-CB sensor_1FL-MG-PG_Analog/PowerC0-SC-PG_Analog/PowerCL-MG-PG1_Analog/PowerCL-MG-PG2_Analog/PowerCM-MG-GD1VCG503(398-483)CL-MG-GD2PGD500(398-802)FL-DT-DT_1FL-DT-CP_1FL-ST_PCL-GT1-PD_PCL-GT1-PD(P)CL-GT2-PD_PCL-GT2-PD(P)C0-PM_1FL-PM_1C1-CV-SWSS-5GL2C0-PM2A-BB-9FL-PM3AP-THzCL-HE-AVSS-4BK-1CFL-DT-DTQS5-LMotorSensor(LSW/HP)FL-DT-CPMT16842-3001FL-ST990-0907C1-VL-M22AE-00928-AC1-PM-M2AE-00929-AFL-MG-PVPV-A131-1/4"VCRCM-PLC2_EtherCAT_0CL-HE-AVSYJ314-5GZD-QSS3YJ3-S42-02-C4-QC1-VL-M2 MOT_PC1-PM-M MOT_PCM-WLF03-16PE-20MCM-WLF03-203-O-17CM-WL_CABLE2FL-DT-AM5307C1-VL-M2 MOT_1C1-PM-M MOT_13-R-2FL-DT-AM_1CL-HE-PGISE20C-T-M-B2-WCL-NC-PGISE20C-T-M-B2-WCL-HE-PG_PCL-HE-PG_PFemtoFIRDifferentialamplifier(×20)Lock-in AmpCM-PLC2#1FL-OM-CB_PC1-CV-SW_PFL-ST_PC1-VL-M2 LSW_PC1-VL-M2 iLSW_PC1-VL-M2 MOT_PC1-PM-M LSW_PC1-PM-M MOT_PCL-GT1-PD_PCL-GT2-PD_PC0-PM_PFL-PM_PC0-MG-PV_PFL-MG-PV_PCL-NC-AV_PCL-HE-AV_PFL-DT-DT_1HORIBAHORIBAHORIBAINFICONINFICONINFICONINFICONSMCCO2 HeMassFlowControllerCO2 NCMassFlowControllerFIR HeMassFlowControllerFL MixedGasPressure GuageC0 StarkCellPressure GuageCL MixedGasPressure Guage1CL MixedGasPressure Guage23port solenoidValve3port solenoidValveOMRONThorlabsThorlabskoyoelecair tubeair tubeFIRStageControllerWater leaksensorPhotodetector1PSPhotodetector2PSSwagelokSwagelokHORIBAHORIBAPiezo Valve(vacuum)Piezo Valve(vacuum)CL NCActuated ValveCL HeActuated ValveOphirOphirPoPola(On Laser table or aluminum frame)Power MeterPower MeterINFICONINFICONOMRONOphirOphirGentec-EOOriental MotorFL-OM-CBFL-OM-CBEKSMATOYAMATOYAMAThorlabsThorlabsC0-StarkCellGuageDisplay 3chGuageDisplay 1chCover switchPower MeterPower MeterPyro detectorOptical ChopperMotorSensor(LSW/HP)Laser beamshutterCO2 LaserMovable MirrorCO2 LaserMovable MirrorCO2 LaserPhoto DetectorPDF10A/M＋SML30CCO2 LaserPhoto DetectorPDF10A/M＋SML30CPF113A(Socket)CM-WL_CABLE1CM-WL_CABLE1Hole#3Hole#3Hole#3Hole#3Hole#1Hole#3Hole#1Hole#1Hole#1Hole#1Hole#1Hole#1Hole#1Hole#2Hole#2Hole#3Hole#3＊The number of the hole in the stone surface plate. Hole#1:Cable line hole size=□200×120 Hole#2:Cable line hole size=□50×110 Hole#3:Cable line hole size=□120×120RJ453AI-01707-ASMC(2m)(2m)PoPola(Under the Laser table)＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1＊1PoPola(Utility piping control parts)CL-NC-AV_PCL-HE-AV_PFL-DT-AM_T＊1：Attached cables should be wired with a sufficient lengthand appropriate route in order to ensure the maintainabilityOMRONWater leaksensorOMRONWater leaksensorTerminal BlockCM-WL_CABLE2Hole#1Hole#1RY207～RY211CM-PLC2#3CM-PLC2#3CM-PLC2#3CM-PLC2#2CM-PLC2#2CM-PLC2#8CM-PLC2#8CM-PLC2#8CM-PLC2#8CM-PLC2#8CM-PLC2#8/#9CM-PLC2#8/#9NFRY204～RY206RY201～RY203RY212RY213CL-GT1-PD(P)CL-GT2-PD(P)CM-PLC2#4CM-PLC2#4CM-PLC2#2/#4(NX-CIF210)(NX-ECC203)CM-PLC2#0CM-PLC2#0(NX-ECC203)CM-PLC23AI-01713-AEtherCATCM-PLC2#5/#7CM-PLC2#5/#7SMCPressure GaugeSMCPressure GaugeCM-PLC2#2CM-PLC2#21 11 126/Jan/2023Added pressure gaugeAPPENDIX VII : Circuit Diagram５ ４ ３ ２ １ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹ．ＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．2AP-01447PS UNIT Circuit Diagram0ＤＣＸＤＲｅｆ：EG-Z009R2SH No. ５A B C D E F G H I J K L M N O P Q R S T U V W X Y Z AA AB1 2 3 4 5 6 7 8 91011121314151617181920(R) (R) (R1) (R1) (R1A-T1) (R1A-T1) (R1A-T1) (U200)(S) (S) (S1) (S1) (S1A-T1) (S1A-T1) (S1A-T1) (V200)(T) (T) (T1) (T1) (T1A-T1) (T1A-T1) (T1A-T1) (W200)(N) (N) (N1) (E) (E) (E) (E)(E)(R1) (R1A-T2) (R1A-T2) (R1A-T2)(S1) (S1A-T2) (S1A-T2) (S1A-T2)(E) (E) (E)(X1-0)(Y1-0)(E)(S1) (S1B) (S1B)(N1) (N1B) (N1B)(E)(S1B)(N1B)(E)(R1) (R1C) (R1C) (R1C) (R1C)(N1) (N1C) (N1C) (N1C) (N1C)(E) (E) (E)(T1) (T1D) (T1D) (T1D) (T1D)(N1) (N1D) (N1D) (N1D) (N1D)(E) (E) (E)(S1) (S1F) (S1F) (S1F) (S1F)(N1) (N1F) (N1F) (N1F) (N1F)(E) (E) (E)(S1F) (S1F)(N1F) (N1F)(E) (E)(S1F) (S1F) (S1F)(N1F) (N1F) (N1F)(E) (E) (E)(R1) (R1G)(S1) (S1G)(T1) (T1G)(R1G)(S1G)(T1G)(R1H) (R1H)(S1H) (S1H)(T1H) (T1H)(P24-1)(N24-1)(P24)(N24)(P24) (P24-1) (P24-1) (P24-1)(N24) (N24-1) (N24-1) (N24-1)(N1)(S1)(E) (E)(P5-0)(N5-0)(P5-0) (P5) (P5)(N5-0) (N5) (N5) (N5) (N5)(E) (E)(P5) (P5)(N24-1)(P24-1)(E)(S1F) (S1F)(N1F) (N1F)(E) (E)(X1)(Y1)(U200-0)(V200-0)(W200-0)(N24-1)(P24-1)(E)(E)(N24-1) (N24-1)(P24-1) (P24-1)(E) (E)(E)(E)(S1B) (S1B)(N1B) (N1B)(E) (E)(P24-1)(N24-1)(U200)(V200)(W200)(E)(X1)(Y1)(E)E EMCCB2BW32AAG-2P-10AECP1CP30FM-2P010ECP2CP30FM-2P010ECP3CP30FM-2P010ECP4CP30FM-2P005E E1 2 34 5 6ENFJAC-06-683E ECP5CP30FM-2P0201 2 3CM-SH_DC24VPHOENIX:TB FRONT-MC 1.5/3ST3.81CP6CP30FM-2P0056-B-2(P5)6-B-3(N5)6-B-2(P24-1)6-B-2(N24-1)16-B-2X1(B)16-B-2Y1(B)16-B-2E(B)18-B-2P24-1(A)18-B-2N24-1(B)18-B-3E(C)EEETB1TB0FUJI ELECFUJI ELECUL1015 #10(Y) UL1015 #10(Y)UL1015 #10(Y) UL1015 #10(Y)TRP7.5K-42Yin:3φ400Vout:3φ200V7.5kVALaser PowerSupply Unit3φ200V:14.5AUL1015 #10(Y) UL1015 #10(Y)UL1015 #10(Y) UL1015 #10(Y)＊2＊2FUJI ELEC10ATB1UL1015 #14(Y)UL1015 #14(Y)TRP1K-41Sin:1φ400Vout:1φ100V1kVA＊21φ100V:10AFUJI ELEC10ATB1UL1015 #14(Y)UL1015 #14(Y)UL1015 #14(Y)＊１UL1015 #14(Y)＊１UL1015 #14(Y)＊１UL1015 #14(Y)＊１＊2FUJI ELEC10ATB1UL1015 #14(Y)UL1015 #14(Y)RP SWBOX1φ230V＊2FUJI ELEC10ATB1UL1015 #14(Y)UL1015 #14(Y)RP SWBOX1φ230V＊2FUJI ELEC5ATB1UL1015 #14(Y)UL1015 #14(Y)Control Power1φ230V＊2 ＊2FUJI ELECUL1015 #14(Y)UL1015 #14(Y)UL1015 #14(Y)Noize FilterCOSEL3φ400V-6A＊1:Branching wire should be AWG14 or thicker＊2:Use "UL1015 GRN AWG14" wire for Earth(E) wiring＊2UL1015 AWG14(Y)＊2L1L2L3GNDAVR24DC Power supplyS8VK-WB48024OMRON480WCM-PLC1DC24V+V-V20ATB2UL1015 #14(BLU) UL1015 #14(BLU)UL1015 #14(BLU) UL1015 #14(BLU)L NAVR5DC Power supplyS8VK-G01505OMRON15W24VLAN HUBW4S1-05DOMRONGNDFG+V-V5ATB3UL1015 #14(BLU) UL1015 #14(BLU)Shutter Control IODC5V/3A(Control Rack)UL1015 #14(BLU) UL1015 #14(BLU)AC TAP＊3:For the connection of the AC outlet, refer to 2AP-01444-AControl PowerAC TAP1φ230VControl PowerAC TAP1φ230VCM-PLC2DC24VCM-SHCM-TR1 CM-TR2CL-HVCM-PS-BBBreaker UNITTB:Terminal BlockNF:Noise FilterCP:Circuit ProtectorMCCB:Molded Case Circuit BreakerELCB:Earth Leakage Circuit BreakerCM-TR:TransformerAVR:Automatic Voltage RegulatorAC connector1φ230VELCB232AFEW32AAG-3P-20A-15mAELCB332AFEW32AAG-2P-10A-15mA20A20A 10ATB1＊2＊2＋ -CM-TPTouch panelNA5-15W101S-V1DC24PSU(CM-CC2)E(S1B)(E)(N1B)＊2GNDL ECN230-11(F)CN230-12(F)L ECN230-01(F)L ECN230-02(F)L EPoPola Control Rack(CM-CC1)PSU(CM-CC2)PoPola(Under the Laser table)LCN230-21(F)E LCN230-22(F)E LCN230-23(F)E LCN230-03(F)EMCCB3BW32AAG-3P-5AZ3809139INPUT3φ400V,30A,50HzMCCB1BW32AAG3P 20AZ3809178ELCB1NV125-SV 4P 30AAC200-440V 30MAControl PowerAC TAP1φ230VControl PowerAC TAP1φ230V2AP-01444-ASH No.22AP-01444-ASH No.22AP-01444-ASH No.2UL1015 #12(Y)UL1015 #12(Y)UL1015 #12(Y)PoPola(Under the Laser table)3AP-05837-ASH No.161 2 3 4CN3φ200(F)1 2 3 4CN3φ200PoPolaControl Rack(CM-CC1)PoPola(Under the Laser table)SH No.63AP-05848-ASH No.183AP-05839-A5A＊3 ＊3 ＊3＊330A 30mAOscilloscopeMonitorCM-PLC2AC100VTB4 TB5ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05848PLC1 DC24／5V Circuit DiagramＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ６A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314to PLC1#3 to PLC1#6 to PLC1#11FD-HCB10(P5)(N5)(P5) (102-7) (102-7)(P5)(103-8)(N5)(P5)(P24-1)(P24-1)(P24-1)(N24-1)(P24-1)(N24-1)(103A5)(103A6)(P24-1)(N24-1)(106A1)(106A2)(101-3)(101-3)(P24-1)(N24-1)(111A7)RY101RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ3814727RY1016-C-49-E-9(105B5)9-E-10(105B7)8-N-8(104B3)8-N-5(104A5)1 2 3 4 5 6 7 8 9C1-ST_PXM3D-09211 2 3 4 5 6 7 8 9C1-ST_1Dsub9P1 2 3 4 5 6 7 8 98-E-5(103A5)8-E-5(103A6)5-T-15(P24-1)5-T-15(N24-1)5-AB-15(P5)5-AB-15(N5)CM-EI-SW1 2 3 4 5 6 7 8 9CM-EI_PXM3D-09211 2 3 4 5 6 7 8 9CM-EI_P1 2 3 4 5 6 7 8 9CM-EI_J7-C-2(P24-1)10-E-3(106A1)10-E-4(106A2)7-C-2(N24-1)1 2 3 4 5 6 7 8 9CM-CW-FM0_P13-E-6(111A7)1 2 3 4 5 6 7 8 9CM-CW-FM0_PXM3D-09211 2 3 4 5 6 7 8 9C1-ST_PDsub9P(C1-ST CLOSE)(C1-ST OPEN)RY102R103C1-STLaser beamshuttercontrollerLSC01XM2Z-0013,PCOp/Cl ControlOpenClosedLockedGNDCM-EIExternalInterlockto PLC1#4 to PLC1#41 2 3 4 5 6 7 8 9C1-ST_1Dsub9P＊1：Jumper connector for inspectionDew PointAlarm＊1RY103G3TA-IDZR02S DC5-24OMRONZ3813753RY102G3TA-IDZR02S DC5-24OMRONZ3813753＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" wire for electric wiring＊：DC24V power wiring is branched from the terminal block (TBDC24V1)＊：DC5V power wiring is branched from the terminal block (TBDC5V)(C1-ST OPEN)(C1-ST CLOSE)XM2Z-0013,to PLC1#5to PLC1#5CM-CW-FM0_PPINKGREYWHITEBLACKBLUEBROWNM12Power 20-30VGNDCh1Ch2CM-CW-FM0FlowMeterFD-H20Ch3Ch4CM-PLC1XM2Z-0013,DGC-9PSC1-ST_1C1-ST_PDsub9P1 2 3 4 5 6 7 8 9PoPola(Laser table)ConnectorPanel5 7 3 6 4 8 1 2ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05847PLC1#0／2／10(DC24V)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ７A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(N24-1)(E)(N24-1)(N24-1)(N24-1)(E)(P24-1) (P24-1) (P24-1)(IOG)A1A3A5A7B1B3B5B7E EA1B1A3B3A7B7EE EA1B1A3B3A7B76-R-2(P24-1)6-R-2(N24-1)E13-E-6(IOG)IOVIOGNX-PF0630CM-PLC1#2IO Power SupplyPIN No. PIN NoNX102-9000CM-PLC1#0PLC CPU/General; EtherCAT MasterIOVIOGIOVIOVIOGIOGPIN NoNX-PD1000CM-PLC1#10NX Unit Power SupplyUnit POWERDC24VUnit POWER0VUnit POWERDC24VUnit POWER0VUnit POWERDC24VUnit POWERDC24VUnit POWER0VUnit POWER0V(P24-1)＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG18" wire for DC24V wiring＊：DC24V power wiring is branched from the terminal block (TBDC24V1)＊：Use "UL1007 GRN AWG18" wire for Earth(E) wiringCM-PLC1ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05849PLC1#3／4(SID800／SID800)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ８A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(103B3)(104A1)(104A2)(104B1)(104B2)(103A1)(103A2)(103B1)(104A5)(103A3)(103A4)(103A5)(103A6)(103B2)(103B4)(104A3)(104A4)(104B3)Si0T0Si2T0Si4T0Si6T0Si1T1Si3T1Si5T1Si7T1A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8Si0T0Si2T0Si4T0Si6T0Si1T1Si3T1Si5T1Si7T1A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8CM-PB-SW1CM-PB-SW1CM-PB-SW2 CL-MG-VP_ContXM3D-0921 FL-MG-VP_ContXM3D-09216-J-5(104B3)6-H-5(104A5)6-K-4(103A5)6-K-4(103A6)SignalNX-SID800CM-PLC1#38ch Safety InputI/O PIN No. SignalNX-SID800CM-PLC1#48ch Safety InputI/O PIN NoCL-MG-VPnXR90i1 2 3 4＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresCM-PBPanicButton BOX3AI-01381-A1 2 3 45 6 7 85 6 7 8CM-PB_P CM-PB_11 21 234353435CL-HVLaser PowerSupply UnitIPN-20K200-M343534351 21 2FL-MG-VPnXR90i(Reset)(EMC IL)(EMC)CL-MG-VP_ContFL-MG-VP_ContCL-MG-VP_Cont Dsub9PCL-HV_IO CL-HV_IO Dsub37PCM-PB-SW3CM-PB-SW1EmergencySTOPdual contact2/2CM-PB-SW1EmergencySTOPdual contact1/2CM-PB-SW2ResetCM-EIExternalInterlockCM-PB-SW1EmergencySTOPdual contact1/2CM-PB-SW2ResetCM-EIExternalInterlockCM-PB-SW3Lock/UnlockCM-PB-SW1EmergencySTOPdual contact2/2CM-PB-SW3Lock/UnlockCL-MG-VPContactson PumpCL-MG-VPContactson PumpCL-HVEMERGENCYC1-STC1 ShutterClosedFL-MG-VPContactson PumpFL-MG-VPContactson PumpCL-HVEMERGENCYC1-STC1 ShutterOpened[RY102][RY103]CM-PLC1 CM-PLC1FL-MG-VP_Cont Dsub9PCN2CL-HV_IOXM3D-3721 XM2Z-0011,XM2Z-0011,(NC)(NC)ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05850PLC1#5(SOD400)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ９A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(105A1) (105A1)(105A3) (105A3)(105A5) (105A5)(105A7) (105A7)(105B1) (105B1)(105B3) (105B3)(105B5)(105B7)So0IOGSo2IOGSo1IOGSo3IOGA1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8CL-HV_EXTXM3A-09216-C-4(105B5)6-C-5(105B7)CL-HV_EXTXM3A-0921SignalNX-SOD400CM-PLC1#54ch Safety OutputI/O PIN No＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wires1 2 3 4XM2Z-0011,1314XM2Z-0011,CL-HVLaser PowerSupply UnitIPN-20K200-M1 213143 4CN10CN10CN21 213143 41 2133 414CL-HV_EXTCL-HV_EXTDsub9PCL-HV_EXTDsub9PCL-HV_IODsub37PCL-HVEXTINTERLOCKCL-HVEXTINTERLOCKCL-HVRESETCL-HVRESETCL-HVEXTENAERGENCYCL-HVEXTENAERGENCYC1-STC1 ShutterOpen/CloseC1-STC1 ShutterOpen/Close[RY101]CM-PLC1Dsub9PDsub37PCL-HV_IOXM2Z-0011,CL-HV_EXTDsub9PCL-HV_IOXM3D-3721ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05851PLC1#6／7(SOD400／ID4442)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １０A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(107A1)(107A3)(107A5)(107A7)(107B1)(107B3)(107B5)(107A2)(107A4)(107A6)(107A8)(107B2)(107B4)(107B6)(106A1)(106A2)IN0IOV0IN2IOV2IN4IOV4IN6IOV6IN1IOV1IN3IOV3IN5IOV5IN7IOV7A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8So0IOGSo2IOGSo1IOGSo3IOGA1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B86-L-4(106A1)6-L-4(106A2)SignalNX-ID4442CM-PLC1#78ch Digital Input (PNP)I/O＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresPIN NoXM2Z-0011202124252829323322232627303120212425282932332223262730312021242528293233222326273031CN22021242528293233222326273031CL-HVLaser PowerSupply UnitIPN-20K200-M CL-HV_IO4ch Safety OutputI/O PIN No. SignalNX-SOD400CM-PLC1#6CM-EIDew PointAlarmCM-EIDew PointAlarmCL-HVSTAND-BYCL-HVDOORCL-HVOPRCL-HVAIRFLOWCL-HVOPERATECL-HVOCRCL-HVTHERMALCL-HVSTAND-BYCL-HVDOORCL-HVOPRCL-HVAIRFLOWCL-HVOPERATECL-HVOCRCL-HVTHERMALCM-PLC1 CM-PLC1Dsub37PCL-HV_IODsub37PCL-HV_IOXM3D-3721ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05852PLC1#8(OD4256)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １１A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(108A1) (108A1)(108A3) (108A3)(108A2) (108A2)(108A4) (108A4)(108A5) (108A5)(108A6) (108A6)(108B1) (108B1)(108B2) (108B2)(108B3) (108B3)(108B4) (108B4)(108B5) (108B5)(108B6) (108B6)OUT0IOG0OUT2IOG2OUT4IOG4OUT6IOG6OUT1IOG1OUT3IOG3OUT5IOG5OUT7IOG7A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8SignalNX-OD4256CM-PLC1#88ch Digital Output (PNP)I/O PIN No103 4 7 811121 2 5 6 9XM2Z-0011＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresCL-HV_IO1 2 5 6 9103 4 7 81112CN2CL-HVLaser PowerSupply UnitIPN-20K200-M1 2 5 6 9103 4 7 811121 2 5 6 9103 4 7 81112CL-HVSTAND-BYONCL-HVOPERATEONCL-HVBUZZERONCL-HVSTAND-BYOFFCL-HVOPERATEOFFCL-HVBUZZEROFFCL-HVSTAND-BYONCL-HVOPERATEONCL-HVBUZZERONCL-HVSTAND-BYOFFCL-HVOPERATEOFFCL-HVBUZZEROFFCM-PLC1Dsub37PCL-HV_IODsub37PCL-HV_IOXM3D-3721ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05853PLC1#9(OD4256)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １２A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(109A1) (109A1)(109A2) (109A2)(109A3)(109A4)(109B1) (109B1)(109B2) (109B2)OUT0IOG0OUT2IOG2OUT4IOG4OUT6IOG6OUT1IOG1OUT3IOG3OUT5IOG5OUT7IOG7A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8F*-FL-AV/F*-SC-AVXM3A-1521F*-FL-AV/F*-SC-AVXM3A-1521SignalNX-OD4256CM-PLC1#98ch Digital Output (PNP)I/O PIN NoXM2Z-0011,XM2Z-0011,5 6 7 8CH3OHVaporizerF*-SC-AV(*:A,U or B)8 98 9CL-OW-PDPiezo DriverBOXLED(G)LP＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresDsub15P5 6EXT AV5 AV-3 OPEN6 AV-3 OPEN COM7 8EXT AV7 AV-4 OPEN8 AV-4 OPEN COMF*-FL-AV(*:A,U or B)CL-OW-PD_Din PPOT CN55C600-DIA-0001F*-FL-AVActuatedValveCL-OW-PDLOCALCONTROL FLAGCL-OW-PDLOCALCONTROL FLAGF*-FL-AVActuatedValveF*-SC-AVActuatedValveF*-SC-AVActuatedValveCM-PLC1F*-FL-AV/F*-SC-AV(*:A,U or B)F*-FL-AV/F*-SC-AV(*:A,U or B)Dsub15PLSC-7900-00004(＊1)＊1：This is a temporary model for the prototype machineＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05854PLC1#11／12(AD4204／DA2203)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １３A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(111A1)(111A3)(111A5)(111B1)(111B3)(111B5)(111A2)(111A4)(111A6)(111B2)(111B4)(111B6)(112A1)(112A5)(111A7)(IOG)Input1+Input1-Input3+Input3-Input5+Input5-Input7+Input7-Input2+Input2-Input4+Input4-Input6+Input6-Input8+Input8-A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8I1+IOVIOGNCI2+IOVIOGNCA1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8CL-HV_ANLGXM3A-25216-P-4(111A7)7-J-7(IOG)SignalNX-AD4204CM-PLC1#118ch Analog Current Input 4-20ｍA 1/8000I/O PIN No. SignalNX-DA2203CM-PLC1#122ch Analog Current Output 4-24mA 1/8000I/O PIN NoCL-HVLaser PowerSupply UnitIPN-20K200-M41117187 814152021105CN14 5101117187 8141520214 5101117187 8141520214 5101117187 814152021XM2Z-0011＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresCL-HVLaser PowerSupply UnitIPN-20K200-MXM2Z-00111 21 21 2CN11 2CL-HV_ANLGXM3A-2521Dsub25P Dsub25PCL-HVVOLT.MON(0: 0V,8000: 25kV)CL-HVVOLT.MON(0: 0V,8000: 25kV)CL-HVVOLT.MON OUTPUT2(0: 0V,8000: 25kV)CL-HVVOLT.MON OUTPUT2(0: 0V,8000: 25kV)CL-HVCURR.MON OUTPUT2(0: 0mA,8000: 150mA)CL-HVCURR.MON OUTPUT2(0: 0mA,8000: 150mA)CL-HVVOLT.MON OUTPUT1(0: 0V,8000: 25kV)CL-HVVOLT.MON OUTPUT1(0: 0V,8000: 25kV)CL-HVCURR.MON OUTPUT1(0: 0mA,8000: 150mA)CL-HVCURR.MON OUTPUT1(0: 0mA,8000: 150mA)CL-HVEp-k.MON(0: 0V,8000: 25kV)CL-HVEp-k.MON(0: 0V,8000: 25kV)CM-CW-FM0Flow rate(0: 0L/min,8000: 200L/min)CM-CW-FM0Flow rate(0: 0L/min,8000: 200L/min)CL-HVCURR.CONT(0: 0mA,8000: 200mA)CL-HVCURR.CONT(0: 0mA,8000: 200mA)CM-PLC1 CM-PLC1CL-HV_ANLG CL-HV_ANLGDsub25PCL-HV_ANLG CL-HV_ANLGDsub25PＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05855PLC1#13(AD4608)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １４A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(113A8)(113A7)(113A4)(113A3)(113A5)(113A6)(113B3)(113B4)(113B5)(113B6)(113A1)(113A2)(113B1)(113B2)CL-OW-PD_TC0-SC-LA_TC1-PM_TCL-OW-PD_TC0-SC-LA_TC1-PM_T(113B7)(113B8)Input1+Input1-Input3+Input3-Input5+Input5-Input7+Input7-Input2+Input2-Input4+Input4-Input6+Input6-Input8+Input8-A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8F*-FL-MFC/F*-SC-MFCXM3A-152114-I-11CL-OW-PD_T14-K-8CL-OW-PD_T14-I-11C0-SC-LA_T14-K-9C0-SC-LA_T14-I-12C1-PM_T14-K-10C1-PM_TF*-FL-MFC/F*-SC-MFCXM3A-1521SignalNX-AD4608CM-PLC1#138ch Analog Voltage Input +/-10V 1/30000I/O PIN NoCL-OW-PTC0-SC-LAC0-SB-OM5 6XM2Z-0011,C0-SC-PSHigh SpeedHigh Voltage AMP5 6C1-PM_2C1-PMPower MeterVEGA＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresC0-SC-LA_PC0-SB-OM_PC0-SC-PS_PCL-OW-PT_PBNCBNCBNCBNCBNCOutput Monitor＋CO2 Differentialamplifier(×10)5 MFC-1(OUT)6 MFC1-COM(OUT)F*-FL-MFC(*:A,U or B)CH3OHVaporizerLSC-7900-00004(＊1)F*-FL-MFC/F*-SC-MFC(*:A,U or B)Lock-inAmp BOXCL-OW-PD_PBNCPiezo Driver BOX55C600-DIA-0001Piezo Driver BOXCL-OW-PDBNCCL-OW-PD_1CL-OW-PD_1BNCCL-OSCO2OscilloscopeC0-SC-LA_1BNCCL-SC-LA_1C1-PM_PBNCC1-PM_2BNCDC offset V.Monitor(0: 0kV,15000:10000V)C0-SB-OMTBD(0:0V,15000: 10V)C0-SB-OMTBD(0:0V,15000: 10V)C0-SC-LAIntensity(0:0V,15000: 10V)C1-PMPower(0:0 W,15000: 300W)CL-OW-PDOutput voltagemonitor(0: 0V15000: 150V)CL-OW-PDOutput voltagemonitor(0: 0V15000: 150V)CL-OW-PTPZT POT(0: 0V,15000:10V)CL-OW-PTPZT POT(0: 0V,15000:10V)C0-SC-LAIntensity(0:0V,15000: 10V)C1-PMPower(0:0 W,15000: 300W)F*-FL-MFCFLOW PV(0: 0, 7500:100%F.S=10sccm)F*-FL-MFCFLOW PV(0: 0, 7500:100%F.S=10sccm)F*-SC-MFCFLOW PV(0: 0, 7500:100%F.S= 10sccm)F*-SC-MFCFLOW PV(0: 0, 7500:100%F.S= 10sccm)XM2Z-0011,7 8F*-FL-MFC/F*-SC-MFC(*:A,U or B)7 8EXT MFC (DC0～5V)7 MFC-2(OUT)8 MFC2-COM(OUT)F*-SC-MFC(*:A,U or B)EXT MFC (DC0～5V)CM-PLC1BNCBNCDsub15PDsub15PC0-SC-PSDC offset V.Monitor(0: 0kV,15000:10000V)C0-SC-PS＊1：This is a temporary model for the prototype machineＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05856PLC1#14／15(DA3605／TS3204)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １５A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(114A4)(114A1)(114A3)(114B1)(115A7)(115B8)(115B7)(115A7)(115B7)(115B8)(114A6)(114B3)V1+IOVIOGA1A2A3A4A5A6B1B2B3B4B5B6F*-FL-MFC/F*-SC-MFCXM3A-1521F*-FL-MFC/F*-SC-MFCXM3A-1521RTD2-ANCRTD2-BRTD2-BRTD1-ANCRTD1-BRTD1-BRTD4-ANCRTD4-BRTD4-BRTD3-ANCRTD3-BRTD3-BA5A6B5B6A7A8B7B8C5C6D5D6C7C8D7D81 2 3V2+IOVIOGV3+IOVIOGV4+IOVIOGCM-CW-TS0_PXM3A-0921B7B8A7A8SignalNX-DA3605CM-PLC1#144ch Analog Voltage Output +/-10V 1/30000I/O PIN NoXM2Z-0011,XM2Z-0011,1 2 3 41 2 3 4CL-OW-PD＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresEXT MFC (DC0.1～5V)EXT MFC (DC0.1～5V)1 MFC-1(IN)2 MFC1-COM(IN)3 MFC-2(IN)4 MFC2-COM(IN)F*-FL-MFC(*:A,U or B)F*-SC-MFC(*:A,U or B)CH3OHVaporizerLSC-7900-00004(＊1)F*-FL-MFC/F*-SC-MFC(*:A,U or B)Piezo Driver BOXCL-OW-PD_Ain PBNC55C600-DIA-00014ch RTD InputI/OCM-PLC1#15NX-TS3204PIN No. SignalCM-CW-TS01 2 3CM-CW-TS0_P1 2 31 2 3CM-CW-TS0_1MATEN3PCM-CW-TS0RTDCM-CW-TS0CM-CW-TS0CM-PLC1 CM-PLC1Dsub15PDsub15PF*-FL-MFC/F*-SC-MFC(*:A,U or B)XM2Z-0011 CM-CW-TS0_PCL-OW-PDPZTControl V(0: 0V,15000:150V)CL-OW-PDPZT Control V(0: 0V,15000:150V)F*-SC-MFCFLOW SV(0: 0, 7500:100%F.S= 10sccm)F*-SC-MFCFLOW SV(0: 0, 7500:100%F.S= 10sccm)F*-FL-MFCFLOW SV(0: 0, 7500:100%F.S= 10sccm)F*-FL-MFCFLOW SV(0: 0, 7500:100%F.S= 10sccm)＊1：This is a temporary model for the prototype machineＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05837PLC2 AC100V Circuit DiagramＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １６A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(Y1)(204-206)(204-205)(206-5) (206-5)(205-7) (205-7)(Y1)(203-4)(203-4)(202-6) (202-6)(201-203)(201-202)(Y1)(X1)(X1)(205-7)(206-5)(X1)(X1)(X1)(202-6)(203-4)(X1)(X1)(E)RY20416-R-3RY20116-D-4RY20616-R-7RY20516-S-4RY20316-G-7RY20216-E-4C2C3R2R3CRC0C1R0R1RY204RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ3814727RY201RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ3814727RY205RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ3814727RY206RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ3814727RY202RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ3814727RY203RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ381472722-N-3(205A1)22-N-4(205A3)22-N-5(205A5)22-N-6(205A7)22-N-7(205B1)22-N-8(205B3)22-N-9(205B5)22-N-10(205B7)23-N-3(207A1)23-N-3(207A2)23-N-7(207B1)23-N-7(207B2)17-C-2(X1)17-C-2(Y1)1 2 3AC100VNR-203-RM5-E-15X1(B)5-E-15Y1(B)5-F-15E(B)E1 2 3AC100V(F)NR-203-PFRD BLＭWHCapacitorRD BLＭWHCapacitor(Insert/CCW) (Insert/CCW)(Remove/CW)(Remove/CW)(Change Dir)(Change Dir)CR circuit module(VCS02)C1-PM-MCO2 LaserMovable Mirror4AP-03864-BC1-VL-M2CO2 LaserMovable Mirror3AP-05403-B1 2 3C1-PM-M MOT_P MOLEX3PIN1 2 3C1-PM-M MOT_1MOLEX3PIN C1-VL-M2 MOT_PC1-VL-M2 MOT_11 12 23 3＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1015 Y AWG18" for the electric wires＊：AC100V wiring is branched from the terminal block (TBAC100V)＊：Use "UL1015 GN AWG18" for the Earth(E) wires(Remove/CW)(Change Dir)(Insert/CCW)(Change Dir)(Remove/CW)(Insert/CCW)CM-PLC2to PLC2#7to PLC2#7to PLC2#5to PLC2#5to PLC2#5to PLC2#5 to PLC2#5to PLC2#5to PLC2#5to PLC2#5to PLC2#7to PLC2#7ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05838PLC2 DC12V Circuit DiagramＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １７A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(209-8) (209-8)(210-9) (210-9)(P12)(P12)(P12)(N12)(N12)(N12)(209-211) (209-211)(210-211) (210-211)(211-2)(N12) (N12)(N12)(N12)(P12)(P12)(211-1)(210-207)(209-208)(X1)(Y1)Ｌ Ｎ＋ －Ｆ．Ｇ．AVR12VS8VK-G01512RY21117-E-7RY211RIF-1-RPT-LDP-24DC/2X21PHOENIX CONTACTZ3814738RY209RY210RY21117-E-7FL-ST_PHD-15SSERY208RY20721-D-6(202A7)21-D-6(202A8)21-D-10(202B7)21-D-10(202B8)22-E-5(204A5)22-E-6(204A7)16-Q-2(X1)16-Q-2(Y1)ZNR1ERZV07D180FL-STLaserbeamshutter990-09071 2 7 8 91 2 7 8 9M+ -SW2(DOWN)SW1(UP)(DOWN)(UP)(UP)(DOWN) (UP)(DOWN)(DOWN)(UP)XM2S-0913＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the DC wires＊：DC12V wiring is branched from the terminal block (TBDC12V)RY207G2RV-SR500 DC12VOMRONZ3813744RY208G2RV-SR500 DC12VOMRONZ3813744RY209G2RV-SR500 DC12VOMRONZ3813744RY210G2RV-SR500 DC12VOMRONZ3813744＊：Use "UL1007 GN AWG18" for the DC Earth(E) wires＊：Use "UL1015 GN AWG18" for the AC100V Earth(E) wires＊：Use "UL1015 Y AWG18" for the AC100V wiresCM-PLC2to PLC2#4to PLC2#4to PLC2#2to PLC2#2to PLC2#2to PLC2#2ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05839PLC2 DC24V Circuit DiagramＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. １８A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(P24-1)(N24-1)(212-1) (212-1)(N24-1)(P24-1)(213-1) (213-1)(N24-1)(P24-1)(E)(P24-1)(N24-1)(P24-1)(N24-1)(P24-1)(N24-1)(P24-1)(N24-1)(WL-4) (WL-4)(WL-3) (WL-3)(202A5)(202A6)(WL-4)(WL-3)(WL-2)(WL-2) (WL-2)(P24-1)(N24-1)RY21218-E-4RY21318-F-5RY212RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ3814727RY213RIF-0-RPT-24DC/21/2903370PHOENIX CONTACTZ381472722-E-3(204A1)22-E-4(204A3)22-E-7(204B1)22-E-8(204B3)1 2 3DC24VSRCN2A13-3P19-C-2(P24-1)19-C-2(N24-1)E1 2 3DC24V(F)SRCN6A13-3P5-V-15P24-1(A)5-V-15N24-1(B)5-V-15E(C)1 2 3 4 5CL_HE-MFC_PW1 2 3 4 5CL_NC-MFC_PW1 2 3 4 5FL_HE-MFC_PW1 2CM-TH_PWCM-WLK7L-UB21-D-5(202A5)21-D-5(202A6)CM-WLF03-20CM-WLF03-16PE-20MCM-WLF03-20CM-WLF03-16PE-20M＋ － ＋ －SV SV1 2CL-NC-AV_P1 2CL-NC-AV_11 2CL-HE-AV_P1 2CL-HE-AV_1MATEN2P MATEN2PCL-NC-AV3Port SolenoidValveSYJ314-5GZD-QCL-HE-AV3Port SolenoidValveSYJ314-5GZD-Q＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wires＊：Unconnected wires must be insulatedV+N.CPower CommonN.CN.CCL-NC-MFCSEC-N117MGM,CS5,,MR.MG-06,5SLM,4CRL,N2,FL-HE-MFCSEC-N117MGM,CS5,,MR.MG-R01,10SCCM,4CRL,He,V+N.CPower CommonN.CN.CV+N.CPower CommonN.CN.CCL-HE-MFCSEC-N127MGM,CS5,,MR.MG-07,15SLM,4CRL,He,＊：DC24V power wiring is branched from the terminal block (TBDC24V2)V+V-CM-THZN-THX21-SOMRONDC terminalCN24-211 2CN24-211 2MATEN2PZN9-ED01-SP2RF-08-PU(Socket)OMRON8Water leaksensor41 3 5 6OMRON4 3OMRON＊：Use "UL1007 GN AWG22" for the Earth(E) wiresOMRON4 3OMRON222Water CoolingManiforld TrayCM-PLC2to PLC2#4to PLC2#4to PLC2#4to PLC2#4LasertableUndere the Laser table Undere the Laser table Undere the Laser table Laser tableCM-WL_CABLE1CM-WL_CABLE2ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05840PLC2 DC15V Circuit DiagramＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １1SH No. １９A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314to PLC2#9to PLC2#8 to PLC2#9 to PLC2#8 (P15)(N15)(P24-1)(N24-1)(P15)(N15)(COM)(COM)(209A1)(209A3)(P15)(COM)(N15)(209B1)(208A7)(209B3)(208B5)(208B6)(208A8)E1 2 3 4 5 6 7 8 925-F-3(209A3)1 2 3 4 5 6 7 8 9E E18-S-2(P24-1)18-S-2(N24-1)21-E-2(P24-1)21-F-2(N24-1)25-F-3(209A1)25-F-7(209B1)25-F-7(209B3)24-F-9(208B5)24-F-9(208B6)24-F-6(208A8)24-F-6(208A7)20-B-2(P24-1)20-B-2(N24-1)1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9C0-MG-PVPiezoValvePV-A131-1/4"VCRFL-MG-PVPiezoValvePV-A131-1/4"VCRAperture PV(0～5V)Power(+15VDC,50mA)Power COMPower(-15VDC,50mA)Aperture PV COMAperture SV(0～5V)Aperture SV COMForced Open(+15VDC)Forced Open(+15VDC)Aperture PV(0～5V)Power(+15VDC,50mA)Power COMPower(-15VDC,50mA)Aperture PV COMAperture SV(0～5V)Aperture SV COMC0-MG-PV_PDsub9PFL-MG-PV_PDsub9P＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wires+V-VV＋V－GRAVR15VS82S-7728INPUT0OUTPUT＊：DC24V power wiring is branched from the terminal block (TBDC24V2)＊：DC15V power wiring is branched from the terminal block (TBDC15V)＊：Use "UL1007 Y AWG18" for the Earth(E) wiresCM-PLC2126/Jan/2023Circuit change. S.Nishi Maezeki1ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05867PLC2#0(DC24V)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ２０A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(P24-1)(P24-1)(N24-1)(N24-1)(P24-1)(N24-1)E EA1B1A3B3A5B5A7B7E19-P-3(P24-1)19-P-3(N24-1)Unit POWERDC24VUnit POWERDC24VUnit POWER0VUnit POWER0VI/OPOWERDC24VI/OPOWER0VNX-ECC203CM-PLC2#0EtherCAT Slave CouplerPIN No＊：Use "UL1007 BL AWG22" for the electric wires＊：DC24V power wiring is branched from the terminal block (TBDC24V2)＊：Use "UL1007 Y AWG18" for the Earth(E) wiresCM-PLC2ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05841PLC2#2／3(SID800／SID800)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １1SH No. ２１A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(202A5)(202A7)(202B6)(202B5)(202B7)(202B8)(202A8)(203A1)(203A1)(203A1)(203B1)(203A2)(203B3)(203A2)(203B1)(203A5)(203B2)(203A7)(203B7)(203A3)(202A6)(203B4)(203B5)(203A3)(203B2)(203A7)(203B3)(203B1)(203A2)(203A3)(203B3)(203A5)(203A5)(203B2)(203A7)(203B4) (203B4)(203B5)(203B7)(203B7)(203B5)(P24-1)(N24-1)(202A1)(202A1)(202B1)(202B1)A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8Si0T0Si2T0Si4T0Si6T0Si1T1Si3T1Si5T1Si7T1Si0T0Si2T0Si4T0Si6T0Si1T1Si3T1Si5T1Si7T117-F-4(202A7)17-F-5(202A8)17-G-4(202B7)17-G-5(202B8)18-S-6(202A5)18-S-6(202A6)1 2 3 4 5 6CL-HE-PG_P1 2 3 4 5 6CL-HE-PGT1 2 3 4 5 6CL-NC-PGT1 2 3 4 5 6CL-NC-PG_P21-F-5(202B1)21-E-7(202B1)19-R-2(P24-1)19-R-2(N24-1)SignalNX-SID800CM-PLC2#28ch Safety InputI/O PIN No. SignalNX-SID800CM-PLC2#38ch Safety InputI/O PIN NoCM-WLWaterLeakageDetectorC1-PM-MMirrorInsertedN.OFL-STFL ShutterOpened LSWC1-CV-SWCover switchSS-5GL2MATEN2PC1-PM-M Inserted LSWC1-PM-M Removed LSWCO2 LaserMovableMirrorSS-5GL2C1-VL-M2 Inserted LSWC1-VL-M2 Removed LSWCO2 LaserMovableMirrorSS-5GL2C1-VL-M2 Inserted iLSWCO2 LaserMovableMirrorSS-5GL2＊：Crimp the wire ends with DIN 46228-4 ferrule1 2 3 4 5 6C1-PM-M LSW_PMATEN6P1 2 3 4C1-VL-M2 LSW_PMATEN4P1 2 3C1-VL-M2 iLSW_PMATEN3P1 2 3 4 5 6C1-PM-M LSW11 2 3 4C1-VL-M2 LSW11 2 3C1-VL-M2 iLSW1C1-CV-SW_P C1-CV-SW_1＊：Use "UL1007 BL AWG22" for the electric wires(NC)(NC)(NC)(NC)C1-PM-MMirrorCOMC1-VL-M2MirrorInsertedN.O(NC)C1-PM-MMirrorRemovedN.OC1-PM-MMirrorInsertedN.CC1-PM-MMirrorRemovedN.CC1-VL-M2MirrorInsertedN.CC1-VL-M2MirrorRemovedN.OC1-VL-M2MirrorRemovedN.CC1-VL-M2MirrorCOMC1-VL-M2MirrorInsertedCOMCM-WLWaterLeakageDetectorFL-STFL ShutterOpened LSWC1-CV-SWC1 CoverStatusC1-CV-SWC1 CoverStatusFL-STFL ShutterClosed LSWFL-STFL ShutterClosed LSW[RY207]CM-PLC2 CM-PLC2[RY208]MATEN6POUT1OUT2DC(+)DC(-)analog outputISE20C-T-M-B2-Wmain circuitPressure GaugeCL-HE-PGPressure GaugeCL-NC-PGOUT1OUT2DC(+)DC(-)ISE20C-T-M-B2-WMATEN6P111 1CL-HE-PGPressureGauge126/Jan/2023Added pressure gauge1main circuitanalog outputCL-NC-PGPressureGaugeBRNBLUBLKWHTGRYBRNBLUBLKWHTGRYＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05842PLC2#4／5(S0D400／S0D400)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ２２A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(204A5)(204A7)(205A1)(205A3)(205A5)(205A7)(205B1)(205B3)(205B5)(205B7)(204A1)(204A3)(204B1)(204B3)A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8So0IOGSo2IOGSo1IOGSo3IOGSo0IOGSo2IOGSo1IOGSo3IOG17-E-7(204A5)17-E-7(204A7)16-G-6(205A1)16-G-7(205A3)16-R-6(205A5)16-R-7(205A7)16-E-4(205B1)16-E-5(205B3)16-S-4(205B5)16-S-5(205B7)18-E-3(204A1)18-E-4(204A3)18-F-5(204B1)18-F-6(204B3)SignalNX-SOD400CM-PLC2#44ch Safety OutputI/O PIN No. SignalNX-SOD400CM-PLC2#54ch Safety OutputI/O PIN No＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresC1-PM-MMirrorInsertEnableC1-PM-MMirrorInsertEnableC1-VL-M2MirrorInsertEnableC1-VL-M2MirrorInsertEnableC1-PM-MMirrorPull-outEnableC1-PM-MMirrorPull-outEnableC1-VL-M2MirrorPull-outEnableC1-VL-M2MirrorPull-outEnableFL-STFL ShutterOPEN/CLOSEFL-STFL ShutterOPEN/CLOSECL-NC-AVSTVOPEN/CLOSECL-NC-AVSTVOPEN/CLOSECL-HE-AVSTVOPEN/CLOSECL-HE-AVSTVOPEN/CLOSE[RY203]CM-PLC2 CM-PLC2[RY206][RY202][RY205][RY212][RY211][RY213]ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05843PLC2#6／7(ID4442／OD4256)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ２３A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(207A1)(207A2)(207B1)(207B2)IN0IOV0IN2IOV2IN4IOV4IN6IOV6IN1IOV1IN3IOV3IN5IOV5IN7IOV7A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B8OUT0IOG0OUT2IOG2OUT4IOG4OUT6IOG6OUT1IOG1OUT3IOG3OUT5IOG5OUT7IOG7A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B816-D-4(207A1)16-D-4(207A2)16-R-2(207B1)16-R-3(207B2)SignalNX-ID4442CM-PLC2#68ch Digital Input (PNP)I/O PIN No. SignalNX-OD4256CM-PLC2#78ch Digital Output (PNP)I/O PIN No＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresC1-PM-MChangeDirectionC1-PM-MChangeDirectionC1-VL-M2ChangeDirectionC1-VL-M2ChangeDirectionCM-PLC2 CM-PLC2[RY201][RY204]ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05844PLC2#8(NX-AD4608)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ２４A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(208B4)(208B3)(208A3)(208A4)(208B1)(208B2)(208A5)(208A6)(208A1)(208A2)(208B5)(208B6)(208A7)(208A8)Input1+Input1-Input3+Input3-Input5+Input5-Input7+Input7-Input2+Input2-Input4+Input4-Input6+Input6-Input8+Input8-A1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B819-H-5(208B5)19-I-5(208B6)19-M-5(208A8)19-L-5(208A7)CL-GT1-PDCL-GT2-PDC0-PMFL-PMFL-OM-CBPower meterVEGAPower meterVEGACO2 LaserPhoto DetectorPDF10A/M＋SML30CCO2 LaserPhoto DetectorPDF10A/M＋SML30CFIR StageControllerFL-OM-CBCL-GT1-PD_PFL-OM-CB_PCL-GT2-PD_PC0-PM_PFL-PM_PFL-MG-PV8ch Analog Voltage Input +/-10V 1/30000I/OCM-PLC2#8PIN No. SignalNX-AD4608Piezo ValvePV 0～5VPV-A131-1/4"VCRC0-MG-PVPiezo ValvePV 0～5VPV-A131-1/4"VCRBNCBNCBNC＊：Crimp the wire ends with DIN 46228-4 ferruleCM-PLC2CL-GT1-PDIntensity(0:0mV,15000:10000mV)CL-GT1-PDIntensity(0:0mV,15000:10000mV)C0-PMPower(0:0 W,15000: 300W)C0-PMPower(0:0 W,15000: 300W)FL-OM-CBMonitor Voltage(0: 0V,15000:10V)FL-OM-CBMonitor Voltage(0: 0V,15000:10V)FL-MG-PVAperture PV(0: 0%7500: 100%)FL-MG-PVAperture PV(0: 0%7500: 100%)CL-GT2-PDIntensity(0:0mV,15000:10000mV)CL-GT2-PDIntensity(0:0mV,15000:10000mV)FL-PMPower(0:0 W,15000: 300W)FL-PMPower(0:0 W,15000: 300W)C0-MG-PVAperture PV(0: 0%7500: 100%)C0-MG-PVAperture PV(0: 0%7500: 100%)ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．3AP-05845PLC2#9(DA3605)ＤＣＸＤＲｅｆ：EG-Z009R2５ ４ ３ ２ １0SH No. ２５A B C D E F G H I J K L M N O P Q R S T1 2 3 4 5 6 7 8 91011121314(209A1)(209A3)(209B1)(209B3)V1+IOVIOGV3+IOVIOGV2+IOVIOGV4+IOVIOGA1A2A3A4A5A6A7A8B1B2B3B4B5B6B7B819-I-5(209A3)19-I-5(209A1)19-M-5(209B1)19-M-5(209B3)SignalNX-DA3605CM-PLC2#94ch Analog Voltage Output +/-10V 1/30000I/O PIN No＊：Crimp the wire ends with DIN 46228-4 ferrule＊：Use "UL1007 BL AWG22" for the electric wiresC0-MG-PVFL-MG-PVPiezo ValveSV 0～5VPV-A131-1/4"VCRPiezo ValveSV 0～5VPV-A131-1/4"VCRCM-PLC2C0-MG-PVAperture SV(0: 0%7500: 100%)C0-MG-PVAperture SV(0: 0%7500: 100%)FL-MG-PVAperture SV(0: 0%7500: 100%)FL-MG-PVAperture SV(0: 0%7500: 100%)APPENDIX VIII : Control Cabinet DiagramEG-Z010R1Ｒｅｆ：５ ４ ３ ２ １ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．Control cabinet(CM-CC1)2AI-00414SH No0２６ＤＣＸＤPLC#1 Connector patch panelCM-EPEthernet Patch PanelNR21326B(Panasonic)Side Panel(Blue)CM-PLC1 Connector patch panel3AI-01706-A(CM-EI)External Interlock ConnectorRack mount kitRack mount kitC0-SC-PSRack:RE57E-19-800_With base(HUMAN)CNREF INPUTPOWERINPUT OUTPUTAC INBLK1PL1BL2 BL1INPUT A0102030405060708090091POT2MONITOR OUTPUTE９１CL-MG-VP_Cont９１C1-ST_PCL-HV_ANLGF*-FL-AV/F*-SC-AV１９CM-CW-TS0_P１９FL-MG-VP_Cont９１CM-EI_PCL-HV_IOF*-FL-MFC/F*-SC-MFCCM-CW-FM0_P１９CL-HV_EXTCPU SF IOPW ID1 PD1 AD1 DA1 SID1 SID2 SOD1 SOD2 OD1 OD2 AD2 DA2 CPU END1E1 E2 E3 E4 E5TS1TBP24-1TBP24-2TBP24-3 TBN24-1TBN24-2 TBP5-1 TBP5-2 TBN5-1 TBN5-2 TBG-1 TBG-2 TBG-3 TBG-4 TBG-5ST2RY102 RY103(８００) (５７０)(２２５４)２００ (２００３)A-A SectionPoPola Control Rack0UB BCM-MD1OscilloscopeMonitor22MN430M-BAJP/LGMONITOR5U9 8 7 6 5 4 3 2 1CAT624 23 22 21 20 19 18 17 16 15 14 13 12 11 10Tektronix3 SERIES MIXED DOMAIN OSCILLOSCOPEFL-OSFIR OscilloscopeMDO34 3-BW-100Tektronix10UTektronix3 SERIES MIXED DOMAIN OSCILLOSCOPE15UCL-OSCO2 OscilloscopeMDO34 3-BW-100Tektronix20UC0-SB-OMOutput Monitor＋CO2 Differentialamplifier(×10) GIGALSC01C1-STLaserBaemShutterControllerLSC01/Thorlabs25UC0-SC-LALock-in Amp BOX:3AI-01708-A(LIA-MV-150-S/Femto)AC230VPOTCL-OW-PDCL-OW-PTPiezo driver BOX:3AI-01709-AM-2501-1/Messtec30UCM-PLC13AI-01704-A35U40UC0-SC-PSHighSpeedHighVoltage AMPHAP-10B10/MATSUSADAOFFONINPUT OUTPUTREFLIA-MV-150-S POWERINPUTPIEZO DRIVERPOWERLOCAL OUTPUT OVER TEMPMANUALOUT SW１：１０ScaleRear view Side view front viewRM3(Tektronix)RM3(Tektronix)Dsub9pin(XM3D-0921)C0-SC-PSHighSpeedHighVoltage AMPHAP-10B10/MATSUSADACM-CC1AD-8626C0-SC-WGOscillator(SineWaveGenerator)AD8626/A&DA AEG-Z010R1Ｒｅｆ：５ ４ ３ ２ １ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．Control cabinet PSU(CM-CC2)2AI-00516SH No0２７ＤＣＸＤTransformer:TRP7.5K-42YTransformer:TRP1K-41SRack:RE57E-19-800_With base(HUMAN)Transformer:TRP7.5K-42YTransformer:TRP1K-41STransformer plateF1PL1PBL1F2PBL2F3F1PL1PBL1F2PBL2F3BOX(８００) (５７０)7U 15U(２２５４)4U 7U(２００)(１４５０)3U 4U 2UA-A SectionA APSU0U5U10UCM-TPTouch PanelNA5-15W101S-V1OMRON15U20U25U30UBreaker UNIT2AI-00415-ATOYAMA35U(Height of popola laser device)Brank Panel (4U)40UCM-PS-BBMONITORCM-MD2OscilloscopeMonitor22MN430M-BAJP/LGＲＥＳＥＴＵＮＬＯＣＫＥＭＥＲＧＥＭＣＹＳＴＯＰCM-PBPanic ButtonTOYAMACL-MG-VS FL-MG-VSRP SWBOX RP SWBOX3AI-01382-A 3AI-01382-ATOYAMA TOYAMABrank Panel (2U)Scale１：１０CM-TR1(OUT:3φ200V)CM-TR2(OUT:1φ100V)Side view front view Rear viewCM-CC24-11X22CM-TR2(OUT:1φ100V)CM-TR1(OUT:3φ200V)ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹScaleＴＩＴＬＥＤＷＧ Ｎｏ．3AI-01704PLC UNIT(CM-PLC1)ＤＣＸＤＲｅｆ：EG-Z010R1５ ４ ３ ２ １01:4SH No. ２８Wiring port×2Earth bar:EBA-25-20ECM-PLC1 Unit configuration＊1Control relay configuration＊2CPU SF IOPW ID1 PD1 AD1 DA1９１CL-MG-VP_Cont９１C1-ST_PCL-HV_ANLGE1 E2 E3 E4 E5RY101TBP24-1 TBP24-2 TBP24-3 TBN24-1 TBN24-2 TBP5-1 TBP5-2 TBN5-1 TBN5-2 TBG-1 TBG-2 TBG-3 TBG-4 TBG-5ST2SID1 SID2 SOD1 OD1 OD2 AD2 DA2 CPU END1１９CL-HV_EXT９１CM-EI_PF*-FL-AV/F*-SC-AVF*-FL-MFC/F*-SC-MFCESOD2TS1RY102 RY103１９CM-CW-TS0_P９１FL-MG-VP_ContCL-HV_IO１９CM-CW-FM0_P４３０ (２６．３) (２６．３)(１７７)(４８２．６)(３７．７) (１０１．６) (３７．７)(５０)(１３０)(２８．５)(２０)(１８０) (５７)(３５０)Top viewTBDC24V1TBDC5VTBEarthWiring Duct W40×H80 Wiring Duct W40×H60Front view Rear view Side view＊:This unit is mounted the PoPola control rack. (2AI-00414)NX102-9000NX-SL3300NX-PF0630NX-SID800NX-SID800NX-SOD400NX-ID4442NX-OD4256NX-OD4256NX-PD1000NX-AD4204NX-DA2203NX-AD4608＊1：CM-PLC1 Unit configurationCM-PLC1#0NX-DA3605NX-END02NX-SOD400NX-TS3204RY101RY101RY102RY103＊2：Control relay configurationCM-PLC1#1CM-PLC1#2CM-PLC1#3CM-PLC1#4CM-PLC1#5CM-PLC1#6CM-PLC1#7CM-PLC1#8CM-PLC1#9CM-PLC1#10CM-PLC1#11CM-PLC1#12CM-PLC1#13CM-PLC1#14CM-PLC1#15CM-PLC1#16RIF-0-RPT-24DCG3TA-IDZR02S DC5-24G3TA-IDZR02S DC5-24Parts number Relay NoParts number PLC Unit NoPLC1#0PLC1#1PLC1#2PLC1#3PLC1#4PLC1#5PLC1#6PLC1#7PLC1#8PLC1#9PLC1#10PLC1#11PLC1#12PLC1#13PLC1#14PLC1#15PLC1#16RY102RY103ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹScaleＴＩＴＬＥＤＷＧ Ｎｏ．3AI-01713PLC UNIT(CM-PLC2)ＤＣＸＤＲｅｆ：EG-Z010R1５ ４ ３ ２ １01:4SH No. ２９CM-PLC2 Unit configuration＊1Control relay configuration＊2Connector PanelCR circuit module＊2E1 E2 TBP24-1TBP24-2 TBP24-3 TBP24-4 TBN24-1 TBN24-2TBN24-3 TBN24-4 E3 E4 TBP12-1 TBP12-2 TBP12-3 TBN12-1 TBN12-2TBN12-3 E5 E6 E7 TBP15-1TBP15-2 TBN15-1 TBN15-2 TBCOM1 TBCOM2AVR15VE1X-11X-12X-13X-14Y-11E2ST1 ST2AVR12VRS232C ID1ST3RY201RY202RY203RY204RY205RY206ST4EATC SID1 SID2 SOD1 SOD2 OD1 AD1DA1END1EtherCATCM-TH_LAN_1DC24VAC100VC1-ST_PST1RY212RY213RY211RY207RY208RY209RY210FL-DT-AM_1 CL-OW-PZ_1 C0-SC-DT_1 C0-SB-DT_1CM-WLCM-WLK7LP2RFY-12(４３０) (３０) (３０)(２２０)(４９０)(４６０)(５０) (２５) (４５) (１００)(１５)(７０)(２０)(３２．３) (２９０)(３６０)(１５) (３６０)(２０２)TBDC24V2TBDC12VTBDC15VTBEarthCM-WLTBAC100VTop viewFront view Side view＊:This unit is mounted under the PoPola laser table. (Mechanical drawing)Cable DuctCable DuctCable DuctA Section Front viewParts numberParts numberRIF-0-RPT-24DCPLC Unit NoCM-PLC2#0Relay NoRY201＊1：CM-PLC2 Unit configuration＊2：Control relay configurationCM-PLC2#1CM-PLC2#2CM-PLC2#3CM-PLC2#4CM-PLC2#5CM-PLC2#6CM-PLC2#7CM-PLC2#8CM-PLC2#9CM-PLC2#10NX-ECC203NX-CIF210NX-SID800NX-SID800NX-SOD400NX-SOD400NX-ID4442NX-OD4256NX-AD4608NX-DA3605NX-END02RY202RY203RY204RY205RY206RY207RY208RY209RY210RY211RY212RY213RIF-0-RPT-24DCRIF-0-RPT-24DCRIF-0-RPT-24DCRIF-0-RPT-24DCRIF-0-RPT-24DCRIF-1-RPT-LDP-24DCG2RV-SR500 DC12VG2RV-SR500 DC12VG2RV-SR500 DC12VG2RV-SR500 DC12VRIF-0-RPT-24DCRIF-0-RPT-24DCRY201RY202RY203RY204RY205RY206RY207RY208RY209RY210RY211RY212RY213CRVCS02PLC2#0PLC2#1PLC2#2PLC2#3PLC2#4PLC2#5PLC2#6PLC2#7PLC2#8PLC2#9PLC2#103AI-01707-ATBCM-WLCM-WLA AEG-Z010R1Ｒｅｆ：５ ４ ３ ２ １ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．Breaker UNIT(CM-PS-BB)2AI-00415SH No0３０ＤＣＸＤDC Wire HoleAC Wire Hole AWaste heat hole３－φ６３－φ６BOX:FSA-430-671-200-K-TLAC Wire Hole BDC Wire HoleAC Wire Hole AAC Wire Hole BEarth bar:EBA-25-20E4-φ30LAN HUB(CM-SH):W4S1-05DAVR24AVR5BNE4TB1-01BNE1TB05TB01 TB02 TB03 TB04TB05BOXONCP3TB2-01TBE2TBE1ONCP2ELCB1ONCP4MCCB2MCCB1TB1-02 TB1-03 TB1-04 TB1-05 TB1-06 TB1-07 TB1-08 TB1-09 TB1-10 TB1-11 TB1-12 TB1-13 TB1-14 TB1-15 TB1-16 TB1-17 TB1-18 TB1-19 TB1-20 TB1-21 TB1-22TB2-02 TB2-03 TB2-04 TB2-05 TB2-06ONCP5ONCP6ONCP1ELCB2 ELCB3EName PlateNFMCCB3TB2-01TBE2TB2-02 TB2-03TBE1BNE4TB1-01 TB1-02 TB1-03 TB1-04 TB1-05 TB1-06 TB1-07BNE4BNE4BNE4(４８２．５)(４３０)(６７１．２)(１７９)(６０) (２００) (４６０)(４４)(４０) (２９５．６) (２９５．６)Ｒ３０８５８５Ｒ３０２００６５Ｒ３０２５０(６０) ３１０ ６０２００AC-DuctDC-DuctBack sideDC-DuctAC-DuctAC-DuctFlexible bushDC-DuctTB1(AC230V-OUT)TB0(3φ400V-IN)Front sideBack side arrangementTB2(DC24V)AC-DuctAC-DuctFront side internal arrangementScale１：５DC-DuctDC-DuctAC-DuctAC-DuctFlexible bushDC-DuctFlexible bushFlexible bush3Φ200VTR1OUT CM-HV1Φ100VTR2OUT 100VPW3φ400VTR1IN1φ400VTR2IN3φ400VAVR24AC230VPoPolaRackAC230VCL-MG-VPAC230VFL-MG-VPAC230VPoPola3φ400VMAINDC24V DC5V＊:This box is mounted the PSU rack. (2AI-00516)AC-DuctTB3(DC5V)TB4(TR1OUT)TB5(TR2OUT)Flexible bushFlexible bushAPPENDIX IX : Terminal Block DiagramＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹScaleＴＩＴＬＥＤＷＧ Ｎｏ．3AI-01707Connector PanelＤＣＸＤＲｅｆ：EG-Z011R1５ ４ ３ ２ １01:3SH No. ３１Connector PanelEtherCATCM-TH_LAN_1FL-DT-AM_1 CL-OW-PZ_1 C0-SC-DT_1 C0-SB-DT_1DC24VAC100VC1-ST_P(４００) (４５) (４５)(４９０)(４６０)(９５)(４５)(１５) (１５)(２５)＊:This panel is mounted under the PoPola laser table. (Mechanical drawing)SPCC P.C(2.5Y9/1)EG-Z011R1Ｒｅｆ：５ ４ ３ ２ １ＲＥＶ ＤＡＴＥ ＭＯＤＩＦＩＣＡＴＩＯＮ ＡＰＰＤ／ＢＹ ＭＯＤ／ＢＹＲＥＬＥＡＳＥＤ ＢＹＴＩＴＬＥＤＷＧ Ｎｏ．HV connector Panel2AI-00420SH No0３２ＤＣＸＤERA3Y430CTL(LEMO)M4M4M4ERA3Y430CTL(LEMO) ERA3Y430CTL(LEMO)34_SHV-50-0-1/133_NEHV Connector Panel(８０)(１８５)(２．３)(１２０)(１２０)(１６８)(４７．５) (４５) (４５)(３５)CL-GT1_1 GND_1 CL-GT2_1 C0-SC_1SHVSHVSHVSHV(HUBER+SUHNER)１：１ScaleSPCC P.C(2.5Y9/1)＊:This panel is mounted under the PoPola laser table. (Mechanical drawing)APPENDIX X : Component List# Equipment # Document # Parts Name Parts Number Manufacturer Notes101 FL 210693DD-EG-Z002 FIR Laser SHINSEIKI102 FL-IW 210693DD-EG-Z002 FIR Laser Input Window Zn-Se,17.78×46.23×2.03 Side1:PO/UC, Side2:PO/UC II-VI Japan103 FL-IM 210693DD-EG-Z002 FIR Laser Input Mirror 19.7NCA-00 / OFFSET-HOLE ULO Optics Copper Mirror,Gold Coated,φ50×6t,φ3 off-set hole104 FL-GT 210693DD-EG-Z002 FIR Glass Tube MEIJO SCIENCE105 FL-OM 210693DD-EG-Z002 FIR Laser Output Mirror Quartz,φ40×2t,119μm: Non-reflective coating Kogakugiken A disk of crystalline quartz crystal polished by Kogakugiken and coated by Japan Laser106 FL-OW 210693DD-EG-Z002 FIR Laser Output Window Quartz,φ45×1.57t Kogakugiken107 CL 210693DD-EG-Z002 CO2 Laser KONDO KO-SHA108 CL-DG 210693DD-EG-Z002 CO2 Laser Diffraction Grating G150ML10.6GHA,25x25x10 Optometrics To use primary light, the grating should be mounted so that the arrow engraved on the grating faces downward109 CL-GT1 210693DD-EG-Z002 CO2 Laser Glass Tube 407-905-01-10.8 MEIJO SCIENCE CL-OW side. Inner diamter: 10.8mm. Length: 1327mm110 CL-GT2 210693DD-EG-Z002 CO2 Laser Glass Tube 407-905-02-10.8 MEIJO SCIENCE CL-DG side. Inner diameter: 10.8mm, Length: 1327mm111 CL-OW 210693DD-EG-Z002 CO2 Laser Output Window ZnSe-M R=20m(凹) OPTTEC 1"Φ×3t、 55% PR/AR112 C0-SC 210693DD-EG-Z002 Stark cell KONDO KO-SHA113 C0-SA-M 210693DD-EG-Z002 MirrorMHAN-50.8S-N＋PF20-03-M01+BRS-20-80+RO-20-60+BSP-70120SIGMAKOKI/Thorlabs114 C0-SB-DT 210693DD-EG-Z002 HgCdTe Photovoltaic DetectorPVMI-10.6 + PPS-03-09(20MHz) + VIP-10-20M-S+RS-12-100+TR100/M-JP+BSP-2460VigoSystem/SIGMAKOKI/Thorlabs115 C0-SA-L 210693DD-EG-Z002 Lens(f=200mm)ALHN-25.4-3RO-N＋LA7228-G+RS4P/M+RS25/M+RS2M+CF125C/MSIGMAKOKI/Thorlabs116 C0-SC-L 210693DD-EG-Z002 Lens(f=1000mm)ALHN-25.4-3RO-N＋LA7753-G+RS4P/M+RS25/M+RS2M+CF125C/MSIGMAKOKI/Thorlabs117 C1-ST 210693DD-EG-Z002 ShutterC-SU＋LSC01+4JG-03344-B+4JG-03358-A+4JG-03359-A+WGLS-50-20-12+SNTBS4-10+HFSU4-12ULO Optics/TOYAMA/MISUMI118 C1-PM-M 210693DD-EG-Z002 Movable Mirror 2AE-00929-A TOYAMA119 C1-PM 210693DD-EG-Z002 Power Meter VEGA/L300W-LP2-50 Ophir120 C0-SC-M 210693DD-EG-Z002 MirrorMHL-50.8S＋PF20-03-M01＋4JG-03343-A+4JG-03344-A+4JG03345-ASIGMAKOKI/Thorlabs/TOYAMA121 C0-SC-DT 210693DD-EG-Z002 HgCdTe Photovoltaic DetectorPVMI-10.6＋PPS-03-15(1MHz)＋ VIP-10-1M-S+RS-12-100+TR100/M-JP+BSP-2460VigoSystem/SIGMAKOKI/Thorlabs122 C0-BS2 210693DD-EG-Z002 Beam Splitter BHAN-50S-N＋BSW720+RS4P/M+RS2M+CF125C/M SIGMAKOKI/Thorlabs123 C0-VL 210693DD-EG-Z002 He-Ne Laser05LHR111+05-LPL911-065+ HCM2/M＋4JG-03340-A＋4JG-03346-A＋4JG-03350-CPacific Lasertec/Thorlabs/TOYAMA124 C1-VL 210693DD-EG-Z002 He-Ne Laser05LHR111+05-LPL911-065+ HCM2/M＋4JG-03340-A＋4JG-03346-A＋4JG-03350-CPacific Lasertec/Thorlabs/TOYAMA125 C0-VL-M1 210693DD-EG-Z002 MirrorMHL-25.4S＋BB1-E02+4JG-03349-A+4JG-03350-B+4JG-03351-ASIGMAKOKI/Thorlabs/TOYAMA126 C1-VL-M1 210693DD-EG-Z002 MirrorMHL-25.4S＋BB1-E02+4JG-03688-A+4JG-03689-A+4JG-03690-ASIGMAKOKI/Thorlabs/TOYAMA127 C1-VL-M2 210693DD-EG-Z002 Movable Mirror 2AE-00928-A TOYAMA128 C0-VL-M2 210693DD-EG-Z002 Movable MirrorMHL-25.4S＋BB1-E02＋TAMC-10161+4JG-03350-E+4JG-03355-A+4JG-03356-A+4JG-03357-ASIGMAKOKI/Thorlabs/TOYAMA129 FL-DT-BS 210693DD-EG-Z002 Beam Splitter SHINSEIKIThe prototype of this item crashes with a moter of FL-OM. When manufacturing the product, this item needs to bemodified to avoid the clash- This item is covered by the procurement of FL130 C1-M1 210693DD-EG-Z002 Water Cooled Mirror(1) NiCu plane mirror, φ38×6t, Au coated. ULO Optics/SHINSEIKI This item is covered by the procurement of FL131 C1-M3 210693DD-EG-Z002 Water Cooled Mirror(3) NiCu plane mirror, φ38×6t, Au coated. ULO Optics/SHINSEIKI This item is covered by the procurement of FL132 C1-M4 210693DD-EG-Z002 Water Cooled Mirror(4) NiCu plane mirror, φ38×6t, Au coated. ULO Optics/SHINSEIKI This item is covered by the procurement of FL133 C1-M2 210693DD-EG-Z002 Water Cooled Mirror(2) NiCu concave mirror, φ38×6t, Au coated. (Curvature radius 2m) ULO Optics/SHINSEIKI This item is covered by the procurement of FL134 C1-BD 210693DD-EG-Z002 Beam DumpBDU25+4JG-03326-A+4JG-03327-A+4JG-03328-A+4JG-03329-AULO Optics/TOYAMA135 FL-VL-M1 210693DD-EG-Z002 MirrorMHL-25.4S＋BB1-E02+4JG-03346-A+4JG-03348-A+4JG-03350-ASIGMAKOKI/Thorlabs/TOYAMA136 FL-VL-M2 210693DD-EG-Z002 MirrorMHL-25.4S＋BB1-E02+4JG-03347-A+4JG-03348-A+4JG-03350-ASIGMAKOKI/Thorlabs/TOYAMA137 FL-VL-M3 210693DD-EG-Z002 MirrorMHL-25.4S＋BB1-E02+4JG-03347-A+4JG-03348-A+4JG-03350-ASIGMAKOKI/Thorlabs/TOYAMA# Equipment # Document # Parts Name Parts Number Manufacturer Notes138 FL-LP 210693DD-EG-Z002 PolarizerSPH-80.5-ARS(Custom-made item)＋GS57203+3JG-02519-A+3JG-02520-A+4JG-03330-A+4JG-03331-A+4JG-03332-ASIGMAKOKI/Specac/TOYAMA139 FL-VL 210693DD-EG-Z002 He-Ne Laser05LHR111+05-LPL911-065+ HCM2/M＋4JG-03340-A＋4JG-03346-A＋4JG-03350-CPacific Lasertec/Thorlabs/TOYAMA140 FL-DT-CP 210693DD-EG-Z002 Optical Chopper MT16842-3001 Machine Techno141 FL-DT-DT 210693DD-EG-Z002 Pyro Detector QS5-L Gentec-EO142 FL-DT-M 210693DD-EG-Z002 Off-Axis Parabolic MirrorMHG-MP50.8-NL＋#37-308+4JG-03689-A+4JG-XXXX1-A+4JG-XXXX2-ASIGMAKOKI/Edmund/TOYAMA143 C0-PM 210693DD-EG-Z002 Power Meter VEGA+2A-BB-9+TR4+PH3T/M+UPHA Ophir /Thorlabs144 C0-BS1 210693DD-EG-Z002 Beam Splitter BHAN-50S-N＋BSW720+RS4P/M+RS2M+CF125C/M SIGMAKOKI/Thorlabs145 C0-SB-L 210693DD-EG-Z002 Lens(f=200mm) LMR1/M＋LA7228-G+PH100E/M+TR75/M-JP+CF125C/M Thorlabs146 FL-ST 210693DD-EG-Z002 FIR Laser Shutter 990-0907 Laser Beam Shutter φ70mm EKSMA Optics147 CL-GT1-PD 210693DD-EG-Z002 CO2 Laser Photo Detector PDF10A/M＋SML30C＋Z9902589 Thorlabs/TOYAMA148 CL-GT2-PD 210693DD-EG-Z002 CO2 Laser Photo Detector PDF10A/M＋SML30C＋Z9902589 Thorlabs/TOYAMA149 FL-PM 210693DD-EG-Z002 Power meter VEGA/3AP-THz Ophir150 C0-SC-GT 210693DD-EG-Z002 Glass Tube for Stark Cell KONDO KO-SHA This item is covered by procurement of C0-SC151 CL-SP 210693DD-EG-Z002 Spiral glass tube KUB-11950 Fujikin152 CL-TT 210693DD-EG-Z002 T-tube 407-905-13 MEIJO SCIENCE T-shaped glass tube between CL-GT1 and CL-GT2153 CL-AN2 210693DD-EG-Z002 Anode (grating side) (See notes) KONDO KO-SHA hole diameter 10 mm. This item is covered by procurement of CL154 CL-AN1 210693DD-EG-Z002 Anode (output window side) (See notes) KONDO KO-SHA hole diameter 11 mm. This item is covered by procurement of CL155 CL-CS 210693DD-EG-Z002 Cavity support (See notes) (See notes) Rods made of "Zero expansion invar" (Shinhokoku Material Corp) and plastic covers. See details in JADA-5503DW3009156 CM-LT 210693DD-EG-Z002 Laser table 2DB-00282 TOYAMA Material: granite157 CM-TF 210693DD-EG-Z002 Laser table frame 1DA-00939-A TOYAMA158 CM-CV 210693DD-EG-Z002 Laser enclosure 0AD-00118-A TOYAMA This item includes not only frames but also panels159 C1-CV 210693DD-EG-Z002 Laser enclosure of C1-laser path 3JG-02932-A TOYAMA201 CL-MG-VP 210693DD-EG-Z003 Dry Roots Pump nXR90i Edwards202 FL-MG-VP 210693DD-EG-Z003 Dry Roots Pump nXR90i Edwards203 CL-MG-IV 210693DD-EG-Z003 Isolation Valve VIV40EKA 208-230V AC/A50637512 Edwards204 FL-MG-IV 210693DD-EG-Z003 Isolation Valve VIV40EKA 208-230V AC/A50637512 Edwards205 CL-MG-MV1 210693DD-EG-Z003 Bellows Sealed Valve SS-4H Swagelok206 FL-MG-MV1 210693DD-EG-Z003 Bellows Sealed Valve SS-4H Swagelok207 FL-MG-MV3 210693DD-EG-Z003 Bellows Sealed Valve SS-4H Swagelok208 C0-SC-MV1 210693DD-EG-Z003 Bellows Sealed Valve SS-4H Swagelok209 C0-SC-MV3 210693DD-EG-Z003 Bellows Sealed Valve SS-4H Swagelok210 CL-MG-MV2 210693DD-EG-Z003 Bellows Sealed Valve LBM-NW40DX-1352400 Fuji Technolgy211 FL-MG-MV2 210693DD-EG-Z003 O-ring Sealed Valve LV-NW40DX-1142450 Fuji Technolgy212 C0-SC-MV2 210693DD-EG-Z003 O-ring Sealed Valve LV-NW40DX-1142450 Fuji Technolgy213 FL-MG-PV 210693DD-EG-Z003 Piezo Valve PV-A131-1/4"VCR HORIBA STEC214 C0-MG-PV 210693DD-EG-Z003 Piezo Valve PV-A131-1/4"VCR HORIBA STEC215 CL-MG-PG1 210693DD-EG-Z003 Capacitance Diaphragm Gauge 3CB5-G61-23G0 INFICON216 FL-MG-PG 210693DD-EG-Z003 Capacitance Diaphragm Gauge 3CB5-961-23G0 INFICON217 C0-SC-PG 210693DD-EG-Z003 Capacitance Diaphragm Gauge 3CB5-961-23G0 INFICON218 CL-MG-GD1 210693DD-EG-Z003 Gauge Controller VCG503(398-483) INFICON219 CL-NC-MFC 210693DD-EG-Z003 Mass Flow Controller N2 5SLM SEC-N117MGM,CS5,,MR.MG-06,5SLM,4CRL,N2, HORIBA STEC220 CL-HE-MFC 210693DD-EG-Z003 Mass Flow Controller He 15SLM SEC-N127MGM,CS5,,MR.MG-07,15SLM,4CRL,He, HORIBA STEC221 FL-HE-MFC 210693DD-EG-Z003 Mass Flow Controller He 10SCCM SEC-N117MGM,CS5,,MR.MG-R01,10SCCM,4CRL,He, HORIBA STEC222 CL-NC-AV 210693DD-EG-Z003 Bellows Sealed Valve SS-4BK-1C Swagelok223 CL-HE-AV 210693DD-EG-Z003 Bellows Sealed Valve SS-4BK-1C Swagelok224 CL-NC-FT 210693DD-EG-Z003 Filter SS-4F-05 Swagelok225 CL-HE-FT 210693DD-EG-Z003 Filter SS-4F-05 Swagelok226 CL-MG-PG2 210693DD-EG-Z003 Pirani Gauge 3PI1-006-41G0 INFICON227 CL-MG-GD2 210693DD-EG-Z003 Pirani Gauge Display PGD500(398-802) INFICON# Equipment # Document # Parts Name Parts Number Manufacturer Notes228 CL-MG-MV3 210693DD-EG-Z003 Inlet Valve NW25 951-7178 ANELVA229 F*-FL-AV 210693DD-EG-Z003 Actuated Valve part of CH3OH Vaporization System(55C600-DIA-0001) HORIBA STEC *: A, U or B230 F*-SC-AV 210693DD-EG-Z003 Actuated Valve part of CH3OH Vaporization System(55C600-DIA-0001) HORIBA STEC *: A, U or B231 F*-FL-MFC 210693DD-EG-Z003 Mass Flow Controller part of CH3OH Vaporization System(55C600-DIA-0001) HORIBA STEC *: A, U or B232 F*-SC-MFC 210693DD-EG-Z003 Mass Flow Controller part of CH3OH Vaporization System(55C600-DIA-0001) HORIBA STEC *: A, U or B233 55C600-DIA-0001 210693DD-EG-Z003 CH3OH Vaporization System LSC-7900-00004 HORIBA STECParts Number is that of the prototype (for one laser unit)For safety reasons, the contact signal output should be changed from contact A to contact B (ON successfully, OFFabnormally) when the actual laser system is manufactured234 CM-SV 210693DD-EG-Z004 Manifold, 3-port Solenoid Valves and Silencer SS3YJ3-S42-02-M5-Q＋2×SYJ314-5GZD-Q＋AN101-01 SMC235 CM-CW-WM1 210693DD-EG-Z005 Manifold SUMHAF25A-6-P60-S90-Q70 MISUMI236 CM-CW-WM2 210693DD-EG-Z005 Manifold SUMHAF25A-6-P60-S90-Q70 MISUMI237 CM-CW-MV0 210693DD-EG-Z005 Ball Valve UTK-25A KITZ238 CL-CW-MV1a 210693DD-EG-Z005 Needle Valve NBPPS33 MISUMI239 FL-CW-MV2a 210693DD-EG-Z005 Needle Valve NBPPS33 MISUMI240 CL-CW-MV2a 210693DD-EG-Z005 Needle Valve NBPPS22 MISUMI241 CL-CW-MV3a 210693DD-EG-Z005 Needle Valve NBPPS22 MISUMI242 CL-CW-MV4a 210693DD-EG-Z005 Needle Valve NBPPS22 MISUMI243 FL-CW-MV1a 210693DD-EG-Z005 Needle Valve NBPPS22 MISUMI244 CL-CW-MV1d 210693DD-EG-Z005 Ball Valve UTKW-10A KITZ245 CL-CW-MV2d 210693DD-EG-Z005 Ball Valve UTKW-10A KITZ246 CL-CW-MV3d 210693DD-EG-Z005 Ball Valve UTKW-10A KITZ247 CL-CW-MV4d 210693DD-EG-Z005 Ball Valve UTKW-10A KITZ248 FL-CW-MV1d 210693DD-EG-Z005 Ball Valve UTKW-10A KITZ249 FL-CW-MV2d 210693DD-EG-Z005 Ball Valve UTKW-10A KITZ250 CL-CW-FM2 210693DD-EG-Z005 Flow Meter KZ-7003-09L AS ONE251 CL-CW-FM3 210693DD-EG-Z005 Flow Meter KZ-7003-09L AS ONE252 CL-CW-FM4 210693DD-EG-Z005 Flow Meter KZ-7003-09L AS ONE253 FL-CW-FM1 210693DD-EG-Z005 Flow Meter KZ-7003-09L AS ONE254 CL-CW-FM1 210693DD-EG-Z005 Flow Meter RK2000-VD-S-H2O-10L/MIN-0.2MPa-0.1MPa KOFLOC255 FL-CW-FM2 210693DD-EG-Z005 Flow Meter RK2000-VD-S-H2O-10L/MIN-0.2MPa-0.1MPa KOFLOC256 CM-WL 210693DD-EG-Z005 Liquid Leakage Sensor K7L-UB/P2RF-08-PU+F03-16PE+F03-26PES+F03-20 OMRON257 CM-CW-TS0 210693DD-EG-Z005 Resistance Temperature Detector PTR3531-ClassA HAKKO ELECTRIC258 CM-CW-FM0 210693DD-EG-Z005 Clamp-on Flow Sensor FD-H20 KEYENCE259 CL-CW-MV1b 210693DD-EG-Z005 3-port Valve BT-2333 MISUMI260 FL-CW-MV2b 210693DD-EG-Z005 3-port Valve BT-2333 MISUMI261 CL-CW-MV1c 210693DD-EG-Z005 3-port Valve BT-2333 MISUMI262 CL-CW-MV2c 210693DD-EG-Z005 3-port Valve BT-2333 MISUMI263 CL-CW-MV3c 210693DD-EG-Z005 3-port Valve BT-2333 MISUMI264 CL-CW-MV4c 210693DD-EG-Z005 3-port Valve BT-2333 MISUMI265 FL-CW-MV1c 210693DD-EG-Z005 3-port Valve BT-2333 MISUMI266 FL-CW-MV2c 210693DD-EG-Z005 3-port Valve BT-2333 MISUMI267 CL-CW-MV2b 210693DD-EG-Z005 3-port Valve BT-1222 MISUMI268 CL-CW-MV3b 210693DD-EG-Z005 3-port Valve BT-1222 MISUMI269 CL-CW-MV4b 210693DD-EG-Z005 3-port Valve BT-1222 MISUMI270 FL-CW-MV1b 210693DD-EG-Z005 3-port Valve BT-1222 MISUMI271 55C6FA-HX-0002 210693DD-EG-Z005 Heat exchanger TF-10000 ThermoFlex Water-cooled Chiller(Secondary water is cooling water supplied from the building)272 55C6FB-HX-0002 210693DD-EG-Z005 Heat exchanger TF-10000 ThermoFlex Water-cooled Chiller(Secondary water is cooling water supplied from the building)273 55C6FU-HX-0002 210693DD-EG-Z005 Heat exchanger TF-10000 ThermoFlex Water-cooled Chiller(Secondary water is cooling water supplied from the building)274 CL-NC-PG 210693DD-EG-Z003 Digital Pressure Switch(Gauge) ISE20C-T-M-B2-W SMC275 CL-HE-PG 210693DD-EG-Z003 Digital Pressure Switch(Gauge) ISE20C-T-M-B2-W SMC301 C0-SA 210693DD-EG-Z007-011 Spectrum analyzer 16A + 4JJ-09432-A + PLSBG17-96-M6-N8MackenInstruments/TOYAMA/MISUMI302 C0-SB-OM 210693DD-EG-Z007-011 Output Monitor＋CO2 Differential amplifier(×10) (3A07742) GIGA Rack mountable with fixed 10x amplification to 3A07742# Equipment # Document # Parts Name Parts Number Manufacturer Notes303 C0-SC-LA 210693DD-EG-Z007-011 Lock-in amplifier LIA-MV-150-S OPTO SCIENCE304 C0-SC-PS 210693DD-EG-Z007-011 HighSpeedHighVoltage AMP HAP-10B10 Matsusada Precision305 C1-CV-SW 210693DD-EG-Z007-011 Cover switch SS-5GL2 OMRON306 CL-HV 210693DD-EG-Z007-011 CO2 laser PS IPN-20K200-M IDX307 CL-MG-VS 210693DD-EG-Z007-011 Vacuum pump SWBOX 3AI-01382-A TOYAMA308 CL-OS 210693DD-EG-Z007-011 CO2 Oscilloscope MDO34 3-BW-100 Tektronix309 CL-OW-PD/PT 210693DD-EG-Z007-011 Piezo driver/Potention mater 3AI-01709-A TOYAMA310 CL-OW-PZ 210693DD-EG-Z007-011 Piezo Actuator MAP-G1-OS MESS-TEK311 CM-EI 210693DD-EG-Z007-011 External Interlock N/A N/A Contact signals to/from slow controller(Monitoring PLC)312 CM-EP 210693DD-EG-Z007-011 Ethernet Patch Panel NR21326B Panasonic313 CM-MD1 210693DD-EG-Z007-011 Oscilloscope Monitor(CL-OS) 22MN430M-BAJP LG314 CM-MD2 210693DD-EG-Z007-011 Oscilloscope Monitor(FL-OS) 22MN430M-BAJP LG315 CM-PB 210693DD-EG-Z007-011 Panic button EBB-2402-DA MISUMI316 CM-PLC1 210693DD-EG-Z007-011 PLC UNIT#1 3AI-01704-A TOYAMA317 CM-PLC2 210693DD-EG-Z007-011 PLC UNIT#2 2AI-00418-A TOYAMA318 CM-PS-BB 210693DD-EG-Z007-011 Breaker UNIT 2AI-00415-A TOYAMA319 CM-SH 210693DD-EG-Z007-011 Ethernet Hub W4S1-05D OMRON320 CM-TH 210693DD-EG-Z007-011 Thermo hygrometer ZN-THX21-S OMRON321 CM-TP 210693DD-EG-Z007-011 Touch Panel NA5-15W101S-V1 OMRON322 FL-DT-AM 210693DD-EG-Z007-011 FIR Diff Amp 5307 NF CORPORATION323 FL-DT-LA 210693DD-EG-Z007-011 Lock-in Amplifier LIA-MV-150-S OPTO SCIENCE324 FL-MG-VS 210693DD-EG-Z007-011 Vacuum pump SWBOX 3AI-01382-A TOYAMA325 FL-OM-CB 210693DD-EG-Z007-011 FIR Stage Controller 200544DD-2 koyo326 FL-OS 210693DD-EG-Z007-011 FIR Oscilloscope MDO34 3-BW-100 Tektronix327 CM-CC1 210693DD-EG-Z007-011 Control cabinet #1 (TOYAMA Standard Cabinet) HUMAN Cabinet to store PLC etc328 CM-CC2 210693DD-EG-Z007-011 Control cabinet #2 (TOYAMA Standard Cabinet) HUMAN Cabinet to store Transformer etc329 CM-TR1 210693DD-EG-Z007-011 Transformer (3 phase, 7.5 kVA) TRP7.5K-42Y TOYOGIKEN 3 phase, 7.5 kVA, to convert 400 V into 200 V330 CM-TR2 210693DD-EG-Z007-011 Transformer (1 phase, 1 kVA) TRP1K-41S TOYOGIKEN 1 phase, 1 kVA, to convert 230 V into 100 V331 C0-SC-WG 210693DD-EG-Z007-011 Oscillator (Sin Wave Generator) AD8626 AandDAPPENDIX XI : Mechanical DrawingAPPENDIX XII : PLC Internal Processing FlowchartThe graphical symbols in this document comply with ISO5807:1985/JIS X 0121:1986. In addition, red letters indicate public variables in OPC UA, and blue letters indicate the unitnumber and channel number of the PLC's component. The notation "A: B.C" indicates thatvariable A, which is indicated on the flowchart, is member variable C of structure B. MainProcessShutdown?StartEndFT(Power On)(Power Off)Initialize UnitInterlock Process(Safety CPU)PLC Standard Task(IO refresh,Communication and etc.)■ Overview 210693DD-EG-B004R22StartCL-HVCO2Laser HVOperationAutoRampupOperationEnd■ Main ProcessCL-OW-PDOperationPiezo ValveOperation210693DD-EG-B004R2CH3OH GasOperationFL-OM-CBFIR StageOperationShutter ControlOperationMovement MirrorStageOperationStop ValveOperation3■ CL-HV CO2 Laser High Voltage Power Supply Control (1/2)Start210693DD-EG-B004R2bReqStandbyOff: CL_HV_sCntl.bReqStandbyOffbReqStandbyOn: CL_HV_sCntl.bReqStandbyOnbReqStandbyOnRaised?Output single pulse signal toCM-PLC1/Unit#8/Channel#0bReqStandbyOffRaised?Output single pulse signal toCM-PLC1/Unit#8/Channel#1TFF TConditionOK?(1)FTNote 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. Interlock is not activatedCL-HV is NOT in 'EMERGENCY' or 'INTERLOCK'A4End■ CL-HV CO2 Laser High Voltage Power Supply Control (2/2)A210693DD-EG-B004R2bReqOperateOff: CL_HV_sCntl.bReqOperateOffbReqOperateOn: CL_HV_sCntl.bReqOperateOnbReqBuzzerOff: CL_HV_sCntl.bReqBuzzerOffbReqBuzzerOn: CL_HV_sCntl.bReqBuzzerOnnReqCurrent: CL_HV_sCntl.nReqCurrentbReqOperateOnRaised?Output single pulse signal toCM-PLC1/Unit#8/Channel#2bReqBuzzerOnRaised?bReqBuzzerOffRaised?Output single pulse signal toCM-PLC1/Unit#8/Channel#3bReqOperateOffRaised?Output single pulse signal toCM-PLC1/Unit#8/Channel#4Output single pulse signal toCM-PLC1/Unit#8/Channel#5nReqCurrentChanged?CM-PLC1/Unit#12/Channel#0 ← nReqCurrentTT T T TF FF F FCL-HV is in'STAND-BY'?TF5■ CL-HV Auto Ramp-up Sequence OverviewStartEndnState11.Idle 2.Set Flow Rate3. WaitFlow Stabilization4. Set HV5. Watch7. Done8. Abort6. Cycle End7 92 3 4 5 69. Error8210693DD-EG-B004R2nState: CL_HV_sSeqSts.nState6nCycle: CL_HV_sSeqSts.nCyclebAbort: CL_HV_sSeqCntl.bAbortnState: CL_HV_sSeqSts.nStatenErrorCode: CL_HV_sSeqSts.nErrorCodefFlowNC##: CL_HV_sSeqCntl.fFlowNC##fFlowHE##: CL_HV_sSeqCntl.fFlowHE##bStart: CL_HV_sSeqCntl.bStartnCycle: CL_HV_sSeqSts.nCyclenState: CL_HV_sSeqSts.nStatenErrorCode: CL_HV_sSeqSts.nErrorCode■ CL-HV Auto Ramp-up Sequence 1.IdleStartEndbStartRaised?FnState ← 2nErrorCode ← 0nCycle ← 0■ CL-HV Auto Ramp-up Sequence 2.Set Flow RateStartEndSet FlowRate (##: nCycle)CL-NC-MFC (EtherCAT)/SP ←.fFlowNC##CL-HE-MFC (EtherCAT)/SP ←.fFlowHE##Flow PVin Range?nState ← 9nErrorCode (bit9) ← 1nState ← 3bAbort?nState ← 8nErrorCode (bit7) ← 1nErrorCode (bit9) ← 1FFTTT210693DD-EG-B004R2CheckDischarge TubeStatusCheckFlow SettingTimeoutnErrorCode > 0?FT7■ CL-HV Auto Ramp-up Sequence 3. Wait Flow StabilizationStartEndfTGas##Elapsed?FnErrorCode > 0?bAbort?FTnState ← 9nErrorCode (bit10) ← 1nState ← 4nState ← 8nErrorCode (bit7) ← 1nErrorCode(bit10) ← 1TT■ CL-HV Auto Ramp-up Sequence 4. Set HV CurrentStartEndSet CL-HV Current (##: nCycle)CM-PLC1/Unit#12/Channel#0 ← fCurrent##nState ← 5F210693DD-EG-B004R2Scaling 200/0 mA to 20/4 mAnCycle: CL_HV_sSeqSts.nCyclenState: CL_HV_sSeqSts.nStatefCurrent##: CL_HV_sSeqCntl.fCurrent##nCycle: CL_HV_sSeqSts.nCyclenState: CL_HV_sSeqSts.nStatenErrorCode: CL_HV_sSeqSts.nErrorCodebAbort: CL_HV_sSeqCntl.bAbortfTGas##: CL_HV_sSeqCntl.fTGas##CheckDischarge TubeStatus8■ CL-HV Auto Ramp-up Sequence 5. Watch UnvalanceStartEndfTHV##Elapsed? FbAbort?FnState ← 9nErrorCode (bit12) ← 1nState ← 6nState ← 8nErrorCode (bit7) ← 1nErrorCode (bit12) ← 1TT■ CL-HV Auto Ramp-up Sequence 6. End of CycleStartEndnState ← 7nCycle 0?FT9■ CL-HV Auto Ramp-up Sequence 7. DoneStart■ CL-HV Auto Ramp-up Sequence 8. AbortStartEndSet CL-HV Current to ZeroCM-PLC1/Unit#12/Channel#0 ← 0Set Mass Flowto ZeroCL-NC-MFC (EtherCAT)/SP ← 0CL-HE-MFC (EtherCAT)/SP ← 0bResetRaised?FTEndbResetRaised?FTnState ← 1nState ← 1210693DD-EG-B004R2Scaling 200/0 mA to 20/4 mA (8000-0)bReset: CL_HV_sSeqCntl.bResetnState: CL_HV_sSeqSts.nStatebReset: CL_HV_sSeqCntl.bResetnState: CL_HV_sSeqSts.nStateNo scaling10■ CL-HV Auto Ramp-up Sequence 9. ErrorStartEndbResetRaised?FTnState ← 1bStart ← False210693DD-EG-B004R2bReset: CL_HV_sAutoSeq.bResetnState: CL_HV_sAutoSeq.nStatebStart: CL_HV_sAutoReq.bStartSet CL-HV Current to ZeroCM-PLC1/Unit#12/Channel#0 ← 0Set Mass Flowto ZeroCL-NC-MFC (EtherCAT)/SP ← 0CL-HE-MFC (EtherCAT)/SP ← 0Scaling 200/0 mA to 20/4 mA (8000-0)No scaling11■ CL-HV Auto Ramp-up Sequence Check Discharge Tube Status 210693DD-EG-B004R2nState: CL_HV_sSeqSts.nStatenErrorCode: CL_HV_sSeqSts.nErrorCode(*) nCycle > 0? and CM-PLC1/Unit#12/Channel#0StartEndnErrorCode(bit0) ← 1Condition? (*)PD ThresholdCheck?EnabledTDisabledOKFNGCurrentBalance?CurrentBalance Check?NGOKnErrorCode(bit1) ← 112■ CL-HV Auto Ramp-up Sequence Check Flow Setting Timeout 210693DD-EG-B004R2nErrorCode: CL_HV_sSeqSts.nErrorCodeStartEndCondition? (*2)TFnErrorCode(bit3) ← 1Condition? (*1)nErrorCode(bit2) ← 1(*1) CL-HE-MFC flow has converged to the setpoint +/- 5% within the specified time (10s)(*2) CL-NC-MFC flow has converged to the setpoint +/- 5% within the specified time (10s)TF13210693DD-EG-B004R2TF■ CL-OW-PD Modes of OperationStartEndnMode? (Sts)11.Manual(Local POT)2. Manual3. AutoSweap4. AutoPID3 4 2nMode (Sts): CL_OW_PD_sSts.nModenMode (Cntl): CL_OW_PD_sCntl.nModenMode(Cntl)Changed?nMode(Sts) ← nMode(Cntl)14■ CL-OW-PD 1. Manual (Local POT)210693DD-EG-B004R2StartRead Potentiometer ValueCM-PLC1/Unit#13/Channel#110 revolutions. Full Scale 10V, no scalingAnalog Voltage OutputCM-PLC1/Unit#14/Channel#1End■ CL-OW-PD 2. ManualStartRead parameterfrom ManSP(PZT Target Voltage)Analog Voltage OutputCM-PLC1/Unit#14/Channel#1EndExpected value: 0 ~ 150VScaling 0-150V to 0-10VNo scalingControlMode?Read parameterfrom CM-TP(PZT Target Voltage)RemoteLocalManSP: CL_OW_PD_sCntl.ManSP15■ CL-OW-PD 3. Auto Sweap210693DD-EG-B004R2StartCalculate Target Voltagew/ using Internal TimerAnalog Voltage OutputCM-PLC1/Unit#14/Channel#1End■ CL-OW-PD 4. Auto PIDStartRead Voltage Signal from C0-SC-LACM-PLC1/Unit#13/Channel#4Calculate Target Voltagew/ Built-in PID Function BlockEndExpected Output Value: 0 ~ 150VExpected value: 0 ~ 150VAnalog Voltage OutputCM-PLC1/Unit#14/Channel#1No ScalingScaling 150V to 10VScaling 150V to 10V16210693DD-EG-B004R2End■ C0-SC-PV Piezo Valve OperationRead Current Pressure from C0-SC-PGC0-SC-PG (EtherCAT)/PVCalculate Target Apparturew/ Built-in PID Function BlockExpected Output Value: 0 ~ 100%Analog Voltage OutputCM-PLC2/Unit#9/Channel#0No ScalingScaling 0~100% to 0~5VStartnMode (Sts) ?0: Manual1: PIDnMode (Sts): C0_SC_PV_sSts.nModenMode (Cntl): C0_SC_PV_sCntl.nModenAppartureSP: C0_SC_PV_sCntl.nAppartureSPfPressureSP: C0_SC_PV_sCntl.fPressureSPControlMode?Read Target Apparturefrom CM-TPLocalRead Target Apparturefrom nAppartureSPRemoteControlMode?LocalRead Target Puressurefrom CM-TPRead Target Puressurefrom fPressureSPRemotenMode (Cntl)Changed?nMode (Sts) ← nMode (Cntl)17210693DD-EG-B004R2End■ FL-MG-PV Piezo Valve OperationRead Current Pressure from FL-MG-PGFL-MG-PG (EtherCAT)/PVCalculate Target Apparturew/ Built-in PID Function BlockExpected Output Value: 0 ~ 100%Analog Voltage OutputCM-PLC2/Unit#9/Channel#1No ScalingScaling 0~100% to 0~5VStartnMode (Sts) ?0: Manual1: PIDnMode (Sts): FL_MG_PV_sSts.nModenMode (Cntl): FL_MG_PV_sCntl.nModenAppartureSP: FL_MG_PV_sCntl.nAppartureSPfPressureSP: FL_MG_PV_sCntl.fPressureSPControlMode?Read Target Apparturefrom CM-TPLocalRead Target Apparturefrom nAppartureSPRemoteControlMode?LocalRead Target Puressurefrom CM-TPRead Target Puressurefrom fPressureSPRemotenMode (Cntl)Changed?nMode (Sts) ← nMode (Cntl)18210693DD-EG-B004R2A■ FL-OM-CB FIR Stage Contoroller Operation (1/2)StartbCommReset: FL_OM_CB_sCntl.bCommResetbRemote: FL_OM_CB_sSts.bRemotebBusy: FL_OM_CB_sSts.bBusybSetParam: FL_OM_CB_sCntl.bSetParambTeqManual: FL_OM_CB_sCntl.bReqManualbReqAuto: FL_OM_CB_sCntl.bReqAutoGet Controller Status (Serial)andUpdate FL_OM_CB_sStsbRemote?bCommResetRaised?Restart SerialCommunicationTFbSetParamRaised?Set Controller params(Serial)bReqManualRaised?TTFFSet Operation Mode toManual(Serial)bReqAutoRaised?TFTFSet Operation Mode toAuto(Serial)bBusy?FT19210693DD-EG-B004R2 ■ FL-OM-CB FIR Stage Contoroller Operation (2/2)EndbStop: FL_OM_CB_sCntl.bStopbJogP: FL_OM_CB_sCntl.bJogPbJogM: FL_OM_CB_sCntl.bJogMbMoveP: FL_OM_CB_sCntl.bMovePbMoveM: FL_OM_CB_sCntl.bMoveMbMoveOrigin: FL_OM_CB_sCntl.bMoveOriginbJogPRaised?Send Jog+ Command(Serial)TFAbJogMRaised?Send Jog- Command(Serial)TFbMovePRaised?Send Move+ Command(Serial)TFbMoveMRaised?Send Move- Command(Serial)TFbMoveOriginRaised?Send Origin Command(Serial)TFbStopRaised?Send Stop Command(Serial)TF20■ F*-FL-AV/F*-FL-MFC CH3OH Vapor Control (*: A, U or B)bReqOpen: F*_FL_AV_sCntl.bReqOpenbReqClose: F*_FL_AV_sCntl.bReqClosefFlowSP: F*_FL_MFC_sCntl.fFlowSPNote 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. Interlock is not activated210693DD-EG-B004R2EndStartbReqOpenRaised?ConditionOK?(1)FF*-FL-AV OpenCM-PLC1/Unit#9/Ch#0 ← 1F*-FL-AV CloseCM-PLC1/Unit#9/Ch#0 ← 0ConditionOK?bReqCloseRaised?FFFT TTTfFlowSPChanged?F*-FL-MFC Write SPCM-PLC1/Unit#14/Ch#0 ← fFlowSPTF21■ F*-SC-AV/F*-SC-MFC CH3OH Vapor Control (*: A, U or B)bReqOpen: F*_SC_AV_sCntl.bReqOpenbReqClose: F*_SC_AV_sCntl.bReqClosefFlowSP: F*_SC_MFC_sCntl.fFlowSP210693DD-EG-B004R2EndStartbReqOpenRaised?ConditionOK?(1)FF*-SC-AV OpenCM-PLC1/Unit#9/Ch#1 ← 1F*-SC-AV CloseCM-PLC1/Unit#9/Ch#1 ← 0ConditionOK?bReqCloseRaised?FFFT TTTfFlowSPChanged?F*-SC-MFC Write SPCM-PLC1/Unit#14/Ch#1 ← fFlowSPTFNote 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. Interlock is not activated22■ C1-ST CO2 Laser Shutter OpearationbReqOpen: C1_ST_sCntl.bReqOpenbReqClose: C1_ST_sCntl.bReqClose210693DD-EG-B004R2Note 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. Shutter status is normal (Limit switches and control request states are consistent.)Interlock is not activatedC1-CV-SW or CM-PB-SW3 is activated. Optical path to FL or C1-PM-M is cleared. C1-PM-M position is Inserted or RemovedC1-VL-M2 position is RemovedCH3OH supply to FIR laser tube is normal (this item evaluates only if C1-PM-M is in Removed position)StartEndConditionOK?(1)bReqOpenRaised?TC1-ST OpenCM-PLC1/Unit#4/Ch#3 ← 1C1-ST CloseCM-PLC1/Unit#4/Ch#3 ← 0bReqCloseRaised?TFFFT23■ FL-ST FIR Laser Shutter Operation210693DD-EG-B004R2bReqOpen: FL_ST_sCntl.bReqOpenbReqClose: FL_ST_sCntl.bReqCloseNote 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. Shutter status is normal (Limit switches and control request states are consistent.)Interlock is not activatedCM-EI(External Interlock signal from Monitoring PLC) is not activatedStartEndConditionOK?(1)bReqOpenRaised?TFL-ST OpenCM-PLC2/Unit#4/Ch#2 ← 1FL-ST CloseCM-PLC2/Unit#4/Ch#2 ← 0bReqCloseRaised?TFFFT24■ C1-PM-M Movement Mirror Stage Operation210693DD-EG-B004R2bReqInsert: C1_PM_M_sCntl.bReqInsertbReqRemove: C1_PM_M_sCntl.bReqRemoveNote 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. C1-PM-M is in normal operation (Limit switches and control request states are consistent.)Interlock is not activatedC1-ST is closedStartEndbReqInsertRaised?FChange Direction to InsertCM-PLC2/Unit#7/Ch#0 ← 1Change Direction to RemoveCM-PLC1/Unit#4/Ch#0 ← 0bReqRemoveRaised?T TConditionOK?(1)FDisable Motor CircuitCM-PLC1/Unit#5/Ch#0 ← 0CM-PLC1/Unit#5/Ch#1 ← 0Hit the RemovePosition Limit?FHit the InsertPosition Limit?Disable Motor CircuitCM-PLC1/Unit#5/Ch#0 ← 0Disable Motor CircuitCM-PLC1/Unit#5/Ch#1 ← 0Enable Motor CircuitCM-PLC1/Unit#5/Ch#0 ← 1Enable Motor CircuitCM-PLC1/Unit#5/Ch#1 ← 1TT TF F25■ C1-VL-M2 Movement Mirror Stage Operation210693DD-EG-B004R2bReqInsert: C1_VL_M2_sCntl.bReqInsertbReqRemove: C1_VL_M2_sCntl.bReqRemoveNote 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. C1-VL-M2 is in normal operation (Limit switches and control request states are consistent.)Interlock is not activatedC1-ST is closedStartEndbReqInsertRaised?FChange Direction to InsertCM-PLC2/Unit#7/Ch#1 ← 1Change Direction to RemoveCM-PLC1/Unit#4/Ch#1 ← 0bReqRemoveRaised?T TConditionOK?(1)FDisable Motor CircuitCM-PLC1/Unit#5/Ch#2 ← 0CM-PLC1/Unit#5/Ch#3 ← 0Hit the RemovePosition Limit?FHit the InsertPosition Limit?Disable Motor CircuitCM-PLC1/Unit#5/Ch#2 ← 0Disable Motor CircuitCM-PLC1/Unit#5/Ch#3 ← 0Enable Motor CircuitCM-PLC1/Unit#5/Ch#2 ← 1Enable Motor CircuitCM-PLC1/Unit#5/Ch#3 ← 1TT TF F26StartEndbReqOpenRaised?ConditionOK?(1)FCL-NC-AV OpenCM-PLC1/Unit#4/Ch#0 ← 1CL-NC-AV CloseCM-PLC1/Unit#4/Ch#0 ← 0ConditionOK?bReqCloseRaised?FFFT TTT■ CL-NC-AV Stop Valve Operation210693DD-EG-B004R2bReqOpen: CL_NC_AV_sCntl.bReqOpenbReqClose: CL_NC_AV_sCntl.bReqCloseNote 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. CL-MG-VP is in normal operationInterlock is not activated27StartEndbReqOpenRaised?ConditionOK?(1)FCL-NC-AV OpenCM-PLC1/Unit#4/Ch#1 ← 1CL-NC-AV CloseCM-PLC1/Unit#4/Ch#1 ← 0ConditionOK?bReqCloseRaised?FFFT TTT■ CL-HE-AV Stop Valve Operation210693DD-EG-B004R2bReqOpen: CL_HE_AV_sCntl.bReqOpenbReqClose: CL_HE_AV_sCntl.bReqCloseNote 1: "Condition OK?" is regarded as TRUE when all of the following items are satisfied. CL-MG-VP is in normal operationFL-MG-VP is in normal operationInterlock is not activated28APPENDIX XIII : Interlock Condition StatementLogic circuit symbols comply with IEC60617/JIS C0617. Unless otherwise noted, signals inthe circuit are 1 or High when normal/valid and 0/Low when abnormal/invalid. CM_PLC1_iSCSa (*1)CM_PLC1_iSCSb (*1)CM_PLC1_iSCSc (*1)& CM_PLC2_iSCSa (*1)CM_PLC2_iSCSb (*1)CM_PLC2_iSCSc (*1)CM_PLC2_iSCSd (*1)CM_PB_bSoftReset (*3)&=1210693DD-EG-B005R1SF_EmergencyStop (*2)Activate S_EStopOutS_EstopInS_AutoResetResetFalseUser Input From HMI(CSS/BOY)PLC Safety Input Unit PLC Safety CPU Internal Process(*1) Internal variable of safety input/output unit communication status(*2) This is a safety CPU integrated safety function block. The description of this functional block is on pages 4-23 to 26 of document number 931-E1-05 released by OMRON(*3) Enabled when the rising edge of the signal is detectedUser InputFrom Hardware SwitchPLC Standard CPUInternal ProcessCM-PB-SW2 (RESET)CL-HV (EMERGENCY)CM-PB-SW1 (EMS)Signals From DeviceCM-WLCM-PB-SW1 (EMS)PLC Safety Output Unit Signals to DeviceCL-HV (EXT EMERGENCY)CL-HV (RESET)CM-PLC1/Unit5/Ch#1CM-PLC1/Unit#3/Ch#2CM-PLC1/Unit#3/Ch#1CM-PLC1/Unit#3/Ch#0CM-PLC2/Unit#2/Ch#4CM-PLC1/Unit#4/Ch#2CM-PLC1/Unit5/Ch#2CM-EI CM-PLC1/Unit#3/Ch#4CM_TP_bRemote&106APPENDIX XIV : I/O Signal ListEtherCAT Device ConfigurationGr# Name Module# Module Name Function0 CM-PLC1 0 NX102-9000 PLC CPU/General; EtherCAT Master0 CM-PLC1 1 NX-SL3300 PLC CPU/Safety; Compatible with FSoE0 CM-PLC1 2 NX-PF0630 IO Power Supply0 CM-PLC1 3 NX-SID800 8ch Safety Input0 CM-PLC1 4 NX-SID800 8ch Safety Input0 CM-PLC1 5 NX-SOD400 4ch Safety Output0 CM-PLC1 6 NX-SOD400 4ch Safety Output0 CM-PLC1 7 NX-ID4442 8ch Digital Input (PNP)0 CM-PLC1 8 NX-OD4256 8ch Digital Output (PNP)0 CM-PLC1 9 NX-OD4256 8ch Digital Output (PNP)0 CM-PLC1 10 NX-PD1000 NX Unit Power Supply0 CM-PLC1 11 NX-AD4204 8ch Analog Current Input 4-20mA 1/80000 CM-PLC1 12 NX-DA2203 2ch Analog Current Output 4-20mA 1/80000 CM-PLC1 13 NX-AD4608 8ch Analog Voltage Input +/-10V 1/300000 CM-PLC1 14 NX-DA3605 4ch Analog Voltage Output +/-10V 1/300000 CM-PLC1 15 NX-TS3204 4ch RTD Input0 CM-PLC1 16 NX-END02 End Cover1 CM-PLC2 0 NX-ECC203 EtherCAT Slave Coupler1 CM-PLC2 1 NX-CIF210 RS-232C 2ch1 CM-PLC2 2 NX-SID800 8ch Safety Input1 CM-PLC2 3 NX-SID800 8ch Safety Input1 CM-PLC2 4 NX-SOD400 4ch Safety Output1 CM-PLC2 5 NX-SOD400 4ch Safety Output1 CM-PLC2 6 NX-ID4442 8ch Digital Input (PNP)1 CM-PLC2 7 NX-OD4256 8ch Digital Output (PNP)1 CM-PLC2 8 NX-AD4608 8ch Analog Voltage Input +/-10V 1/300001 CM-PLC2 9 NX-DA3605 4ch Analog Voltage Output +/-10V 1/300001 CM-PLC2 10 NX-END02 End Cover2 CL-MG-PG2 0 3PI1-006-41G0 Pirani/EtherCAT compatible3 CL-MG-PG1 0 3CB5-G61-23G0 Capacitance Gauge/EtherCAT compatible4 C0-SC-PG 0 3CB5-G61-23G0 Capacitance Gauge/EtherCAT compatible5 FL-MG-PG 0 3CB5-G61-23G0 Capacitance Gauge/EtherCAT compatible6 FL-HE-MFC 0 SEC-N117MGM,CS5,,MR.MG-R01,10SCCM,4CRL,He, Massflow controller/EtherCAT compatible7 CL-NC-MFC 0 SEC-N117MGM,CS5,,MR.MG-06,5SLM,4CRL,N2, Massflow controller/EtherCAT compatible8 CL-HE-MFC 0 SEC-N127MGM,CS5,,MR.MG-07,15SLM,4CRL,He, Massflow controller/EtherCAT compatibleCM-PLC1 I/O AssignmentGroup Module# Ch Old No. New No. PLC I/O Type Direction Conversion Factor EGU Signal Note0 0 N/A 9-2-1 CM-PLC1 System N/A N/A N/A N/A PLC CPU/General0 1 N/A 9-2-1 CM-PLC1 System N/A N/A N/A N/A PLC CPU/Safety0 2 N/A 9-2-1 CM-PLC1 System N/A N/A N/A N/A Power Supply for PLC I/O0 3 0 9-2-1 CM-PB-SW1 Contact (Safety) ToPlc N/A N/A Emergency STOP (dual contact 1/2) Panic Button0 3 1 9-2-1 CM-PB-SW1 Contact (Safety) ToPlc N/A N/A Emergency STOP (dual contact 2/2) Panic Button0 3 2 9-2-1 CM-PB-SW2 Contact (Safety) ToPlc N/A N/A Reset Reset Button0 3 3 19-2-1 CM-PB-SW3 Contact (Safety) ToPlc N/A N/A Lock/Unlock Disable C1-CV interlock0 3 4 19-2-2 CM-EI Contact (Safety) ToPlc N/A N/A External Interlock from Monitoring PLC0 3 5 Contact (Safety) ToPlc N/A N/A No Connection0 3 6 Contact (Safety) ToPlc N/A N/A No Connection0 3 7 Contact (Safety) ToPlc N/A N/A No Connection0 4 0 4-1-1 CL-MG-VP Contact (Safety) ToPlc N/A N/A Contacts on Pump Monitoring pump power supply0 4 1 12-1-1 FL-MG-VP Contact (Safety) ToPlc N/A N/A Contacts on Pump Monitoring pump power supply0 4 2 7-1-1 CL-HV Contact (Safety) ToPlc N/A N/A EMERGENCY0 4 3 2-2-1 C1-ST Contact (Safety) ToPlc N/A N/A C1 Shutter Opened0 4 4 2-2-1 C1-ST Contact (Safety) ToPlc N/A N/A C1 Shutter Closed0 4 5 Contact (Safety) ToPlc N/A N/A No Connection0 4 6 Contact (Safety) ToPlc N/A N/A No Connection0 4 7 Contact (Safety) ToPlc N/A N/A No Connection0 5 0 7-1-1 CL-HV Contact (Safety) FromPlc N/A N/A EXT. INTERLOCK PLC->Interlock signal to IDX0 5 1 7-1-1 CL-HV Contact (Safety) FromPlc N/A N/A EXT. EMERGENCY PLC->Emergency signal to IDX0 5 2 7-1-1 CL-HV Contact (Safety) FromPlc N/A N/A RESET0 5 3 2-2-1 C1-ST Contact (Safety) FromPlc N/A N/A C1 Shutter Open/Close0 6 0 - CM-EI Contact (Safety) FromPlc N/A N/A Dew Point Alarm Dew-point temperature alarm->Monitoring PLC0 6 1 Contact (Safety) FromPlc N/A N/A No Connection0 6 2 Contact (Safety) FromPlc N/A N/A No Connection0 6 3 Contact (Safety) FromPlc N/A N/A No Connection0 7 0 7-1-1 CL-HV Digital PNP ToPlc N/A N/A STAND-BY Status0 7 1 7-1-1 CL-HV Digital PNP ToPlc N/A N/A OPERATE Status0 7 2 7-1-1 CL-HV Digital PNP ToPlc N/A N/A DOOR Status0 7 3 7-1-1 CL-HV Digital PNP ToPlc N/A N/A OCR Status0 7 4 7-1-1 CL-HV Digital PNP ToPlc N/A N/A OPR Status0 7 5 7-1-1 CL-HV Digital PNP ToPlc N/A N/A THERMAL Status0 7 6 7-1-1 CL-HV Digital PNP ToPlc N/A N/A AIRFLOW Status0 7 7 Digital PNP ToPlc N/A N/A No Connection0 8 0 7-1-1 CL-HV Digital PNP FromPlc N/A N/A STAND-BY ON0 8 1 7-1-1 CL-HV Digital PNP FromPlc N/A N/A STAND-BY OFF0 8 2 7-1-1 CL-HV Digital PNP FromPlc N/A N/A OPERATE ON0 8 3 7-1-1 CL-HV Digital PNP FromPlc N/A N/A OPERATE OFF0 8 4 7-1-1 CL-HV Digital PNP FromPlc N/A N/A BUZZER ON0 8 5 7-1-1 CL-HV Digital PNP FromPlc N/A N/A BUZZER OFF0 8 6 Digital PNP FromPlc N/A N/A No Connection0 8 7 Digital PNP FromPlc N/A N/A No Connection0 9 0 20-1-1 F*-FL-AV Digital PNP FromPlc N/A N/A Actuated Valve AV3 equivalent of prototype; *: A, U or B0 9 1 20-1-1 F*-SC-AV Digital PNP FromPlc N/A N/A Actuated Valve AV4 equivalent of prototype; *: A, U or B0 9 2 - CL-OW-PD Digital PNP FromPlc N/A N/A LOCAL CONTROL FLAG0 9 3 Digital PNP FromPlc N/A N/A No Connection0 9 4 Digital PNP FromPlc N/A N/A No Connection0 9 5 Digital PNP FromPlc N/A N/A No Connection0 9 6 Digital PNP FromPlc N/A N/A No Connection0 9 7 Digital PNP FromPlc N/A N/A No Connection0 10 0 9-2-1 CM-PLC1 System N/A N/A PLC Unit PWS0 11 0 7-1-1 CL-HV Analog Current ToPlc 1/320 kV VOLT.MON (0: 0V, 8000: 25kV)0 11 1 7-1-1 CL-HV Analog Current ToPlc 1/320 kV VOLT.MON OUTPUT1(0: 0V, 8000: 25kV)0 11 2 7-1-1 CL-HV Analog Current ToPlc 1/320 kV VOLT.MON OUTPUT2(0: 0V, 8000: 25kV)0 11 3 7-1-1 CL-HV Analog Current ToPlc 3/160 mA CURR.MON OUTPUT1 (0: 0mA, 8000: 150mA)0 11 4 7-1-1 CL-HV Analog Current ToPlc 3/160 mA CURR.MON OUTPUT2 (0: 0mA, 8000: 150mA)0 11 5 7-1-1 CL-HV Analog Current ToPlc 1/320 kV Ep-k.MON (0: 0V, 8000: 25kV)0 11 6 - CM-CW-FM0 Analog Current ToPlc 1/40 L/min Flow rate(0: 0L/min, 8000: 200L/min)0 11 7 Analog Current ToPlc N/A N/A No Connection0 12 0 7-1-1 CL-HV Analog Current FromPlc 1/40 mA CURR.CONT (0: 0mA, 8000: 200mA)0 12 1 Analog Current FromPlc N/A N/A No Connection0 13 0 - CL-OW-PT Analog Voltage ToPlc 1/1500 V PZT POT(0: 0V, 15000:10V)0 13 1 - CL-OW-PD Analog Voltage ToPlc 1/100 V Output voltage monitor(0: 0V 15000: 150V)0 13 2 3-1-1 C0-SC-PS Analog Voltage ToPlc 2/3 V DC offset Vottage Monitor(0: 0kV, 15000:10000V)0 13 3 3-1-4 C0-SC-LA Analog Voltage ToPlc 1/1500 V Intensity(0:0V, 15000: 10V) C0-SC-DT->C0-SC-DT preamplifier->C0-SC-LA0 13 4 - C0-SB-OM Analog Voltage ToPlc 1/1500 V (0:0V, 15000: 10V) OUT-HF terminal of Giga Corporation's OUTPUT MONITOR0 13 5 2-2-3 C1-PM Analog Voltage ToPlc 1/50 W Power (0:0 W, 15000: 300W) Branch input from CL-OS0 13 6 13-1-2 F*-FL-MFC Analog Voltage ToPlc 1/750 sccm FLOW PV (0: 0, 7500: 100%F.S= 10sccm) *: A, U or B0 13 7 5-2-1 F*-SC-MFC Analog Voltage ToPlc 1/750 sccm FLOW PV (0: 0, 7500: 100%F.S= 10sccm) *: A, U or B0 14 0 - CL-OW-PD Analog Voltage FromPlc 1/100 V PZT Control Voltage(0: 0V, 15000:150V)0 14 1 13-1-2 F*-FL-MFC Analog Voltage FromPlc 1/750 sccm FLOW SV (0: 0, 7500: 100%F.S= 10sccm) *: A, U or B0 14 2 5-2-1 F*-SC-MFC Analog Voltage FromPlc 1/750 sccm FLOW SV (0: 0, 7500: 100%F.S= 10sccm) *: A, U or B0 14 3 Analog Voltage FromPlc N/A N/A No Connection0 15 0 - CM-CW-TS0 Analog RTD ToPlc 1/100 degC Temperature gauge0 15 1 Analog RTD ToPlc N/A N/A No Connection0 15 2 Analog RTD ToPlc N/A N/A No Connection0 15 3 Analog RTD ToPlc N/A N/A d0 16 0 9-2-1 CM-PLC1 System N/A N/A End CoverCM-PLC2 I/O AssignmentGroup Module# Ch Old No. New No. PLC I/O Type Direction Conversion Factor EGU Signal Note1 0 9-2-1 CM-PLC2 System N/A N/A EtherCAT Coupler1 1 0 10-5-1 FL-OM-CB Serial 1/2ch N/A N/A RS232C/FIR Stage Serial RS232C/FIR stage1 1 1 Serial 2/2ch N/A N/A No Connection1 2 0 5-1-7 CL-HE-PG Contact (Safety) ToPlc N/A N/A Set Point He gas supply pressure1 2 1 5-1-8 CL-NC-PG Contact (Safety) ToPlc N/A N/A Set Point N2/CO2 gas supply pressure1 2 2 Contact (Safety) ToPlc N/A N/A No Connection1 2 3 Contact (Safety) ToPlc N/A N/A No Connection1 2 4 19-1-3 CM-WL Contact (Safety) ToPlc N/A N/A Water Leakage Ditector1 2 5 19-2-1 C1-CV-SW Contact (Safety) ToPlc N/A N/A C1 Cover Status1 2 6 16-1-2 FL-ST Contact (Safety) ToPlc N/A N/A FL Shutter Opened LSw1 2 7 16-1-2 FL-ST Contact (Safety) ToPlc N/A N/A FL Shutter Closed LSw1 3 0 2-2-2 C1-PM-M Contact (Safety) ToPlc N/A N/A Mirror Inserted N.O Location limit switch1 3 1 2-2-2 C1-PM-M Contact (Safety) ToPlc N/A N/A Mirror Inserted N.C End limit switch1 3 2 2-2-2 C1-PM-M Contact (Safety) ToPlc N/A N/A Mirror Removed N.O Location limit switch1 3 3 2-2-2 C1-PM-M Contact (Safety) ToPlc N/A N/A Mirror Removed N.C End limit switch1 3 4 6-1-3 C1-VL-M Contact (Safety) ToPlc N/A N/A Mirror Inserted N.O Location limit switch1 3 5 6-1-3 C1-VL-M Contact (Safety) ToPlc N/A N/A Mirror Inserted N.C End limit switch1 3 6 6-1-3 C1-VL-M Contact (Safety) ToPlc N/A N/A Mirror Removed N.O Location limit switch1 3 7 6-1-3 C1-VL-M Contact (Safety) ToPlc N/A N/A Mirror Removed N.C End limit switch1 4 0 5-1-6 CL-NC-AV Contact (Safety) FromPlc N/A N/A STV Open/Close Actuated Valve for N2/CO2 Gas1 4 1 5-1-5 CL-HE-AV Contact (Safety) FromPlc N/A N/A STV Open/Close Actuated Valve for He Gas1 4 2 16-1-2 FL-ST Contact (Safety) FromPlc N/A N/A FL Shutter Open/Close1 4 3 Contact (Safety) FromPlc N/A N/A No Connection1 5 0 2-2-2 C1-PM-M Contact (Safety) FromPlc N/A N/A Mirror Insert Enable1 5 1 2-2-2 C1-PM-M Contact (Safety) FromPlc N/A N/A Mirror Pull-out Enable1 5 2 6-1-3 C1-VL-M2 Contact (Safety) FromPlc N/A N/A Mirror Insert Enable1 5 3 6-1-3 C1-VL-M2 Contact (Safety) FromPlc N/A N/A Mirror Pull-out Enable1 6 0 Digital PNP ToPlc N/A N/A No Connection1 6 1 Digital PNP ToPlc N/A N/A No Connection1 6 2 Digital PNP ToPlc N/A N/A No Connection1 6 3 Digital PNP ToPlc N/A N/A No Connection1 6 4 Digital PNP ToPlc N/A N/A No Connection1 6 5 Digital PNP ToPlc N/A N/A No Connection1 6 6 Digital PNP ToPlc N/A N/A No Connection1 6 7 Digital PNP ToPlc N/A N/A No Connection1 7 0 2-2-2 C1-PM-M Digital PNP FromPlc N/A N/A Switch mirror movement direction1 7 1 6-1-3 C1-VL-M2 Digital PNP FromPlc N/A N/A Switch mirror movement direction1 7 2 Digital PNP FromPlc N/A N/A No Connection1 7 3 Digital PNP FromPlc N/A N/A No Connection1 7 4 Digital PNP FromPlc N/A N/A No Connection1 7 5 Digital PNP FromPlc N/A N/A No Connection1 7 6 Digital PNP FromPlc N/A N/A No Connection1 7 7 Digital PNP FromPlc N/A N/A No Connection1 8 0 なし CL-GT1-DT Analog Voltage ToPlc 2/3 mV Intensity(0:0mV, 15000:10000mV) PDA10A/M1 8 1 なし CL-GT2-DT Analog Voltage ToPlc 2/3 mV Intensity(0:0mV, 15000:10000mV) PDA10A/M1 8 2 なし C0-PM Analog Voltage ToPlc 1/50 W Power (0:0 W, 15000: 300W) VEGA1 8 3 11-3-1 FL-PM Analog Voltage ToPlc 1/50 W Power (0:0 W, 15000: 300W) VEGA1 8 4 10-5-1 FL-OM-CB Analog Voltage ToPlc 1/1500 V Monitor Voltage (0: 0V, 15000:10V) FIR stage controller1 8 5 4-2-5 C0-SC-PV Analog Voltage ToPlc 1/75 % Aperture PV (0: 0% 7500: 100%) Piezo valve1 8 6 12-1-3 FL-MG-PV Analog Voltage ToPlc 1/75 % Aperture PV (0: 0% 7500: 100%) Piezo valve1 8 7 Analog Voltage ToPlc N/A N/A No Connection1 9 0 4-2-5 C0-SC-PV Analog Voltage FromPlc 1/75 % Aperture SV (0: 0% 7500: 100%) Piezo valve1 9 1 12-1-3 FL-MG-PV Analog Voltage FromPlc 1/75 % Aperture SV (0: 0% 7500: 100%) Piezo valve1 9 2 Analog Voltage FromPlc N/A N/A No Connection1 9 3 Analog Voltage FromPlc N/A N/A No Connection1 10 0 9-2-1 CM-PLC2 System N/A N/A End CoverOPCUA Variables# Device EPICS PV Name EPICS Record Type Conversion Factor EGU OPCUA Variable NameStructure element(Only if the type of OPCUA variable is structure)PLC Structure Def PLC Variable Type Physical Channel Note0 CM-PLC1 bi N/A N/A CM_PLC1_sSts bMode sStsPLC BOOL N/A 0: LOCAL / 1: REMOTE1 CM-PLC1 mbbiDirect N/A N/A nIclkSummary1 sStsPLC WORD (16bit) N/A2 CM-PLC1 mbbiDirect N/A N/A nIclkSummary2 sStsPLC WORD (16bit) N/A3 CM-PLC1 mbbiDirect N/A N/A nWarnSummary1 sStsPLC WORD (16bit) N/A4 CM-PLC1 mbbiDirect N/A N/A nWarnSummary2 sStsPLC WORD (16bit) N/A5 CL-HV mbbiDirect N/A N/A CL_HV_sSts nStsSummary sStsCLHV WORD (16bit) N/A6 CL-HV ai 1/320 kV nVoltMon sStsCLHV UINT (16bit) CM-PLC1/Unit#11/Ch#07 CL-HV ai 1/320 kV nVoltMonOutput1 sStsCLHV UINT (16bit) CM-PLC1/Unit#11/Ch#18 CL-HV ai 1/320 kV nVoltMonOutput2 sStsCLHV UINT (16bit) CM-PLC1/Unit#11/Ch#29 CL-HV ai 3/160 mA nCurrMonOutput1 sStsCLHV UINT (16bit) CM-PLC1/Unit#11/Ch#310 CL-HV ai 3/160 mA nCurrMonOutput2 sStsCLHV UINT (16bit) CM-PLC1/Unit#11/Ch#411 CL-HV ai 1/320 kV nEpkMon sStsCLHV UINT (16bit) CM-PLC1/Unit#11/Ch#512 CL-HV bo N/A N/A CL_HV_sCntl bReqStandbyOn sCntlCLHV BOOL CM-PLC1/Unit#8/Ch#013 CL-HV bo N/A N/A bReqStandbyOff sCntlCLHV BOOL CM-PLC1/Unit#8/Ch#114 CL-HV bo N/A N/A bReqOperateOn sCntlCLHV BOOL CM-PLC1/Unit#8/Ch#215 CL-HV bo N/A N/A bReqOperateOff sCntlCLHV BOOL CM-PLC1/Unit#8/Ch#316 CL-HV bo N/A N/A bReqBuzzerOn sCntlCLHV BOOL CM-PLC1/Unit#8/Ch#417 CL-HV bo N/A N/A bReqBuzzerOff sCntlCLHV BOOL CM-PLC1/Unit#8/Ch#518 CL-HV ao 1/40 mA nCurrent sCntlCLHV UINT (16bit) CM-PLC1/Unit#12/Ch#019 CL-HV mbbi N/A N/A CL_HV_sSeqSts nState sSeqSts WORD (16bit) N/A20 CL-HV longin N/A N/A nCycle sSeqSts UINT (16bit) N/A21 CL-HV longout N/A N/A nMaxCycle sSeqSts UINT (16bit) N/A22 CL-HV mbbiDirect N/A N/A nErrorCode sSeqSts WORD (16bit) N/A Added due to unknown cause at the end of error in prototype system23 CL-HV bo N/A N/A CL_HV_sSeqCntl bStart sSeqCntl BOOL N/A24 CL-HV bo N/A N/A bAbort sSeqCntl BOOL N/A25 CL-HV bo N/A N/A bReset sSeqCntl BOOL N/A26 CL-HV ao 1 - fPDRatio sSeqCntl REAL (32bit) N/A27 CL-HV ao 1 s fPDDelay sSeqCntl REAL (32bit) N/A28 CL-HV ao 1 slm fFlowNC## sSeqCntl REAL (32bit) N/A ##: 01~3229 CL-HV ao 1 slm fFlowHE## sSeqCntl REAL (32bit) N/A ##: 01~3230 CL-HV ao 1 mA fCurrent## sSeqCntl REAL (32bit) N/A ##: 01~3231 CL-HV ao 1 s fTGas## sSeqCntl REAL (32bit) N/A ##: 01~3232 CL-HV ao 1 s fTHV## sSeqCntl REAL (32bit) N/A ##: 01~3233 CL-GT1-DT ai 2/3 mV CL_GT1_DT_nIntensity UINT (16bit) CM-PLC2/Unit#8/Ch#034 CL-GT2-DT ai 2/3 mV CL_GT2_DT_nIntensity UINT (16bit) CM-PLC2/Unit#8/Ch#135 CL-OW-PD mbbi N/A N/A CL_OW_PD_sSts nMode sStsCLOWPD WORD (16bit) N/A36 CL-OW-PD ai 1/100 V nPztPV sStsCLOWPD UINT (16bit) CM-PLC1/Unit#13/Ch#137 CL-OW-PD ai 1/1500 V nPot sStsCLOWPD UINT (16bit) CM-PLC1/Unit#13/Ch#038 CL-OW-PD longin 1 s nPID_P sStsCLOWPD UINT (16bit) N/A39 CL-OW-PD longin 1 s nPID_I sStsCLOWPD UINT (16bit) N/A40 CL-OW-PD longin 1 s nPID_D sStsCLOWPD UINT (16bit) N/A41 CL-OW-PD mbbo N/A N/A CL_OW_PD_sCntl nMode sCntlCLOWPD WORD (16bit) N/A42 CL-OW-PD ao 1/100 V nPztSP sStsCLOWPD UINT (16bit) CM-PLC1/Unit#14/Ch#043 CL-OW-PD ao 100 V nManSP sCntlCLOWPD UINT (16bit) N/A44 CL-OW-PD longout 1 s nPID_P sCntlCLOWPD UINT (16bit) N/A45 CL-OW-PD longout 1 s nPID_I sCntlCLOWPD UINT (16bit) N/A46 CL-OW-PD longout 1 s nPID_D sCntlCLOWPD UINT (16bit) N/A47 C0-PM ai 1/50 W C0_PM_nIntensity UINT (16bit) CM-PLC2/Unit#8/Ch#248 C0-SB-OM ai 1/1500 V C0_SB_OM_nVolt UINT (16bit) CM-PLC1/Unit#13/Ch#4 Output of the output monitor49 C0-SC-PS ai 1/1500 V C0_SC_PS_nVolt UINT (16bit) CM-PLC1/Unit#13/Ch#2 DC Offset Voltage50 C0-SC-LA ai 1/1500 V C0_SC_LA_nVolt UINT (16bit) CM-PLC1/Unit#13/Ch#351 C1-ST mbbiDirect N/A N/A C1_ST_sSts nSummary sStsST WORD (16bit) N/A52 C1-ST bi N/A N/A bOpenClose sStsST BOOL N/A53 C1-ST bo N/A N/A C1_ST_sCntl bReqOpen sCntlOpCl BOOL N/A54 C1-ST bo N/A N/A bReqClose sCntlOpCl BOOL N/A55 C1-VL-M2 mbbiDirect N/A N/A C1_VL_M2_sSts nSummary sStsMM WORD (16bit) N/A56 C1-VL-M2 bi N/A N/A bPosition sStsMM BOOL N/A57 C1-VL-M2 bo N/A N/A C1_VL_M2_sCntl bReqInsert sCntlMM BOOL N/A58 C1-VL-M2 bo N/A N/A bReqRemove sCntlMM BOOL N/A59 C1-PM-M mbbiDirect N/A N/A C1_PM_M_sSts nSummary sStsMM WORD (16bit) N/A60 C1-PM-M bi N/A N/A bPosition sStsMM BOOL N/A61 C1-PM-M bo N/A N/A C1_PM_M_sCntl bReqInsert sCntlMM BOOL N/A62 C1-PM-M bo N/A N/A bReqRemove sCntlMM BOOL N/AOPCUA Variables# Device EPICS PV Name EPICS Record Type Conversion Factor EGU OPCUA Variable NameStructure element(Only if the type of OPCUA variable is structure)PLC Structure Def PLC Variable Type Physical Channel Note63 C1-PM ai 1/50 W C1_PM_nIntensity UINT (16bit) CM-PLC1/Unit#13/Ch#564 FL-OM-CB bi N/A N/A FL_OM_CB_sSts bRemote sStsFLOMCB BOOL N/A 0: LOCAL / 1: REMOTE65 FL-OM-CB bi N/A N/A bAuto sStsFLOMCB BOOL N/A66 FL-OM-CB bi N/A N/A bBusy sStsFLOMCB BOOL N/A67 FL-OM-CB bi N/A N/A bOverHeat sStsFLOMCB BOOL N/A68 FL-OM-CB bi N/A N/A bPhase sStsFLOMCB BOOL N/A 0: POSITIVE / 1: NEGATIVE69 FL-OM-CB ai 1/10 s nAverage sStsFLOMCB UINT (16bit) N/A70 FL-OM-CB ai 1/1000 V nReference sStsFLOMCB UINT (16bit) N/A71 FL-OM-CB ai 1/10 um/s nSpeed sStsFLOMCB UINT (16bit) N/A72 FL-OM-CB ai 1/10 um nJogStep sStsFLOMCB UINT (16bit) N/A73 FL-OM-CB ai 1/1000 V nSignal sStsFLOMCB UINT (16bit) N/A74 FL-OM-CB ai 1/1000 mm nAbsPos sStsFLOMCB UINT (16bit) N/A75 FL-OM-CB ai 1/1000 mm nRelPos sStsFLOMCB UINT (16bit) N/A76 FL-OM-CB ai 1/1500 V nMonitor sStsFLOMCB UINT (16bit) CM-PLC2/Unit#8/Ch#477 FL-OM-CB bo N/A N/A FL_OM_CB_sCntl bCommReset sCntlFLOMCB BOOL N/A78 FL-OM-CB bo N/A N/A bReqManual sCntlFLOMCB BOOL N/A79 FL-OM-CB bo N/A N/A bReqAuto sCntlFLOMCB BOOL N/A80 FL-OM-CB bo N/A N/A bSetParam sCntlFLOMCB BOOL N/A81 FL-OM-CB bo N/A N/A bJogP sCntlFLOMCB BOOL N/A82 FL-OM-CB bo N/A N/A bJogM sCntlFLOMCB BOOL N/A83 FL-OM-CB bo N/A N/A bMoveP sCntlFLOMCB BOOL N/A84 FL-OM-CB bo N/A N/A bMoveM sCntlFLOMCB BOOL N/A85 FL-OM-CB bo N/A N/A bExecOrigin sCntlFLOMCB BOOL N/A86 FL-OM-CB bo N/A N/A bStop sCntlFLOMCB BOOL N/A87 FL-OM-CB longout N/A N/A nPhase sCntlFLOMCB UINT (16bit) N/A 0: POSITIVE / 1: NEGATIVE88 FL-OM-CB ao 1/10 s nAverage sCntlFLOMCB UINT (16bit) N/A89 FL-OM-CB ao 1/1000 V nReference sCntlFLOMCB UINT (16bit) N/A90 FL-OM-CB ao 1/10 um/s nSpeed sCntlFLOMCB UINT (16bit) N/A91 FL-OM-CB ao 1/10 um nJogStep sCntlFLOMCB UINT (16bit) N/A92 FL-OM-CB ao 1/1000 V nSignal sCntlFLOMCB UINT (16bit) N/A93 FL-OM-CB ao 1/1000 mm nAbsPos sCntlFLOMCB UINT (16bit) N/A94 FL-OM-CB ao 1/1000 mm nRelPos sCntlFLOMCB UINT (16bit) N/A95 FL-ST mbbiDirect N/A N/A FL_ST_sSts nSummary sStsST WORD (16bit) N/A96 FL-ST bi N/A N/A bOpenClose sStsST BOOL N/A97 FL-ST bo N/A N/A FL_ST_sCntl bReqOpen sCntlOpCl BOOL N/A98 FL-ST bo N/A N/A bReqClose sCntlOpCl BOOL N/A99 FL-PM ai 1/50 W FL-PM_nIntensity UINT (16bit) CM-PLC2/Unit#8/Ch#3100 CL-HE-AV bi N/A N/A CL_HE_AV_bSts BOOL N/A101 CL-HE-AV bo N/A N/A CL_HE_AV_sCntl bReqOpen sCntlOpCl BOOL N/A102 CL-HE-AV bo N/A N/A bReqClose sCntlOpCl BOOL N/A103 CL-NC-AV bi N/A N/A CL_HE_AV_bSts BOOL N/A104 CL-NC-AV bo N/A N/A CL_HE_AV_sCntl bReqOpen sCntlOpCl BOOL N/A105 CL-NC-AV bo N/A N/A bReqClose sCntlOpCl BOOL N/A106 CL-MG-PG2 bi N/A N/A CL_MG_PG2_Sts bValid sStsGauge BOOL N/A107 CL-MG-PG2 bi N/A N/A bOverrange sStsGauge BOOL N/A108 CL-MG-PG2 bi N/A N/A bUnderrange sStsGauge BOOL N/A109 CL-MG-PG2 ai 100 Pa fSensorValue sStsGauge REAL N/A110 CL-MG-PG1 bi N/A N/A CL_MG_PG1_Sts bValid sStsGauge BOOL N/A111 CL-MG-PG1 bi N/A N/A bOverrange sStsGauge BOOL N/A112 CL-MG-PG1 bi N/A N/A bUnderrange sStsGauge BOOL N/A113 CL-MG-PG1 ai 100 Pa fSensorValue sStsGauge REAL (32bit) N/A114 C0-SC-PG bi N/A N/A C0_SC_PG_Sts bValid sStsGauge BOOL N/A115 C0-SC-PG bi N/A N/A bOverrange sStsGauge BOOL N/A116 C0-SC-PG bi N/A N/A bUnderrange sStsGauge BOOL N/A117 C0-SC-PG ai 100 Pa fSensorValue sStsGauge REAL (32bit) N/A118 FL-MG-PG bi N/A N/A FL_MG_PG_Sts bValid sStsGauge BOOL N/A119 FL-MG-PG bi N/A N/A bOverrange sStsGauge BOOL N/A120 FL-MG-PG bi N/A N/A bUnderrange sStsGauge BOOL N/A121 FL-MG-PG ai 100 Pa fSensorValue sStsGauge REAL (32bit) N/A122 FL-HE-MFC mbbiDirect N/A N/A FL_HE_MFC_Sts nStsSummary sStsMFC WORD (16bit) N/A123 FL-HE-MFC ai 1 sccm fFlowPV sStsMFC REAL (32bit) N/A124 FL-HE-MFC ai 1 sccm fFlowSPRB sStsMFC REAL (32bit) N/A125 FL-HE-MFC mbbo N/A N/A FL_HE_MFC_Cntl nActuatorCntl sCntlMFC USINT (8bit) N/AOPCUA Variables# Device EPICS PV Name EPICS Record Type Conversion Factor EGU OPCUA Variable NameStructure element(Only if the type of OPCUA variable is structure)PLC Structure Def PLC Variable Type Physical Channel Note126 FL-HE-MFC ao 1 sccm fFlowSP sCntlMFC REAL (32bit) N/A127 FL-HE-MFC ao 1 % fActuatorPosSP sCntlMFC REAL (32bit) N/A128 CL-NC-MFC mbbiDirect N/A N/A CL_NC_MFC_Sts nStsSummary sStsMFC WORD (16bit) N/A129 CL-NC-MFC ai 1 slm fFlowPV sStsMFC REAL (32bit) N/A130 CL-NC-MFC ai 1 slm fFlowSPRB sStsMFC REAL (32bit) N/A131 CL-NC-MFC mbbo N/A N/A CL_NC_MFC_Cntl nActuatorCntl sCntlMFC USINT (8bit) N/A132 CL-NC-MFC ao 1 slm fFlowSP sCntlMFC REAL (32bit) N/A133 CL-NC-MFC ao 1 % fActuatorPosSP sCntlMFC REAL (32bit) N/A134 CL-HE-MFC mbbiDirect N/A N/A CL_HE_MFC_Sts nStsSummary sStsMFC WORD (16bit) N/A135 CL-HE-MFC ai 1 slm fFlowPV sStsMFC REAL (32bit) N/A136 CL-HE-MFC ai 1 slm fFlowSPRB sStsMFC REAL (32bit) N/A137 CL-HE-MFC mbbo N/A N/A CL_HE_MFC_Cntl nActuatorCntl sCntlMFC USINT (8bit) N/A138 CL-HE-MFC ao 1 slm fFlowSP sCntlMFC REAL (32bit) N/A139 CL-HE-MFC ao 1 % fActuatorPosSP sCntlMFC REAL (32bit) N/A140 CL-MG-VP bi N/A N/A CL_MG_VP_bRunning BOOL CM-PLC1/Unit#4/Ch#0141 FL-MG-VP bi N/A N/A FL_MG_VP_bRunning BOOL CM-PLC1/Unit#4/Ch#1142 F*-FL-AV bi N/A N/A F*_FL_AV_bSts BOOL N/A143 F*-FL-AV bo N/A N/A F*_FL_AV_sCntl bReqOpen sCntlOpCl BOOL N/A144 F*-FL-AV bo N/A N/A bReqClose sCntlOpCl BOOL N/A145 F*-SC-AV bi N/A N/A F*_FL_AV_bSts BOOL N/A146 F*-SC-AV bo N/A N/A F*_FL_AV_sCntl bReqOpen sCntlOpCl BOOL N/A147 F*-SC-AV bo N/A N/A bReqClose sCntlOpCl BOOL N/A148 F*-FL-MFC ai 1/750 sccm F*_FL_MFC_fFlowPV UINT (16bit) CM-PLC1/Unit#13/Ch#6149 F*-FL-MFC ao 1/750 sccm F*_FL_MFC_fFlowSP UINT (16bit) CM-PLC1/Unit#14/Ch#1150 F*-SC-MFC ai 1/750 sccm F*_SC_MFC_fFlowPV UINT (16bit) CM-PLC1/Unit#13/Ch#7151 F*-SC-MFC ao 1/750 sccm F*_SC_MFC_fFlowSP UINT (16bit) CM-PLC1/Unit#14/Ch#2152 C0-SC-PV bi N/A N/A C0_SC_PV_sSts nMode sStsPV BOOL N/A153 C0-SC-PV longin 1 s nPID_P sStsPV UINT (16bit) N/A154 C0-SC-PV longin 1 s nPID_I sStsPV UINT (16bit) N/A155 C0-SC-PV longin 1 s nPID_D sStsPV UINT (16bit) N/A156 C0-SC-PV ai 1/75 % nApparturePV sStsPV UINT (16bit) CM-PLC2/Unit#8/Ch#5157 C0-SC-PV bo N/A N/A C0_SC_PV_sCntl nMode sCntlPV BOOL N/A158 C0-SC-PV longout 1 s nPID_P sCntlPV UINT (16bit) N/A159 C0-SC-PV longout 1 s nPID_I sCntlPV UINT (16bit) N/A160 C0-SC-PV longout 1 s nPID_D sCntlPV UINT (16bit) N/A161 C0-SC-PV ao 1/75 % nAppartureSP sCntlPV UINT (16bit) CM-PLC2/Unit#9/Ch#0162 C0-SC-PV ao 1 Pa fPressureSP sCntlPV REAL (32bit) N/A163 FL-MG-PV bi N/A N/A FL_MG_PV_sSts nMode sStsPV BOOL N/A164 FL-MG-PV longin 1 s nPID_P sStsPV UINT (16bit) N/A165 FL-MG-PV longin 1 s nPID_I sStsPV UINT (16bit) N/A166 FL-MG-PV longin 1 s nPID_D sStsPV UINT (16bit) N/A167 FL-MG-PV ai 1/75 % nApparturePV sStsPV UINT (16bit) CM-PLC2/Unit#8/Ch#6168 FL-MG-PV bo N/A N/A FL_MG_PV_sCntl nMode sCntlPV BOOL N/A169 FL-MG-PV longout 1 s nPID_P sCntlPV UINT (16bit) N/A170 FL-MG-PV longout 1 s nPID_I sCntlPV UINT (16bit) N/A171 FL-MG-PV longout 1 s nPID_D sCntlPV UINT (16bit) N/A172 FL-MG-PV ao 1/75 % nAppartureSP sCntlPV UINT (16bit) CM-PLC2/Unit#9/Ch#1173 FL-MG-PV ao 1 Pa fPressureSP sCntlPV REAL (32bit) N/A174 CM-CW-FM0 ai 1/40 L/min CM_CW_FM0_fFlow UINT (16bit) CM-PLC1/Unit#11/Ch#6175 CM-CW-TS0 ai 1 degC CM_CW_TS0_fTemp UINT (16bit) CM-PLC1/Unit#15/Ch#0176 CM-TH mbbiDirect N/A N/A CM_TH_sSts nStsSummary sStsTH WORD (16bit) N/A177 CM-TH ai 1 degC fTemp sStsTH REAL (32bit) N/A178 CM-TH ai 1 %RH fRH sStsTH REAL (32bit) N/A179 CM-TH ai 1 degC fDewPoint sStsTH REAL (32bit) N/A180 CM-TH bo N/A N/A CM_TH_bCommReset BOOL N/A181 CM-PB bo N/A N/A CM_PB_bSoftReset BOOL N/A182 CM-TP bi N/A N/A CM_TP_bRemote BOOL N/ABitmap (mbbi, mbbo)# Variable type Raw Value String Label1 CL_HV_sSeqSts.nState mbbi 0 (Reserved)2 1 Idle3 2 Set Flow Rate4 3 Wait Flow Stabilization5 4 Set HV6 5 Watch7 6 Cycle End8 7 Done9 8 Abort10 9 Error17 CL_OW_PD_sSts.nMode mbbi 0 (Reserved)18 1 Manual (Local POT)19 2 Manual20 3 Auto Sweap21 4 Auto PID33 CL_OW_PD_sCntl.nMode mbbo 0 (Reserved)34 1 Manual (Local POT)35 2 Manual36 3 Auto Sweap37 4 Auto PID49 FL_HE_MFC_Cntl.nActuatorCntl mbbo 0 Flow control (Feedback)50 1 Valve Drive Voltage (Position)51 2 Fully Open52 3 Fully Close53 4 Fixed valve drive voltage (Freeze Position)57 CL_NC_MFC_Cntl.nActuatorCntl mbbo 0 Flow control (Feedback)58 1 Valve Drive Voltage (Position)59 2 Fully Open60 3 Fully Close61 4 Fixed valve drive voltage (Freeze Position)65 CL_HE_MFC_Cntl.nActuatorCntl mbbo 0 Flow control (Feedback)66 1 Valve Drive Voltage (Position)67 2 Fully Open68 3 Fully Close69 4 Fixed valve drive voltage (Freeze Position)Bitmap(mbbiDirect)# Variable Bit Description Note1 CM_PLC1_sSts.nIclkSummary1 0(LSB) CL-NC-AV Operation Permission 1: Permitted / 0: Prohibitted2 1 CL-HE-AV Operation Permission 1: Permitted / 0: Prohibitted3 2 CL-HV Operation Permission 1: Permitted / 0: Prohibitted4 3 C1-ST Operation Permission 1: Permitted / 0: Prohibitted5 4 C1-PM-M Operation Permission 1: Permitted / 0: Prohibitted6 5 C1-VL-M2 Operation Permission 1: Permitted / 0: Prohibitted7 6 CL-HE-MFC Operation Permission 1: Permitted / 0: Prohibitted8 7 CL-NC-MFC Operation Permission 1: Permitted / 0: Prohibitted9 8 FL-HE-MFC Operation Permission 1: Permitted / 0: Prohibitted10 9 FL-ST Operation Permission 1: Permitted / 0: Prohibitted11 10 FL-OM-CB Operation Permission 1: Permitted / 0: Prohibitted12 11 (Reserved)13 12 (Reserved)14 13 (Reserved)15 14 (Reserved)16 15 (Reserved)17 CM_PLC1_sSts.nIclkSummary2 0(LSB) CM-PLC1 Safety Communication Status 1: Normal / 0: Error18 1 CM-PLC2 Safety Communication Status 1: Normal / 0: Error19 2 CM-WL Water Leakage Detection 1: Normal / 0: Water Leakage20 3 CM-PB-SW1 Status 1: Normal / 0: SW1 Emergency STOP Activated21 4 CM-PB-SW3 Status 1: SW3 Enabled (bypass C1-CV-SW interlock)22 5 C1-CV-SW Status 1: Normal / 0: Cover Removed23 6 CM-EI Dew Point Alarm 1: Normal / 0: Alarm24 7 CM-EI External Interlock Signal from Monitoring PLC 1: Normal / 0: Interlock Activated25 8 CL-HE-PG SetPoint Status 1: Normal / 0: Error26 9 CL-NC-PG SetPoint Status 1: Normal / 0: Error27 10 (Reserved)28 11 (Reserved)29 12 (Reserved)30 13 (Reserved)31 14 (Reserved)32 15 (Reserved)33 CM_PLC1_sSts.nWarnSummary1 0(LSB) EtherCAT Slave Communication Status (CM-PLC2) 1: Normal / 0: Error34 1 EtherCAT Slave Communication Status (CL-MG-PG2) 1: Normal / 0: Error35 2 EtherCAT Slave Communication Status (CL-MG-PG1) 1: Normal / 0: Error36 3 EtherCAT Slave Communication Status (C0-SC-PG) 1: Normal / 0: Error37 4 EtherCAT Slave Communication Status (FL-MG-PG) 1: Normal / 0: Error38 5 EtherCAT Slave Communication Status (FL-HE-MFC) 1: Normal / 0: Error39 6 EtherCAT Slave Communication Status (CL-NC-MFC) 1: Normal / 0: Error40 7 EtherCAT Slave Communication Status (CL-HE-MFC) 1: Normal / 0: Error41 8 (Reserved)42 9 (Reserved)43 10 (Reserved)44 11 (Reserved)45 12 (Reserved)46 13 (Reserved)47 14 (Reserved)48 15 (Reserved)49 CM_PLC1_sSts.nWarnSummary2 0(LSB) (Reserved)50 1 (Reserved)51 2 (Reserved)52 3 (Reserved)53 4 (Reserved)54 5 (Reserved)55 6 (Reserved)56 7 (Reserved)57 8 (Reserved)58 9 (Reserved)59 10 (Reserved)60 11 (Reserved)61 12 (Reserved)62 13 (Reserved)63 14 (Reserved)64 15 (Reserved)Bitmap(mbbiDirect)# Variable Bit Description Note65 CL_HV_sSts.nStsSummary 0(LSB) EMERGENCY 1: Emergency / 0: Normal66 1 (Reserved)67 2 (Reserved)68 3 (Reserved)69 4 (Reserved)70 5 (Reserved)71 6 (Reserved)72 7 (Reserved)73 8 CL-HV STAND-BY 1: ON / 0: OFF74 9 CL-HV OPERATE 1: ON / 0: OFF75 10 CL-HV DOOR 1: Error / 0: Normal76 11 CL-HV OCR 1: Error / 0: Normal77 12 CL-HV OPR 1: Error / 0: Normal78 13 CL-HV THERMAL 1: Error / 0: Normal79 14 CL-HV AIRFLOW 1: Error / 0: Normal80 15 (Reserved)81 CL_HV_sSeqSts.nErrorCode 0(LSB) PD Threshold Error 1: PD Threshold Check Failed82 1 Current Unbalance Error 1: Current Balance Check Failed83 2 Flow Setting Error 1: CL-HE-MFC Flow Setting Failed84 3 Flow Setting Error 1: CL-NC-MFC Flow Setting Failed85 4 (Reserved)86 5 (Reserved)87 6 (Reserved)88 7 Abort by User 1: Aborted by user89 8 (Reserved)90 9 Error/Abort 1: Error/Abort on Sequence State #291 10 Error/Abort 1: Error/Abort on Sequence State #392 11 (Reserved)93 12 Error/Abort 1: Error/Abort on Sequence State #594 13 Error/Abort 1: Error/Abort on Sequence State #695 14 (Reserved)96 15 (Reserved)97 C1_VL_M2_sSts.nSummary 0(LSB) Device Fault 1: Anomaly (e.g. limit switch mismatch)98 1 IsInserted 1: Exists on the light path99 2 IsRemoved 1: Moved out of the light path100 3 (Reserved)101 4 (Reserved)102 5 (Reserved)103 6 (Reserved)104 7 (Reserved)105 8 (Reserved)106 9 (Reserved)107 10 (Reserved)108 11 (Reserved)109 12 (Reserved)110 13 (Reserved)111 14 (Reserved)112 15 (Reserved)113 C1_PM_M_sSts.nSummary 0(LSB) Device Fault 1: Anomaly (e.g. limit switch mismatch)114 1 IsInserted 1: Exists on the light path115 2 IsRemoved 1: Moved out of the light path116 3 (Reserved)117 4 (Reserved)118 5 (Reserved)119 6 (Reserved)120 7 (Reserved)121 8 (Reserved)122 9 (Reserved)123 10 (Reserved)124 11 (Reserved)125 12 (Reserved)126 13 (Reserved)127 14 (Reserved)128 15 (Reserved)Bitmap(mbbiDirect)# Variable Bit Description Note129 C1_ST_sSts.nSummary 0(LSB) Device Fault 1: Anomaly (e.g. limit switch mismatch)130 1 IsOpened 1: Open131 2 IsClosed 1: Closed132 3 (Reserved)133 4 (Reserved)134 5 (Reserved)135 6 (Reserved)136 7 (Reserved)137 8 (Reserved)138 9 (Reserved)139 10 (Reserved)140 11 (Reserved)141 12 (Reserved)142 13 (Reserved)143 14 (Reserved)144 15 (Reserved)145 FL_ST_sSts.nSummary 0(LSB) Device Fault 1: Anomaly (e.g. limit switch mismatch)146 1 IsOpened 1: Open147 2 IsClosed 1: Closed148 3 (Reserved)149 4 (Reserved)150 5 (Reserved)151 6 (Reserved)152 7 (Reserved)153 8 (Reserved)154 9 (Reserved)155 10 (Reserved)156 11 (Reserved)157 12 (Reserved)158 13 (Reserved)159 14 (Reserved)160 15 (Reserved)161 FL_HE_MFC_Sts.nStsSummary 0(LSB) Device Fault 1: Error (error, failure, etc.)162 1 Service in Progress SEC-N117 0x600F:01 Status / 1: Command object is being executed163 2 Invalid Data Input SEC-N117 0x600F:02 Status / 1: Invalid data set in RxPDO164 3 Ramp Active SEC-N117 0x600F:03 Status / 1: Ramp is being executed165 4 Valve Control Mode (fully-open) SEC-N117 0x600F:04 Status / 1: Fully open166 5 Valve Control Mode (fully-closed) SEC-N117 0x600F:05 Status / 1: Fully closed167 6 Valve Control Mode (position control) SEC-N117 0x600F:06 Status / 1: Valve drive voltage under direct control168 7 Communication Error 1: Communication error169 8 Active Device Warning SEC-N117 0xF380:00 Active Exception Status bit0170 9 Active Manufacturer Warning SEC-N117 0xF380:00 Active Exception Status bit1171 10 Active Device Error SEC-N117 0xF380:00 Active Exception Status bit2172 11 Active Manufacturer Error SEC-N117 0xF380:00 Active Exception Status bit3173 12 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit4 (Reserved/Always 0)174 13 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit5 (Reserved/Always 0)175 14 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit6 (Reserved/Always 0)176 15 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit7 (Reserved/Always 0)177 CL_NC_MFC_Sts.nStsSummary 0(LSB) Device Fault 1: Error (error, failure, etc.)178 1 Service in Progress SEC-N117 0x600F:01 Status / 1: Command object is being executed179 2 Invalid Data Input SEC-N117 0x600F:02 Status / 1: Invalid data set in RxPDO180 3 Ramp Active SEC-N117 0x600F:03 Status / 1: Ramp is being executed181 4 Valve Control Mode (fully-open) SEC-N117 0x600F:04 Status / 1: Fully open182 5 Valve Control Mode (fully-closed) SEC-N117 0x600F:05 Status / 1: Fully closed183 6 Valve Control Mode (position control) SEC-N117 0x600F:06 Status / 1: Valve drive voltage under direct control184 7 Communication Error 1: Communication error185 8 Active Device Warning SEC-N117 0xF380:00 Active Exception Status bit0186 9 Active Manufacturer Warning SEC-N117 0xF380:00 Active Exception Status bit1187 10 Active Device Error SEC-N117 0xF380:00 Active Exception Status bit2188 11 Active Manufacturer Error SEC-N117 0xF380:00 Active Exception Status bit3189 12 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit4 (Reserved/Always 0)190 13 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit5 (Reserved/Always 0)191 14 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit6 (Reserved/Always 0)192 15 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit7 (Reserved/Always 0)Bitmap(mbbiDirect)# Variable Bit Description Note193 CL_HE_MFC_Sts.nStsSummary 0(LSB) Device Fault 1: Error (error, failure, etc.)194 1 Service in Progress SEC-N117 0x600F:01 Status / 1: Command object is being executed195 2 Invalid Data Input SEC-N117 0x600F:02 Status / 1: Invalid data set in RxPDO196 3 Ramp Active SEC-N117 0x600F:03 Status / 1: Ramp is being executed197 4 Valve Control Mode (fully-open) SEC-N117 0x600F:04 Status / 1: Fully open198 5 Valve Control Mode (fully-closed) SEC-N117 0x600F:05 Status / 1: Fully closed199 6 Valve Control Mode (position control) SEC-N117 0x600F:06 Status / 1: Valve drive voltage under direct control200 7 Communication Error 1: Communication error201 8 Active Device Warning SEC-N117 0xF380:00 Active Exception Status bit0202 9 Active Manufacturer Warning SEC-N117 0xF380:00 Active Exception Status bit1203 10 Active Device Error SEC-N117 0xF380:00 Active Exception Status bit2204 11 Active Manufacturer Error SEC-N117 0xF380:00 Active Exception Status bit3205 12 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit4 (Reserved/Always 0)206 13 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit5 (Reserved/Always 0)207 14 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit6 (Reserved/Always 0)208 15 (Reserved) SEC-N117 0xF380:00 Active Exception Status bit7 (Reserved/Always 0)209 CM_TH_sSts.nStsSummary 0(LSB) Device Fault 1: Error (error, failure, etc.)210 1 (Reserved)211 2 (Reserved)212 3 (Reserved)213 4 (Reserved)214 5 (Reserved)215 6 (Reserved)216 7 Communication Error 1: Communication error217 8 (Reserved)218 9 (Reserved)219 10 (Reserved)220 11 (Reserved)221 12 (Reserved)222 13 (Reserved)223 14 (Reserved)224 15 (Reserved)